Patent classifications
H
ELECTRICITY
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H01
ELECTRIC ELEMENTS
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H01J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
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2237/00
Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
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H01J2237/245
Detection characterised by the variable being measured
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H01J2237/24571
Measurements of non-electric or non-magnetic variables
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H01J2237/24578
Spatial variables, e.g. position, distance
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