Patent classifications
H
H01
H01J
2237/00
H01J2237/26
H01J2237/282
H01J2237/2823
H01J2237/2823
Method and system for automatic zone axis alignment
12362135
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2025-07-15
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Automatic alignment of the zone axis of a sample and a charged particle beam is achieved based on a diffraction pattern of the sample. An area corresponding to the Laue circle is segmented using a trained network. The sample is aligned with the charged particle beam by tilting the sample with a zone axis tilt determined based on the segmented area.