Patent classifications
H
ELECTRICITY
Load children
H01
ELECTRIC ELEMENTS
Load children
H01J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
Load children
2237/00
Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
Load children Filter patents View analytics View as hierarchy
H01J2237/30
Electron or ion beam tubes for processing objects
Load children Filter patents View analytics View as hierarchy
H01J2237/317
Processing objects on a microscale
Load children Filter patents View analytics View as hierarchy
H01J2237/31732
Depositing thin layers on selected microareas
Load children Filter patents View analytics View as hierarchy