A plasma processing device may include first and second processing devices. The first processing device may include a first chamber, a first exhaust pump which provides, into the first chamber, a first pressure equal to or higher than 0.1 Pa and equal to or lower than 0.3 Pa while depressurizing the first chamber, a first holding unit which holds resin, a first gas introduction unit which introduces, into the first chamber, first gas for desorbing at least a part of atoms constituting the resin from a surface of the resin when turned into plasma, and a first plasma generation unit which turns the first gas into plasma at the first pressure. The second processing device may include a grounded second chamber, a second exhaust pump which provides, into the second chamber, a second pressure equal to or higher than 30% and equal to or lower than 50% of the first pressure at which the desorption step has been performed while depressurizing the second chamber, a second holding unit which holds the resin processed in the first chamber and to which a first DC voltage may be applied, a second gas introduction unit which introduces, into the second chamber, second gas to generate hydroxyl radicals by being turned into plasma, and a second plasma generation unit which turns the second gas into plasma at the second pressure and to which a second DC voltage higher than the first DC voltage may be applied.

Methods of manufacturing memory devices are provided. The method comprises pre-cleaning a top surface of a film stack, the film stack comprising alternating layers of a first material layer and a second material layer and having one or more of a memory hole and a slit pattern opening extending through the film stack; exposing the top surface of the film stack to a growth inhibitor; selectively depositing a silicon-containing dielectric layer in a region of the film stack; and densifying the silicon-containing dielectric layer. The processing method is performed in a processing tool without breaking vacuum.

The disclosure relates to the technical field of semiconductors, and to a method, apparatus and system for processing a semiconductor structure. The processing method of the disclosure includes: providing a semiconductor substrate; forming a photoresist layer on the semiconductor substrate, the photoresist layer including an edge area and a middle area that are adjacently distributed, the edge area including a protrusion; detecting position information of the protrusion, and determining a target etching area according to the position information, the protrusion being located in the target etching area; and etching the photoresist layer located in the target etching area. By means of the processing method of the disclosure, the maintenance cost of a device can be reduced, and product yield can be improved.

Disclosed is a plasma device including at least two plasma cells, and a command unit, wherein the first and the second electrodes of a given plasma cell are independent from the corresponding first and second electrodes of the contiguous plasma cells. The electrodes of contiguous plasma cells are independently connected to the command unit. The command unit includes a high voltage generator and a radiofrequency generator which are mutually protected by a filtering element.

Methods of forming microelectronic devices comprise forming a dielectric layer on a substrate, the dielectric layer comprising at least one feature defining a gap including sidewalls and a bottom. The methods include forming a hardmask on the dielectric layer; selectively depositing a self-assembled monolayer (SAM) on the bottom of the gap and on the hardmask; treating the microelectronic device with a plasma to remove the self-assembled monolayer (SAM) from the hardmask; forming a barrier layer on the dielectric layer and on the hardmask; selectively depositing a metal liner on the barrier layer on the sidewall; and performing a gap fill process on the metal liner.