Patent classifications
H01L21/67784
PRINTING SYSTEM ASSEMBLIES AND METHODS
The present teachings disclose various embodiments of a printing system for printing substrate, in which the printing system can be housed in a gas enclosure, where the environment within the enclosure can be maintained as a controlled printing environment. A controlled environment of the present teachings can include control of the type of gas environment within the gas enclosure, the size and level particulate matter within the enclosure, control of the temperature within the enclosure and control of lighting. Various embodiments of a printing system of the present teachings can include a Y-axis motion system and a Z-axis moving plate that are configured to substantially decrease excess thermal load within the enclosure by, for example, eliminating or substantially minimizing the use of conventional electric motors.
Substrate-floatation-type laser processing apparatus and method for measuring floating height
A substrate-floatation-type laser processing apparatus and a method for measuring a floating height, capable of improving performance of laser processing are provided. A substrate-floatation-type laser processing apparatus according to an embodiment includes a stage configured to float and convey a substrate, and a floating-height measurement apparatus configured to measure a floating height H of the substrate. Note that a distance between the floating-height measurement apparatus and the substrate can be automatically adjusted according to the measured floating height H. The floating height H of the substrate is measured by applying laser light to the substrate and the stage. The distance between the floating-height measurement apparatus and the substrate is adjusted by using a feedback mechanism in which the measured floating height of the substrate is used as an input.
APPARATUS AND TECHNIQUES FOR ELECTRONIC DEVICE ENCAPSULATION
A method for providing a substrate coating comprises transferring a substrate to an enclosed ink jet printing system; printing organic material in a deposition region of the substrate using the enclosed ink jet printing system, the deposition region comprising at least a portion of an active region of a light-emitting device on the substrate; loading the substrate with the organic material deposited thereon to an enclosed curing module; supporting the substrate in the enclosed curing module, the supporting the substrate comprising floating the substrate on a gas cushion established by a floatation support apparatus; and while supporting the substrate in the enclosed curing module, curing the organic material deposited on the substrate to form an organic film layer.
Method and apparatus for load-locked printing
The disclosure relates to a method and apparatus for preventing oxidation or contamination during a circuit printing operation. The circuit printing operation can be directed to OLED-type printing. In an exemplary embodiment, the printing process is conducted at a load-locked printer housing having one or more of chambers. Each chamber is partitioned from the other chambers by physical gates or fluidic curtains. A controller coordinates transportation of a substrate through the system and purges the system by timely opening appropriate gates. The controller may also control the printing operation by energizing the print-head at a time when the substrate is positioned substantially thereunder.
METHOD AND APPARATUS FOR LOAD-LOCKED PRINTING
The disclosure relates to a method and apparatus for preventing oxidation or contamination during a circuit printing operation. The circuit printing operation can be directed to OLED-type printing. In an exemplary embodiment, the printing process is conducted at a load-locked printer housing having one or more of chambers. Each chamber is partitioned from the other chambers by physical gates or fluidic curtains. A controller coordinates transportation of a substrate through the system and purges the system by timely opening appropriate gates. The controller may also control the printing operation by energizing the print-head at a time when the substrate is positioned substantially thereunder.
Laser irradiation apparatus, laser irradiation method, and method of manufacturing semiconductor device
A laser irradiation apparatus (1) according to one embodiment irradiates a workpiece (16) with a laser beam (15) while conveying the workpiece (16) caused to float with the use of a flotation unit (10). The flotation unit (10) includes precision float regions (11a, 11b) and rough float regions (13a to 13j). The precision float regions (11a, 11b) are configured to cause the workpiece (16) to float by utilizing ejection and suction of a gas, and the rough float regions are configured to cause the workpiece (16) to float by utilizing ejection of a gas without suction of a gas.
System for transporting objects under controlled atmosphere
System for transporting objects under controlled atmosphere comprising tubular sections connected together in a leak tight manner by their first ends, each tubular section, each section comprising a guide track for a trolley, each guide track comprising a first and a second end, the first ends of the guide tracks being opposite and separated from each other by a given distance. The transport system also comprises a spanning element rotationally hinged on a first end of the guide tracks around an axis orthogonal to a direction of displacement of said guide track. The spanning element is moveable between a raised position and a spanning position in which the guide tracks are connected enabling the passage of the trolley.
DEVICES, SYSTEMS, AND METHODS FOR CONTROLLING FLOATATION OF A SUBSTRATE
A system comprises a floatation table comprising a plurality of ports to flow gas sufficient to produce a gas bearing to float a substrate over the floatation table; a fluidic network coupled to supply gas to the plurality of ports of the floatation table; and a controller configured to control the fluidic network to independently control flows of gas through ports of the plurality of ports disposed in each of a first zone, a second zone, and a third zone of the floatation table. The first, second, and third zones are defined by sections of the floatation table extending parallel to a direction the substrate is conveyed along the floatation table. The first zone is defined by a central section of the floatation table disposed between two sections defining the second zone, and the first and second zones are disposed between two sections defining the third zone.
METHOD AND APPARATUS FOR LOAD-LOCKED PRINTING
The disclosure relates to a method and apparatus for preventing oxidation or contamination during a circuit printing operation. The circuit printing operation can be directed to OLED-type printing. In an exemplary embodiment, the printing process is conducted at a load-locked printer housing having one or more of chambers. Each chamber is partitioned from the other chambers by physical gates or fluidic curtains. A controller coordinates transportation of a substrate through the system and purges the system by timely opening appropriate gates. The controller may also control the printing operation by energizing the print-head at a time when the substrate is positioned substantially thereunder.
Apparatus for at least one of holding, positioning and moving an object and method of operating an apparatus for at least one of holding, positioning and moving an object
An apparatus for holding, positioning and/or moving an object is described. The apparatus includes a base, and a carrier which is movable relative to the base. The apparatus further includes at least three magnetic bearings, by means of which the carrier is supported on the base in a contactless manner such that the carrier can be displaced with respect to at least one predefined direction, wherein at least two of the magnetic bearings are configured as actively controllable magnetic bearings. The apparatus has at least one damping unit, which is fixed to the carrier or to the base.