A transport container, in which a stored object is taken in and out through an opening on a side surface, includes a positioner that projects upward from an outside of a placement surface of the stored object on a storage portion where the stored object is placed, and a regulator movable between an advanced position, in which the regulator is advanced to above the stored object placed on the placement surface to regulate upward movement of the stored object, and a retracted position, in which the regulator is retracted from above the stored object to allow upward movement of the stored object.

A feeding apparatus for supplying electronic devices for pick-up comprises a guide track for guiding and feeding a plurality of electronic devices and a separator operative to receive electronic devices from the guide track for the electronic devices to be picked up from the separator. A protrusion is located on either of the guide track or the separator, and a cavity is located on the other of the guide track or the separator for receiving the protrusion. The protrusion and the cavity cooperate to form a substantially continuous surface for transferring the electronic devices to the separator.

There is provided a technique that includes abnormality detecting by picking up a sound generated from a transfer configured to operate in a vacuum and transport a substrate in a vacuum transfer chamber and compare the sound information with a preset threshold value to detect an abnormality of the transfer. The transfer includes a gas-filled container arranged in the vacuum transfer chamber and filled with a gas and a microphone installed inside the gas-filled container.

There is provided a substrate processing apparatus including a process chamber for processing a substrate, a transfer chamber accommodating a transfer that has a housing configured by a hollow structure and is capable of transporting the substrate; a sensor for obtaining information about at least one of sound or vibration generated during an operation of the transfer; a receiver for receiving the information obtained by the sensor; and an analyzer for analyzing occurrence of abnormality or malfunction of the transfer by comparing the information with a preset threshold value.

A light plate, a method for assembling a light plate, and a display device are disclosed. The light plate includes a bottom plate, a vibration fitting assembly, and multiple light-emitting elements. The vibration fitting assembly includes a vibrator, a vibration plate disposed on a side of the vibrator facing away from the bottom plate, and a support elastic piece abutting against the vibration plate. Multiple groups of installation slots are defined in the vibration plate. Each light-emitting element includes a positioning structure matching a respective group of installation slots, and is installed in the installation slots through the positioning structure. When the light-emitting elements are laid on the vibration plate, the vibrator is started to drive the vibration plate to vibrate, thereby shaking the light-emitting elements, so that the positioning structure of each light-emitting element is fitted with the installation slots to complete the installation of the light-emitting elements.