H01L23/291

Semiconductor device

Disclosed is a semiconductor device comprising a semiconductor substrate, a conductive pad on a first surface of the semiconductor substrate, a passivation layer on the first surface of the semiconductor substrate, the passivation layer having a first opening that exposes the conductive pad, an organic dielectric layer on the passivation layer, the organic dielectric layer having a second opening, and a bump structure on the conductive pad and in the first and second openings. The organic dielectric layer includes a material different from a material of the passivation layer. The second opening is spatially connected to the first opening and exposes a portion of the passivation layer. The bump structure includes a pillar pattern in contact with the passivation layer and the organic dielectric layer.

Liquid low temperature oxide

In some embodiments, a method of forming a structure includes: forming a liquid oxide material at a low temperature by dissolving fumed nanoparticles in a liquid hydrate of a silicate or an aluminate; applying the liquid oxide material on a substrate; and at a low temperature, curing the liquid oxide material to evolve gaseous water, leaving structural silicate glass.

ENHANCED SEMICONDUCTOR STRUCTURES AND MANUFACTURING METHODS THEREOF
20220359334 · 2022-11-10 · ·

The present application provides a semiconductor structure and a manufacturing method thereof. The semiconductor structure includes: a semiconductor substrate, a heterojunction structure, a cap layer, a first passivation layer and a second passivation layer disposed from bottom to up; a trench penetrating through the first passivation layer and the second passivation layer; and a P-type semiconductor layer located at least on an inner wall of the trench. After a part of the second passivation layer is dry etched to form the trench, the first passivation layer can be used for etching endpoint detection to avoid over etching. A part of the first passivation layer exposed by the trench of the second passivation layer can be removed by wet etching. When the exposed part of the first passivation layer is removed by the wet etching, due to the cap layer has extremely high stability, after the exposed part of the first passivation layer is removed by the wet etching, the cap layer will not be damaged. The non-damaged cap layer can effectively reduce surface defects of the heterojunction structure to decrease a probability of electrons being trapped by the defects, thereby weakening a current collapse effect and reducing a dynamic on-resistance.

Surface treatment and passivation for high electron mobility transistors

A semiconductor device includes a compound semiconductor layer comprising a III-V material; a first layer on the compound semiconductor layer and comprising oxygen, nitrogen, and a material included in the compound semiconductor layer; a second layer over the first layer, wherein at least a portion of the second layer comprises a single crystalline structure or a polycrystalline structure; a dielectric layer over the second layer; and a source/drain electrode extending through the dielectric layer, the second layer, and the first layer and into the compound semiconductor layer.

Semiconductor devices with flexible reinforcement structure
11574820 · 2023-02-07 · ·

Methods for manufacturing semiconductor devices having a flexible reinforcement structure, and associated systems and devices, are disclosed herein. In one embodiment, a method of manufacturing a semiconductor device includes electrically coupling at least one semiconductor die to a redistribution structure on a first carrier. The semiconductor die can include a first surface connected to the redistribution structure and a second surface spaced apart from the redistribution structure. The method also includes reducing a thickness of the semiconductor die to no more than 10 μm. The method further includes coupling a flexible reinforcement structure to the second surface of the at least one semiconductor die.

GALLIUM NITRIDE DEVICE HAVING A COMBINATION OF SURFACE PASSIVATION LAYERS
20230094094 · 2023-03-30 ·

A method of fabricating a semiconductor device includes providing a GaN substrate with an epitaxial layer formed thereover, the epitaxial layer forming a heterojunction with the GaN substrate, the heterojunction supporting a 2-dimensional electron gas (2DEG) channel in the GaN substrate. A composite surface passivation layer is formed over a top surface of the epitaxial layer, wherein the composite surface passivation layer comprises a first passivation layer portion formed proximate to a first region of the GaN device and a second passivation layer portion formed proximate to a second region of the GaN device. The first and second passivation layer portions are disposed laterally adjacent to each other over the epitaxial layer, wherein the first passivation layer portion is formed in a first process and the second passivation layer portion is formed in a second process.

GAN/TWO-DIMENSIONAL ALN HETEROJUNCTION RECTIFIER ON SILICON SUBSTRATE AND PREPARATION METHOD THEREFOR

The present invention provides a GaN/two-dimensional AlN heterojunction rectifier on a silicon substrate and a preparation method therefor and belongs to the field of rectifiers. The rectifier comprises a silicon substrate, a GaN buffer layer, a carbon-doped semi-insulating GaN layer, a two-dimensional AlN layer, a non-doped GaN layer, a non-doped InGaN layer and a SiN.sub.x passivation layer that are stacked in sequence. The rectifier further comprises a mesa isolation groove and a Schottky contact electrode that are arranged at one side. The mesa isolation groove is in contact with the non-doped GaN layer, the non-doped InGaN layer, the SiN.sub.x passivation layer and the Schottky contact electrode. The Schottky contact electrode is in contact with the mesa isolation groove and the non-doped GaN layer. The thickness of the two-dimensional AlN layer is only several atomic layers, thus the received stress and polarization intensity are greater than those of the AlGaN layer.

III-NITRIDE-BASED SEMICONDUCTOR PACKAGED STRUCTURE AND METHOD FOR MANUFACTURING THE SAME
20230036009 · 2023-02-02 ·

A III-nitride-based semiconductor packaged structure includes a lead frame, an adhesive layer, a III-nitride-based die, an encapsulant, and at least one bonding wire. The lead frame includes a die paddle and a lead. The die paddle has first and second recesses arranged in a top surface of the die paddle. The first recesses are located adjacent to a relatively central region of the top surface. The second recesses are located adjacent to a relatively peripheral region of the top surface. The first recess has a shape different from the second recess from a top-view perspective. The adhesive layer is disposed on the die paddle to fill into the first recesses. The III-nitride-based die is disposed on the adhesive layer. The encapsulant encapsulates the lead frame and the III-nitride-based die. The second recesses are filled with the encapsulant. The bonding wire is encapsulated by the encapsulant.

NITRIDE SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME
20230031259 · 2023-02-02 ·

A nitride semiconductor device includes a semiconductor carrier, a first nitride-based chip, and first conformal connecting structures. The first nitride-based chip is disposed over the semiconductor carrier. The semiconductor carrier has a first planar surface. The first nitride-based chip has a second planar surface, first conductive pads, and first slanted surfaces. The first conductive pads are disposed in the second planar surface. The first slanted surfaces connect the second planar surface to the first planar surface. The first conformal connecting structures are disposed on the first planar surface and the first nitride-based chip. First obtuse angles are formed between the second planar surface and the first slanted surfaces. Each of the first conformal connecting structures covers one of the first slanted surfaces of the first nitride-based chip and one of the first obtuse angles and is electrically connected to the first conductive pads.

Semiconductor package and PoP type package
11495578 · 2022-11-08 · ·

A semiconductor package includes: a first package substrate; a first semiconductor device mounted on the first package substrate; a second package substrate arranged on an upper part of the first semiconductor device; and a heat-dissipating material layer arranged between the first semiconductor device and the second package substrate and having a thermal conductivity of approximately 0.5 W/m.Math.K to approximately 20 W/m.Math.K, wherein the heat-dissipating material layer is in direct contact with an upper surface of the first semiconductor device and a conductor of the second package substrate.