Patent classifications
H01L28/65
CAPACITOR STRUCTURE AND FORMING METHOD THEREOF
A capacitor structure and a forming method thereof are provided. The capacitor structure includes a substrate and a bottom electrode composite layer on the substrate. The bottom electrode composite layer includes a first electrode layer and a second electrode layer on the first electrode layer. An oxidation rate of a material of the second electrode layer is lower than an oxidation rate of a material of the first electrode layer. The capacitor structure also includes a dielectric structure layer on the bottom electrode composite layer.
METHOD OF FABRICATING A PEROVSKITE-MATERIAL BASED TRENCH CAPACITOR USING RAPID THERMAL ANNEALING (RTA) METHODOLOGIES
A memory device includes a first electrode comprising a first conductive nonlinear polar material, where the first conductive nonlinear polar material comprises a first average grain length. The memory device further includes a dielectric layer comprising a perovskite material on the first electrode, where the perovskite material includes a second average grain length. A second electrode comprising a second conductive nonlinear polar material is on the dielectric layer, where the second conductive nonlinear polar material includes a third grain average length that is less than or equal to the first average grain length or the second average grain length.
MAJORITY GATE BASED LOW POWER FERROELECTRIC BASED ADDER WITH RESET MECHANISM
An adder with first and second majority gates. For a 1-bit adder, output from a 3-input majority gate is inverted and input two times to a 5-input majority gate. Other inputs to the 5-input majority gate are same as those of the 3-input majority gate. The output of the 5-input majority gate is a sum while the output of the 3-input majority gate is the carry. Multiple 1-bit adders are concatenated to form an N-bit adder. The input signals are driven to first terminals of non-ferroelectric capacitors while the second terminals are coupled to form a majority node. Majority function of the input signals occurs on this node. The majority node is then coupled to a first terminal of a non-linear polar capacitor. The second terminal of the capacitor provides the output of the logic gate. A reset mechanism initializes the non-linear polar capacitor before addition function is performed.
SEMICONDUCTOR DEVICE
A semiconductor device includes a semiconductor substrate, a first semiconductor layer on the semiconductor substrate, a second semiconductor layer on the first semiconductor layer, a first electrode on the second semiconductor layer, a second electrode arranged with the first electrode along a front surface of the second semiconductor layer, a third electrode between the first and second electrodes on the second semiconductor layer, a metal layer on a back surface of the semiconductor substrate at a side opposite to the first semiconductor layer, and a conductor extending inside the semiconductor substrate and electrically connecting the first electrode and the metal layer via the second semiconductor layer. The second semiconductor layer includes a first region including a first-conductivity-type impurity, and a second region including a first-conductivity-type impurity with a higher concentration than the first region; and the second region is between the conductor and the first electrode.
Ferroelectric assemblies and methods of forming ferroelectric assemblies
Some embodiments include ferroelectric assemblies. Some embodiments include a capacitor which has ferroelectric insulative material between a first electrode and a second electrode. The capacitor also has a metal oxide between the second electrode and the ferroelectric insulative material. The metal oxide has a thickness of less than or equal to about 30 Å. Some embodiments include a method of forming an assembly. A first capacitor electrode is formed over a semiconductor-containing base. Ferroelectric insulative material is formed over the first electrode. A metal-containing material is formed over the ferroelectric insulative material. The metal-containing material is oxidized to form a metal oxide from the metal-containing material. A second electrode is formed over the metal oxide.
METHOD OF FABRICATING A PEROVSKITE-MATERIAL BASED PLANAR CAPACITOR USING RAPID THERMAL ANNEALING (RTA) METHODOLOGIES
A memory device includes a first electrode comprising a first conductive nonlinear polar material, where the first conductive nonlinear polar material comprises a first average grain length. The memory device further includes a dielectric layer comprising a perovskite material on the first electrode, where the perovskite material includes a second average grain length. A second electrode comprising a second conductive nonlinear polar material is on the dielectric layer, where the second conductive nonlinear polar material includes a third grain average length that is less than or equal to the first average grain length or the second average grain length.
NANOCRYSTALLINE HIGH-K LOW-LEAKAGE THIN FILMS
Provided is the dielectric response of atomic layer-deposited and annealed polymorphic BaTiO.sub.3 and BaTiO.sub.3—Al.sub.2O.sub.3 bi-layer thin films based on nanocry stalline BaTiO.sub.3 containing the perovskite and hexagonal polymorphs. Also provided are BaTiO.sub.3 films having tuned Curie temperatures. Further provided are capacitive components, comprising: a plurality of films, the plurality of films comprising: a first grained film component, the first grained film component comprising at least one of SrTiO.sub.3, BaTiO.sub.3, and (Ba, Sr)TiO.sub.3, and the first grained film component being characterized as being at least partially polymorphic crystalline in nature; a second film component contacting the first grained film component, the second film component optionally comprising Al.sub.2O.sub.3, and the first grained film component optionally defining an average grain size of less than about 10 micrometers.
DRAM INTERCONNECT STRUCTURE HAVING FERROELECTRIC CAPACITORS EXHIBITING NEGATIVE CAPACITANCE
An interconnect structure for use in coupling transistors in an integrated circuit is disclosed, including various configurations in which ferroelectric capacitors exhibiting negative capacitance are coupled in series with dielectric capacitors. In one embodiment, the negative capacitor includes a dielectric/ferroelectric bi-layer. When a negative capacitor is electrically coupled in series with a conventional dielectric capacitor, the series combination behaves like a stable ferroelectric capacitor for which the overall capacitance can be measured experimentally, and tuned to a desired value. The composite capacitance of a dielectric capacitor and a ferroelectric capacitor having negative capacitance coupled in series is, in theory, infinite, and in practice, very large. A series combination of positive and negative capacitors within a microelectronic interconnect structure can be used to make high capacity DRAM memory cells.
CAPACITOR AND MEMORY DEVICE
A capacitor and a DRAM device, the capacitor including a lower electrode; a dielectric layer structure on the lower electrode, the dielectric layer structure including a first zirconium oxide layer, a hafnium oxide layer, and a second zirconium oxide layer sequentially stacked; and an upper electrode on the dielectric layer structure, wherein the hafnium oxide layer has a tetragonal crystal phase or an orthorhombic crystal phase.
Dielectric thin film, capacitor including the dielectric thin film, and method for manufacturing the dielectric thin film
Provided is a method of preparing a dielectric film having a nanoscale three-dimensional shape and including an oxide, the oxide represented by R.sub.AM.sub.BO.sub.C where R is a divalent element and M is a pentavalent element, the method may include synthesizing a target material, the target material including the divalent element and the pentavalent element; and forming the oxide by depositing the divalent element and the pentavalent element, from the target material, onto a substrate such that the oxide includes a perovskite-type crystal structure, 1.3<B/A<1.7, and 9.0≤C<10.0.