H01L2223/5444

Process variation as die level traceability

Devices, systems and methods for uniquely identifying integrated circuits are provided. For at least one embodiment, an identifiable integrated circuit in a lot of integrated circuits includes a plurality of identifier devices. Each of the identifier devices, when tested, returns a series of first test results that form an analog identifier for the integrated circuit. For one embodiment, the identifier devices is a Zener diode. The test results may be based on reverse breakdown voltage measurements determined prior to packaging of the integrated circuit. Later testing of the integrated circuit returns a second series of reverse breakdown voltage measurements that monotonically vary over time and temperature, as compared to the first series of test results. Such monotonical variation facilitates correlation of the first series of test results with the second series of test results and, thereby, identification of the integrated circuit.

METHOD FOR DIE-LEVEL UNIQUE AUTHENTICATION AND SERIALIZATION OF SEMICONDUCTOR DEVICES USING ELECTRICAL AND OPTICAL MARKING

A method for marking a semiconductor substrate at the die level for providing unique authentication and serialization includes projecting a first pattern of actinic radiation onto a layer of photoresist on the substrate using mask-based photolithography, the first pattern defining semiconductor device structures and projecting a second pattern of actinic radiation onto the layer of photoresist using direct-write projection, the second pattern defining a unique wiring structure having a unique electrical signature.

Substrate with Cut Semiconductor Pieces Having Measurement Test Structures for Semiconductor Metrology
20210351089 · 2021-11-11 · ·

A device used for semiconductor metrology includes a substrate and a plurality of pieces from one or more semiconductor wafers. Each piece of the plurality of pieces is bonded to the substrate at a respective position on the substrate. Each piece of the plurality of pieces includes a respective instance of a measurement test structure and an alignment mark. Each piece of the plurality of pieces has a known location from the one or more semiconductor wafers.

SECURE CHIPS WITH SERIAL NUMBERS

An electronic device comprising a semiconductor chip which comprises a plurality of structures formed in the semiconductor chip, wherein the semiconductor chip is a member of a set of semiconductor chips, the set of semiconductor chips comprises a plurality of subsets of semiconductor chips, and the semiconductor chip is a member of only one of the subsets. The plurality of structures of the semiconductor chip includes a set of common structures which is the same for all of the semiconductor chips of the set, and a set of non-common structures, wherein the non-common structures of the semiconductor chip of the subset is different from a non-common circuit of the semiconductor chips in every other subset. At least a first portion of the non-common structures and a first portion of the common structures form a first non-common circuit, wherein the first non-common circuit of the semiconductor chips of each subset is different from a non-common circuit of the semiconductor chips in every other subset. At least a second portion of the non-common structures is adapted to store or generate a first predetermined value which uniquely identifies the first non-common circuit, wherein the first predetermined value is readable from outside the semiconductor chip by automated reading means.

Process of realization of an area of individualization of an integrated circuit

A method for producing an individualisation area includes providing at least a first level of the electrical tracks. The method includes depositing a dielectric layer and a deformable layer on the interconnection level. The method includes producing, in an area of the deformable layer, recessed patterns, by penetrating an imprint mould into the deformable layer, the production of the patterns being configured so that the patterns have a randomness in the deformable layer, thus forming random patterns. The method includes transferring the random patterns into the dielectric layer to form transferred random patterns therein and exposing the vias located in line with the transferred random patterns. The method includes filling the transferred random patterns with an electrically conductive material so as to form electrical connections between vias. The method includes producing a second level of the electrical tracks on the vias and the electrical connections.

PHYSICAL UNCLONABLE FUNCTION

Methods, and devices related to authentication of chips using physical unclonable function (PUF) are disclosed. The semiconductor chip has a substrate having a major surface. The semiconductor chip has a boundary defined on the major surface in accordance with a ground rule associated with a gate cut passing (CT) fin formed on the major surface. The semiconductor chip has multiple non-planar devices fabricated on the surface at the boundary. The CT fin forms a random distribution of field effect transistors (FETs) with varying work function metal (WFM) thickness that includes some FETs that fail the ground rule and other FETs that meet the ground rule. A physical unclonable function (PUF) region is defined in accordance with the random distribution.

Device and method for determining a fingerprint for a device using a voltage offset distribution pattern

A device has a plurality of analog-to-digital converters. Each of the plurality of analog-to-digital converters has a voltage offset, wherein a predefined set of voltage offsets has a voltage offset distribution pattern, which provides a fingerprint for the device.

Physical unclonable functions with copper-silicon oxide programmable metallization cells

A physical unclonable functions (PUF) device including a first copper electrode, a second electrode, and a silicon oxide layer positioned directly between the first copper electrode and the second electrode; a method of producing a PUF device; an array comprising a PUF device; and a method of generating a secure key with a plurality of PUF devices.

Method for die-level unique authentication and serialization of semiconductor devices using electrical and optical marking

A method for marking a semiconductor substrate at the die level for providing unique authentication and serialization includes projecting a first pattern of actinic radiation onto a layer of photoresist on the substrate using mask-based photolithography, the first pattern defining semiconductor device structures and projecting a second pattern of actinic radiation onto the layer of photoresist using direct-write projection, the second pattern defining a unique wiring structure having a unique electrical signature.

INTEGRATED CIRCUIT (IC) TAG

An integrated circuit (IC) tag includes: an IC chip; a substrate that is provided with an antenna on a first surface; an adhesive portion configured to adhere a side surface of the IC chip and a peripheral of the IC chip in a state that a terminal of the IC chip is electrically coupled to the antenna; and a first member that is provided between the antenna and the adhesive portion, the first member having an elastic modulus higher than an elastic modulus of the antenna.