H01L2223/54466

Mirror die image recognition system, reference die setting system, and mirror die image recognition method
11030734 · 2021-06-08 · ·

A mirror die image recognition system configured to perform recognition of a mirror die without damage or a pattern that is the same quadrilateral shape as a production die having a pattern, in a manner that distinguishes the mirror die without damage or pattern from a mirror die with damage and from a production die, the mirror die image recognition system including a camera configured to image at least a portion of the wafer in a field of view; and an image processing device configured to process the image captured by the camera to recognize, from among each of the dies in the image, a mirror die without damage in a manner that distinguishes the mirror die without damage from other dies.

SYSTEMS AND METHODS FOR HIERARCHICAL EXPOSURE OF AN INTEGRATED CIRCUIT HAVING MULTIPLE INTERCONNECTED DIE
20210167037 · 2021-06-03 ·

A system and method for fabricating distinct types of circuit connections on a semiconductor wafer includes fabricating, using a first photomask, a plurality of a first type of circuit connections for each of a plurality of distinct die of a semiconductor wafer; and fabricating, using a second photomask, a plurality of a second type of circuit connections between a plurality of distinct pairs of components of the semiconductor wafer, wherein each distinct pair of components includes at least one distinct die of the plurality of distinct die and one of a conductive pad and a sacrificial die.

Systems and methods for hierarchical exposure of an integrated circuit having multiple interconnected die
10923456 · 2021-02-16 · ·

A system and method for fabricating distinct types of circuit connections on a semiconductor wafer includes fabricating, using a first photomask, a plurality of a first type of circuit connections for each of a plurality of distinct die of a semiconductor wafer; and fabricating, using a second photomask, a plurality of a second type of circuit connections between a plurality of distinct pairs of components of the semiconductor wafer, wherein each distinct pair of components includes at least one distinct die of the plurality of distinct die and one of a conductive pad and a sacrificial die.

SYSTEMS AND METHODS FOR HIERARCHICAL EXPOSURE OF AN INTEGRATED CIRCUIT HAVING MULTIPLE INTERCONNECTED DIE
20200203308 · 2020-06-25 ·

A system and method for fabricating distinct types of circuit connections on a semiconductor wafer includes fabricating, using a first photomask, a plurality of a first type of circuit connections for each of a plurality of distinct die of a semiconductor wafer; and fabricating, using a second photomask, a plurality of a second type of circuit connections between a plurality of distinct pairs of components of the semiconductor wafer, wherein each distinct pair of components includes at least one distinct die of the plurality of distinct die and one of a conductive pad and a sacrificial die.

MIRROR DIE IMAGE RECOGNITION SYSTEM, REFERENCE DIE SETTING SYSTEM, AND MIRROR DIE IMAGE RECOGNITION METHOD
20190392574 · 2019-12-26 · ·

A mirror die image recognition system configured to perform recognition of a mirror die without damage or a pattern that is the same quadrilateral shape as a production die having a pattern, in a manner that distinguishes the mirror die without damage or pattern from a mirror die with damage and from a production die, the mirror die image recognition system including a camera configured to image at least a portion of the wafer in a field of view; and an image processing device configured to process the image captured by the camera to recognize, from among each of the dies in the image, a mirror die without damage in a manner that distinguishes the mirror die without damage from other dies.

Overlay structures

The present disclosure generally relates to semiconductor structures and, more particularly, to overlay structures and methods of manufacture. The method includes locating a first plurality of offset dummy features in a first layer; locating a second plurality of offset dummy features in a second layer; measuring a distance between the first plurality of offset dummy features and the second plurality of offset dummy features; and determining that the first layer or the second layer is shifted with respect to one another based on the measurement.

OVERLAY STRUCTURES
20190206802 · 2019-07-04 ·

The present disclosure generally relates to semiconductor structures and, more particularly, to overlay structures and methods of manufacture. The method includes locating a first plurality of offset dummy features in a first layer; locating a second plurality of offset dummy features in a second layer; measuring a distance between the first plurality of offset dummy features and the second plurality of offset dummy features; and determining that the first layer or the second layer is shifted with respect to one another based on the measurement.

Method for Producing Mems Transducer, Mems Transducer, Ultrasound Probe, and Ultrasound Diagnostic Apparatus
20190008479 · 2019-01-10 ·

Substrate is produced by using a MEMS technique to form multiple diaphragms in a substrate by forming piezoelectric material layer on one surface of the substrate and thereafter by forming openings in the substrate from the other surface of the substrate; substrate and substrate on which signal detection circuit is formed are aligned to each other using at least one of multiple diaphragms as alignment diaphragm; and substrate and substrate are bonded together.

Method and system for achieving semiconductor-based circuits or systems having multiple components with one or more matched or similar characteristics or features

Methods and systems for achieving semiconductor-based circuits or systems having multiple components with one or more matched or similar characteristics or features are disclosed herein. In one example embodiment, a system includes a processing device that includes first, second, and third circuitry. The first circuitry is configured to generate control signals that at least indirectly cause a pick and place head mechanism to attempt to pick up and place at least some of first and second dice. The second circuitry is configured to assess whether attempts to implement one or more of first and second dice should be skipped based upon wafer map information. Further, the third circuitry is configured to determine whether a second position of a first one of the second dice is sufficiently proximate to a first position so that it would be appropriate to implement the first one of the second dice.

Template, workpiece, and alignment method

A template of one embodiment includes an alignment mark. The alignment mark includes a first main pattern and a first auxiliary pattern. In the first main pattern, a first part and a second part are disposed according to a predetermined repeating pattern. The first auxiliary pattern is configured as a pattern opposite to the repeating pattern in a region outside an end of the first main pattern.