A micro-electro-mechanical system (MEMS) transfer switch is disclosed. The transfer switch comprises a single-pole, N-throw switch section having N selectable switches. Each selectable switch of the N selectable switches has an input, a control terminal and an output. An electrically conductive line is coupled to each of the selectable switches of the N selectable switches. The transfer switch includes a single-pole, M-throw switch section having M selectable switches coupled to the conductive line, each selectable switch of the M selectable switches having an output, a control terminal and an input. The single-pole, N-throw switch section and the single-pole, M-throw switch section are packaged in a single micro-electro-mechanical system (MEMS) die. The N and M are numbers between two and eight and the N selectable switches and the M selectable switches are different switches.

A force-controlled-switch comprises a diaphragm spring element and an absorber-plate. The absorber-plate is configured to absorb kinetic energy of the force-controlled-switch. In particular, the absorber-plate absorbs a part of the diaphragm-spring-element's kinetic energy.

A low-reflectivity solid-state switch circuit includes an input port configured to transmit an electronic signal and first and second output ports configured to receive the electronic signal. The switch circuit further includes a first switching element connected between the input port and the first output port, a second switching element connected between the input port and the second output port, a third switching element connected to a first conductive path between the first switching element and the first output port, and a fourth switching element connected to a second conductive path between the second switching element and the second output port. The third and fourth switching elements are utilizable to shunt current reflections from their connected conducted paths when the respective conductive path is configured in an off configuration.

A force-controlled-switch comprises a diaphragm spring element and an absorber-plate. The absorber-plate is configured to absorb kinetic energy of the force-controlled-switch. In particular, the absorber-plate absorbs a part of the diaphragm-spring-element's kinetic energy.

A system for EMNZ metamaterial-based direct antenna modulation. The system includes a signal generator, a metamaterial switch and an antenna. The signal generator may is configured to generate a microwave signal. The metamaterial switch is configured to generate a modulated microwave signal from the microwave signal. The modulated microwave signal is generated by selectively passing the microwave signal through the metamaterial switch. The metamaterial switch includes a first conductive plate and a first loaded conductive plate. The first loaded conductive plate includes a second conductive plate and a first monolayer graphene. The first monolayer graphene includes a first tunable conductivity. The first monolayer graphene is positioned between the first conductive plate and the second conductive plate. An effective permittivity of the metamaterial switch is configured to be adjusted to a predetermined value. The effective permittivity of the metamaterial switch is adjusted responsive to tuning the first tunable conductivity.

A method of forming a microelectromechanical device is disclosed wherein a beam of the microelectromechanical device may deviate from a resting to an engaged or disengaged position through electrical biasing. The microelectromechanical device comprises a beam disposed above a first RF conductor and a second RF conductor. The microelectromechanical device further comprises at least a center stack, a first RF stack, a second RF stack, a first stack formed on a first base layer, and a second stack formed on a second base layer, each stack disposed between the beam and the first and second RF conductors. The beam is configured to deflect downward to first contact the first stack formed on the first base layer and the second stack formed on the second base layer simultaneously or the center stack, before contacting the first RF stack and the second RF stack simultaneously.

A microwave switch. In some embodiments, the microwave switch includes a substrate, a signal conductor, a first ground conductor, on a first side of the signal conductor, and a second ground conductor, on a second side of the signal conductor. The signal conductor, the first ground conductor, and the second ground conductor may be planar conductors on a planar top surface of the substrate. The signal conductor may have a first portion composed of a superconducting material, and a second portion having a reduced cross section, a cross-sectional area of the second portion being less than 120 nm.

A microelectromechanical switch having improved isolation and insertion loss characteristics and reduced liability for stiction. The switch includes a signal line having an input port and an output port between first and second ground planes. The switch also includes a beam for controlling activation of the switch. In some embodiments, the switch further includes one or more defected ground structures formed in the first and second ground planes, and a corresponding secondary deflectable beam positioned over each defected ground structure. In some embodiments, the switch includes a metamaterial structure for generating a repulsive Casimir force.

An apparatus includes first and second electronically tunable transmission lines configured to transmit or receive a signal pair and provide a selected phase delay difference to the signal pair corresponding to a selected polarization, a first attenuation element connected to the first electronically tunable transmission line and a second attenuation element connected to the second electronically tunable transmission line. The first and second attenuation elements may each be configured to selectively attenuate signals carried on the electronically tunable transmission line to which they are connected according to a selected attenuation setting of a plurality of selectable attenuation settings provided by one or more attenuation control signals and thereby provide a selected attenuation to the signal pair that corresponds to the selected polarization. A corresponding method is also disclosed herein.

An electronic switch for switching between signal outputs comprises a 6-way symmetric hybrid ring combiner. Each port within the 6-way symmetric hybrid ring combiner is positioned at /4 wavelength increments around a circumference of the 6-way symmetric hybrid ring combiner.