A substrate processing apparatus includes: a disk including a plurality of electrostatic chucks periodically disposed at a constant radius from a central axis; a disk support supporting the disk; a DC line electrically connected to the plurality of electrostatic chucks through the disk support; and a power supply configured to supply power to the DC line. The DC line includes: a first DC line penetrating through the disk support from the power supply; a power distribution unit configured to distribute the first DC line to connect the first DC line to each of the plurality of electrostatic chucks; and a plurality of second DC lines respectively connected to the plurality of electrostatic chucks in the power distribution unit.

A substrate processing apparatus includes: a disk including a plurality of electrostatic chucks periodically disposed at a constant radius from a central axis; a disk support supporting the disk; a DC line electrically connected to the plurality of electrostatic chucks through the disk support; and a power supply configured to supply power to the DC line. The DC line includes: a first DC line penetrating through the disk support from the power supply; a power distribution unit configured to distribute the first DC line to connect the first DC line to each of the plurality of electrostatic chucks; and a plurality of second DC lines respectively connected to the plurality of electrostatic chucks in the power distribution unit.

An electrical contact device includes a high electric potential-side contact and a low electric potential-side contact having a lower electric potential than the high electric potential-side contact. The high electric potential-side contact and the low electric potential-side contact are configured to be brought into and out of contact with each other. At least one of the high electric potential-side contact and the low electric potential-side contact is formed of a low-boiling point material whose boiling point is lower than 2562 C. or a mixed material that contains the low-boiling point material.

An electrical contact device includes a high electric potential-side contact and a low electric potential-side contact having a lower electric potential than the high electric potential-side contact. The high electric potential-side contact and the low electric potential-side contact are configured to be brought into and out of contact with each other. At least one of the high electric potential-side contact and the low electric potential-side contact is formed of a low-boiling point material whose boiling point is lower than 2562 C. or a mixed material that contains the low-boiling point material.

A power supply apparatus for a field winding motor. A brush is disposed is a holder. An armature is connected to the brush and disposed in the holder. A slip ring is electrically connected to or disconnected from the brush. A support spring surrounds the brush between the slip ring and the armature. A coil is disposed outside of the holder so as to overlap the support spring and the armature. A first power terminal is connected to the brush and supplies a first driving current. A second power terminal is connected to the coil and supplying a second driving current.

A power supply apparatus for a field winding motor. A brush is disposed is a holder. An armature is connected to the brush and disposed in the holder. A slip ring is electrically connected to or disconnected from the brush. A support spring surrounds the brush between the slip ring and the armature. A coil is disposed outside of the holder so as to overlap the support spring and the armature. A first power terminal is connected to the brush and supplies a first driving current. A second power terminal is connected to the coil and supplying a second driving current.

A system for monitoring the wear state of a carbon brush of a brush holder assembly in which the length of the carbon brush is diminished from an initial length as an end of the carbon brush wears away during use. The system includes a wear state monitor, including a sensor, coupled to the carbon brush. The wear state monitor is configured to rotate as the length of the carbon brush diminishes. The sensor is configured to measure an angular displacement of the wear state monitor as the wear state monitor rotates. The measured angular displacement of the wear state monitor correlates to an amount of diminution in the length of the carbon brush.

A system for monitoring the wear state of a carbon brush of a brush holder assembly in which the length of the carbon brush is diminished from an initial length as an end of the carbon brush wears away during use. The system includes a wear state monitor, including a sensor, coupled to the carbon brush. The wear state monitor is configured to rotate as the length of the carbon brush diminishes. The sensor is configured to measure an angular displacement of the wear state monitor as the wear state monitor rotates. The measured angular displacement of the wear state monitor correlates to an amount of diminution in the length of the carbon brush.

A drive device for a hydraulic pump of a braking system for a motor vehicle includes a housing, a rotor, a rotor shaft mounted in the housing and supporting the rotor, and a commutator arranged in the housing. The commutator includes at least one commutator brush held by a brush holder. The commutator brush cooperates with a commutator ring arranged on the rotor shaft in a non-rotatable manner. The brush holder includes a sealing ring assigned to the commutator which is arranged coaxially to the rotor shaft and interacts with the rotor shaft in a sealing manner.

In order to effect a seal a porous material which comprises one side of two opposing surfaces is used to restrict and evenly distribute externally pressurized gas, liquid, steam, etc. between the two surfaces, exerting a force which is opposite the forces from pressure differences or springs trying to close the two faces together and so may create a non-contact seal that is more stable and reliable than hydrodynamic seals currently in use. A non-contact bearing is also disclosed having opposing surfaces with relative motion and one surface issuing higher than ambient pressure through a porous restriction, wherein the porous restriction is part of a monolithic porous body, or a porous layer, attached to lands containing a labyrinth, the porous restriction and lands configured to not distort more than 10% of a gap created from differential pressure between each side of the porous restriction.