To suppress a leakage current flowing through a parasitic capacitor of an insulated transformer of a high-side insulated power. The present invention suppresses a common mode current using a common mode reactor by focusing on the fact that a leakage current flowing through a parasitic capacitor of an insulated transformer of a high-side insulated power source resulting from a high-frequency signal generated due to an on/off operation of a high-side switching element is the common mode current. The common mode reactor reduces the common mode current and bears the high-frequency signal to prevent the high-frequency signal from being applied to the insulated transformer of the high-side insulated power source, suppress the leakage current flowing through the parasitic capacitor of the insulated transformer, and reduce an erroneous operation of the high-side switching element generated due to the leakage current flowing through the parasitic capacitor of the insulated transformer.

A method includes generating, external to a radio frequency (RF) environment and based on a process recipe, a first signal and a second signal. The method further includes converting the first signal into an alternative signal and transmitting, over a non-conductive communication link, the alternative signal to a converter within the RF environment within a processing chamber of a substrate processing system. The method further includes converting the alternative signal into a third signal by the converter inside the RF environment within the processing chamber. The method further includes controlling a first plurality of elements disposed within the RF environment within the processing chamber via one or more first devices disposed within the RF environment within the processing chamber using the third signal and controlling a second plurality of elements of the substrate processing system via one or more second devices of the substrate processing system using the second signal.

A submodule includes a bridge circuit including two main power semiconductors connected in series for performing power conversion by on/off control and an electric energy storage element connected in parallel with a path of the two main power semiconductors connected in series, a bypass unit including a bypass power semiconductor), a bypass unit drive device to drive the bypass unit, a first external terminal, and a second external terminal. The first external terminal is connected to a node between the two main power semiconductors. The power conversion apparatus further includes an optical power-feed system for feeding power to the bypass unit drive device.

A driving and controlling method and a circuit thereof are provided. The method includes: sending, by a primary controller, a first signal that includes a first type of pulse sequence and a second type of pulse sequence; receiving the first signal, by a secondary controller, and identifying a pulse type of the first signal; when a first type of pulse is detected, the secondary controller outputs multiple switching signals to respectively control multiple switching elements to turn off; when a second type of pulse is detected, the secondary controller outputs multiple switching signals to respectively control multiple switching elements to work as normal. A level of the first signal is maintained constant between the first type of pulse sequence and the second type of pulse sequence. The disclosure features cost-efficiency and low driving delay.

A high voltage switch comprising: a high voltage power supply providing power greater than about 5 kV; a control voltage power source; a plurality of switch modules arranged in series with respect to each other each of the plurality of switch modules configured to switch power from the high voltage power supply, and an output configured to output a pulsed output signal having a voltage greater than the rating of any switch of the plurality of switch modules, a pulse width less than 2 s, and at a pulse frequency greater than 10 kHz.

A high voltage switch comprising: a high voltage power supply providing power greater than about 5 kV; a control voltage power source; a plurality of switch modules arranged in series with respect to each other each of the plurality of switch modules configured to switch power from the high voltage power supply, and an output configured to output a pulsed output signal having a voltage greater than the rating of any switch of the plurality of switch modules, a pulse width less than 2 s, and at a pulse frequency greater than 10 kHz.

A power supply device is provided. The power supply device includes an AC/DC converter configured to convert an input AC power into a first DC power having a predetermined size, and to output the first DC power, a DC/DC converter configured to convert the first DC power into a second DC power according to an enable signal, and a switch including a soft switch connected to the first DC power at one end, and configured to, in response to the soft switch being turned on, voltage-distribute the first DC power, and to provide the voltage-distributed first DC power to the DC/DC converter as an enable signal.

A power supply device is provided. The power supply device includes an AC/DC converter configured to convert an input AC power into a first DC power having a predetermined size, and to output the first DC power, a DC/DC converter configured to convert the first DC power into a second DC power according to an enable signal, and a switch including a soft switch connected to the first DC power at one end, and configured to, in response to the soft switch being turned on, voltage-distribute the first DC power, and to provide the voltage-distributed first DC power to the DC/DC converter as an enable signal.

A method includes generating, external to a radio frequency (RF) environment and based on a process recipe, a first signal and a second signal. The method further includes converting the first signal into an alternative signal and transmitting, over a non-conductive communication link, the alternative signal to a converter within the RF environment within a processing chamber of a substrate processing system. The method further includes converting the alternative signal into a third signal by the converter inside the RF environment within the processing chamber. The method further includes controlling a first plurality of elements disposed within the RF environment within the processing chamber via one or more first devices disposed within the RF environment within the processing chamber using the third signal and controlling a second plurality of elements of the substrate processing system via one or more second devices of the substrate processing system using the second signal.

A heating system includes a first plurality of heating elements disposed within an electrostatic chuck and an electrically conductive housing. The heating system further includes one or more switching devices to control temperatures output by the first plurality of heating elements. The heating system further includes a converter that is electrically coupled to the one or more switching devices and disposed within the electrically conductive housing. The electrically conductive housing and the first plurality of heating elements are to operate in a radio frequency (RF) environment. A second plurality of elements are to operate outside of the RF environment. The converter is to communicate with a controller outside of the RF environment via a non-conductive communication link. The controller is to receive a process recipe and is to control the first plurality of heating elements and the second plurality of elements substantially simultaneously based on the process recipe.