A micro-electromechanical actuating device is disclosed. The micro-electromechanical actuating device includes a substrate having a cavity having a first area; a fixing portion disposed on the substrate; a first frame disposed around the fixing portion; and an elastic element connecting the first frame and the fixing portion, and causing the first frame to be suspended above the substrate, wherein the first frame has a projecting area onto the substrate; and the first area and the projecting area have an overlapping portion.

A light sensing apparatus is disclosed. The light sensing apparatus, includes a sensor configured for sensing a light; an in-plane motion motor, including a circuit board having a first bottom base with an central cavity and a circuit board frame disposed thereon, wherein the first bottom base has a first bottom surface; a lead frame disposed inside the central cavity and having a second bottom surface; and an in-plane motion actuator having a movable inner frame and a fixed outer frame both allocated in a reference plane, wherein the movable inner frame moves along at least one of two directions perpendicular to each other and parallel to the first bottom surface; and an out-of-plane motion motor, including: a base plate having a base plate surface and a base plate frame disposed on a periphery of the base plate surface; four single-axis actuators disposed on the base plate surface, each of which has an actuating end, and each of which moves the respective actuating end along a direction perpendicular to the base plate surface, wherein the first bottom surface is attached to the base plate frame, and the second bottom surface is attached to the four actuating ends.

The present invention provides a tunable spectrum sensing device. The tunable spectrum sensing device includes: a device body; an out-of-plane motion motor mounted on the device body and including: a base having a normal direction; and a single-axis actuator having a motion direction parallel to the normal direction, and including: a substrate with an electronic element; and an actuating end driven by the electronic element; a first glass mounted on and moved by the actuating end; and a second glass mounted on the device body. The out-of-plane motion motor can keep an object at a specific rotation angle, position the object at a specific out-of-plane displacement or be programmed for the object to perform a specific scan trajectory motion. The out-of-plane motion motor also has a large motion stroke, and thus, there is no need to use multiple tunable spectrum sensing devices to satisfy the spectral bandwidth requirement.

A reflector device is provided in the present disclosure, and includes a base, a first single-axis motion motor, a fulcrum structure and a reflector. The base includes a base plate having a base plate surface. The first single-axis motion motor is disposed on the base plate surface, and has a motion direction parallel to a normal direction of the base plate surface. The fulcrum structure is disposed on the base plate surface. The reflector has a first and a second ends connected with the first single-axis motion motor and the fulcrum structure respectively.

A method for manufacturing an apparatus having in-plane and out-of-plane motions is provided. The method includes the steps of providing an in-plane motion motor capable of moving in a first set of three degrees of freedom with respect to a reference plane for mounting thereon a functional device for performing the application function; providing an out-of-plane motion motor having a base plate surface and supporting thereon the in-plane motion motor; and providing four single-axis motors in the out-of-plane motion motor, wherein: each of the four single-axis motors has a single-axis actuator having an actuating end, a planar surface and a side surface; the side surface is attached to the base plate surface; and the four single-axis motors cooperatively enable the reference plane to be capable of moving in a second set of three degrees of freedom, wherein the first set of three degrees of freedom are all different from the second set of three degrees of freedom.

A MEMS includes a substrate with a substrate extension that rises above a substrate plane. The MEMS includes a movable structural element, a first spring element that mechanically connects the movable structural element to the substrate extension, and a second spring element that mechanically connects the movable structural element to the substrate extension. The first spring element and the second spring element form a parallelogram guide of the movable structural element in relation to the substrate extension.

An electrostatic actuator includes a fixed electrode and a movable electrode arranged to face the fixed electrode. The movable electrode is configured to be displaceable with respect to the fixed electrode and a fixed portion. An attractive force acts between the movable electrode and the fixed portion. In the electrostatic actuator, a non-linear vibration of the movable electrode when a voltage is applied to the fixed electrode and the movable electrode is reduced by the attractive force acting between the movable electrode and the fixed portion.

A multi-axis MEMS assembly is configured to provide multi-axis movement and includes: a first in-plane MEMS actuator configured to enable movement along at least an X-axis; and a second in-plane MEMS actuator configured to enable movement along at least a Y-axis; wherein the first in-plane MEMS actuator is coupled to the second in-plane MEMS actuator.

A MEMS electrostatic actuator that achieves autofocus and super resolution imaging in cameras is disclosed. The actuator is able to provide multi-degrees of freedom motion (of up to 5-degrees-of-freedom). It consists of a moving and fixed parts. The moving part comprises an inner and outer rotor. The inner rotor contains a load stage and the moving plates of the parallel-plate electrodes and is attached to the outer rotor via a plurality of mechanical springs. The outer rotor holds the inner rotor and contains a plurality of openings or tubes surrounded by walls and are attached to the outer periphery of the actuator via multiple mechanical springs. The present device can be used to achieve super resolution functionality in compact cameras.

In some embodiments, the present disclosure relates to a microelectromechanical system (MEMS) comb actuator including a comb structure. The comb structure includes a support layer having a first material and a plurality of protrusions extending away from a first surface of the support layer in a first direction. The plurality of protrusions are also made of the first material. The plurality of protrusions are separated along a second direction parallel to the first surface of the support layer. The MEMS comb actuator may further include a dielectric liner structure that continuously and completely covers the first surface of the support layer and outer surfaces of the plurality of protrusions. The dielectric liner structure includes a connective portion that continuously connects topmost surfaces of at least two of the plurality of protrusions.