In the piezoelectric vibrator element, a larger area of the electrode part making a contribution to the vibration of the piezoelectric vibrator element is ensured. The piezoelectric vibrator element is a tuning-fork piezoelectric vibrator element, provided with a pair of vibrating arm parts extending from a base, and a groove part constant in width is formed on each of principal surfaces (reverse and obverse surfaces) in the longitudinal direction of the vibrating arm part. On the side surfaces and the principal surfaces, and in the groove part of the vibrating arm part, there are formed two systems of excitation electrodes. In the case of defining a width of a bank part formed by a side surface of the vibrating arm part and a side surface of the groove part as W0, and the distance between the excitation electrodes formed on the principal surface of the vibrating arm part as an electrode separation width W1, the electrode separation width W1 is formed in a range of 1 μm<W1<3 μm so as to fulfill W0>W1. By making the electrode separation width narrower than 3 μm, it is possible to increase the width of each of the excitation electrodes formed on the principal surface (on the bank part) of the vibrating arm part. Thus, the area of the electrode part making a contribution to the vibration can be increased, and the piezoelectric effect can be improved.

A vibrating body includes a substrate, a piezoelectric element comprising a piezoelectric layer and electrode layers and joined to the substrate, and a ceramic layer between the substrate and the piezoelectric element. The ceramic layer comprises a first region and a second region which is adjacent to the first region in a direction perpendicular to a thickness direction of the ceramic layer. The first region has a square shape, each side of the first region having a length equal to a thickness of the ceramic layer, the second region has a square shape, each side of the second region having the length equal to the thickness of the ceramic layer, and a difference between a porosity of the first region and a porosity of the second region is not greater than 15%.

A vibration element includes: a substrate; a ceramic layer containing molten glass and provided on the substrate; and a piezoelectric element fixed to the substrate with the ceramic layer therebetween, wherein the piezoelectric element includes a first electrode layer provided in contact with the ceramic layer, a second electrode layer, and a piezoelectric layer provided between the first electrode layer and the second electrode layer, and the first electrode layer has a thickness larger than that of the second electrode layer.

An ultrasonic motor includes a vibrator configured to generate a vibration, a relatively movable member configured to be movable by the vibrator, wherein the relatively movable member is movable relatively according to the vibration of the vibrator, a holding unit configured to hold the vibrator, wherein the holding unit includes a first holding member configured to hold the vibrator and a second holding member; and a damping member provided between the vibrator and the second holding member and configured to reduce a vibration transmitted to the second holding member, a pressure unit configured to press the vibrator against the relatively movable member, wherein the second holding member is configured to press the vibrator against the relatively movable member, and wherein the first holding member is made of a material having a higher damping capability against the vibrator than a material of the second holding member.

A vibration driving device that improves controllability in low speed driving. The vibration driving device includes a vibration actuator that includes a vibrator that has an elastic member and an electro-mechanical energy conversion element, a contact member that contacts the vibrator, and a control device that controls drive of the vibration actuator. The control device includes a speed detection unit that detects speed information showing relative speed of the vibrator and the contact member, and an adjustment unit that decreases amplitude of vibration excited in the vibrator in a case where the speed detection unit detects that a state where the vibration actuator does not operate approximately and a state where the vibration actuator operates at a speed faster than a target driving speed occur alternately after starting to drive the vibration actuator.

Provided is a method of manufacturing an oscillator, including: arranging an electrode on a piezoelectric ceramics free from being subjected to polarization treatment, to thereby provide a piezoelectric element; bonding the piezoelectric element and a diaphragm to each other at a temperature T1; bonding the piezoelectric element and a power supply member to each other at a temperature T2; and subjecting the piezoelectric ceramics to polarization treatment at a temperature T3, in which the temperature T1, the temperature T2, and the temperature T3 satisfy a relationship T1>T3 and a relationship T2>T3.

A control apparatus for a vibration type actuator that moves a vibrating body in which vibrations are excited by an electromechanical energy conversion element, and a contact body contacting the vibrating body relative to each other includes a generation unit configured to generate multi-phase driving signals having a phase difference applied to the electromechanical energy conversion element, and a detection unit configured to detect an actual position of a movable unit including the vibrating body or the contact body. The generation unit sets the phase difference based on a deviation of the actual position from a target position of the movable unit. The generation unit makes larger a change rate of the phase difference against the deviation from when the movable unit stops to when the movable unit starts moving as the target position changes than that after the movable unit starts moving.

A vibration-type actuator includes a vibrator, a contact body, a pressure member, a holding member, and a base. The vibrator has an elastic member and an electro-mechanical energy conversion element fixed to the elastic member. The contact body contacts the vibrator. The pressure member presses the contact body and the vibrator in a first direction. The holding member holds the vibrator and includes a support portion and at least one fitting hole portion extending in the first direction. The support portion supports the vibrator movably in the first direction. The base holds the holding member. The contact body moves relative to the vibrator in a second direction intersecting the first direction. The base includes at least one fitting protrusion portion extending in the first direction and fits in the at least one fitting hole portion.

A piezo actuator comprises a piezo material having a first, top surface, a second, bottom surface, and a third, circumference surface. The piezo material has a polarity and the piezo material includes one or more mounting holes in the piezo material, the one or more mounting holes being positioned substantially central in at least the top surface or the bottom surface of the piezo material. The actuator also comprises at least one contact point for contacting a load to be actuated, the at least one contact point being positioned on the third, circumference, surface of the piezo material, and a set of electrodes being positioned on the top surface of the piezo material and at least one electrode being positioned at the bottom surface of the piezo material.

A vibration type actuator capable of reducing a change in force generated between a contact body and a vibrating body. The vibration type actuator comprising a vibrating body unit including a vibrating body and a holding portion that holds the vibrating body, a pressurizing unit, a contact body that contacts with the vibrating body by a pressurizing force by the pressurizing unit, and a connecting portion, wherein when predetermined vibration is excited in the vibrating body, the contact body and the vibrating body unit move relative to each other in a first direction, and wherein the connecting portion connects the holding portion to a connection object in the first direction, such that the vibrating body unit is displaced at least in a pressurizing direction by the pressurizing unit when the contact body and the vibrating body unit move relative to each other in the first direction.