A motor includes a vibrator, a mover guided by a guide member to move with the vibrator, and rollers sandwiched between the mover and the guide member. The mover includes first and second groove shapes formed along a moving direction of the vibrator to separate from each other. The guide member includes first and second guide parts opposite to the first and second groove shapes, respectively. The rollers are sandwiched among the first and second groove shapes, and the first and second guide parts. On a rear side of a surface of the guide member where the first and second guide parts are formed, the mover includes regulating parts regulating a movement of the guide member to the rear side. When the guide member abuts against the regulating parts, part of each of the rolling balls is positioned inside the first and second groove shapes.

A vibration actuator capable of determining positional relationship between a vibration body and driven body with high accuracy while keeping a pressurized contact state therebetween. The driven body contacts with the vibration body in a first direction and moves in a second direction perpendicular to the first direction. A holding member that holds the vibration body has two holes. A support member that supports the holding member has two projections that fit in the holes to form first and second fitting parts. The projection contacts with the hole in the second direction and in a third direction perpendicular to both the first and second directions in the first fitting part. The projection contacts with the hole in the third direction in the second fitting part. A contact range of the projection and hole in the third direction in the first fitting part differs from that in the second fitting part.

A vibration wave motor includes a vibrator, a friction member having a sliding surface, a guide member, a flexible substrate, and a fixing member configured to fix the friction member, the guide member, and the flexible substrate. The vibrator and the friction member move relative to each other in a predetermined direction. The fixing member includes a substrate-fixing portion configured to fix the flexible substrate, which includes a joint portion, an extending portion extending along the predetermined direction, a bent portion configured to reverse and turn back the extending portion, and a fixed portion to be fixed to the substrate-fixing portion. The flexible substrate is fixed on a surface of the substrate-fixing portion provided in a direction opposite to a direction in which the vibrator is brought into pressure-contact with the friction member.

A piezoelectric driving device includes a vibrating portion including a piezoelectric element for driving and a piezoelectric element for detection and vibrating by driving of the piezoelectric element for driving, a drive circuit that generates a drive signal for driving the piezoelectric element for driving, and a detection circuit that detects vibration of the vibrating portion based on a detection signal output from the piezoelectric element for detection with the vibration of the vibrating portion, wherein the piezoelectric element for detection is placed in an area containing a center of the vibrating portion.

A vibration wave motor includes a vibrator including a piezoelectric device and a vibration plate, and a friction member, wherein the vibrator and the friction member are pressurized to contact each other, and the vibrator is vibrated by the piezoelectric device to be moved relative to the friction member. The motor further includes a guide member that guides relative movement between the vibrator and the friction member, a fixing member that fixes the guide member at a first position and a second position in a direction of the relative movement between the vibrator and the friction member, and an attenuation member held between the friction member and the guide member in a pressure direction in which the vibrator and the friction member are pressurized to contact each other at a location between the first position and the second position.

An ultrasonic motor includes a vibrator configured to generate a vibration, a relatively movable member configured to be movable by the vibrator, wherein the relatively movable member is movable relatively according to the vibration of the vibrator, a holding unit configured to hold the vibrator, wherein the holding unit includes a first holding member configured to hold the vibrator and a second holding member; and a damping member provided between the vibrator and the second holding member and configured to reduce a vibration transmitted to the second holding member, a pressure unit configured to press the vibrator against the relatively movable member, wherein the second holding member is configured to press the vibrator against the relatively movable member, and wherein the first holding member is made of a material having a higher damping capability against the vibrator than a material of the second holding member.

An actuator and tactile sensation providing apparatus include an actuator including a piezoelectric element, a vibration plate, and a support. The vibration plate has the piezoelectric element joined thereto and vibrates in accordance with displacement of the piezoelectric element. The support supports the vibration plate and is configured so that an end of the vibration plate is displaced more in a longitudinal direction than in a normal direction of the vibration plate in accordance with displacement of the piezoelectric element. The angle between the vibration plate and the support is acute. The tactile sensation providing apparatus can further include an object of vibration configured to provide a tactile sensation to a user by vibration of the vibration plate being transmitted to the object of vibration.

A vibration wave driving apparatus includes a vibrator configured to vibrate and movable relative to a friction member to generate a driving force, a pressing member configured to pressurize the vibrator, a transmission member configured to transmit a pressing force by the pressing member to the vibrator, a holding member configured to hold the vibrator, and a viscoelastic member configured to connect the holding member and the transmission member to each other.

A piezoelectric driving device includes a first substrate having cleavability, and a piezoelectric element placed above the first substrate, wherein a cleavage direction of the first substrate and a direction in which a shear force is applied do not coincide in a plan view of the first substrate. Further, an angle formed by the cleavage direction of the first substrate and the direction in which the shear force is applied is equal to or larger than 20° in the plan view of the first substrate. Furthermore, the first substrate contains silicon single crystal.

A vibration wave motor comprises a vibrator including a piezoelectric element and a vibrating body, a friction member including a first surface configured to come into contact with the vibrator, and a second surface, which is a surface on the opposite side of the first surface, the vibrator and the friction member moving relative to each other in a driving direction by a vibration generated by the vibrator, a supporting member configured to support the friction member on the second surface side; and a pressure member configured to bring the vibrator and the friction member into pressure contact with each other. A fixing portion configured to fix the friction member to the supporting member is provided in the friction member. The vibrator can move to a position where at least part of the vibrator and the fixing portion overlap each other in a pressure direction of the pressure member.