A high-torque and high-precision ultrasonic motor with a self-protection function and an implementation mode of the high-torque and high-precision ultrasonic motor are provided. In the device, a gasket encloses an output shaft of an ultrasonic motor body. A harmonic reducer encloses a shell of the ultrasonic motor body. A motor shaft penetrates through the ultrasonic motor body. The end, close to the motor shaft, of the ultrasonic motor body is defined as a top end, and the bottom end of the motor shaft is sequentially enclosed with an encoder support and a high-precision encoder assembly. The gasket, the harmonic reducer, the encoder support and the high-precision encoder assembly are sequentially arranged from the ultrasonic motor body to the bottom end of the motor shaft. After the ultrasonic motor body decelerates and increases torque, the motor shaft outputs rotating speed and torque.

A vibration wave motor includes an annular oscillator, and an annular moving member provided so as to be in press contact with the oscillator. The oscillator includes an annular vibrating plate, and an annular piezoelectric element provided on a first surface of the vibrating plate. The vibrating plate is in contact with the moving member via a second surface of the vibrating plate, which is opposite the first surface. The piezoelectric element has a plurality of drive phase electrodes. When a driving region represents a region of the oscillator in which the drive phase electrodes are provided, and a non-driving region represents a remaining region of the oscillator, a contact area ratio S1 between the vibrating plate and the moving member in the non-driving region is less than a contact area ratio S2 between the vibrating plate and the moving member in the driving region.

Disclosed is a piezoelectric inertial drive stage including a piezoelectric inertial driver, a slider and a holder. The driver includes a mounting portion for the mounting on the holder, a friction portion coupling to the slider, a flexure portion between the mounting portion and friction portion, a piezoelectric element with a first end bonded to the mounting portion and a second end bonded to a movement portion, the movement portion transferring the motion of the piezoelectric element to the friction portion to drive the slider.

A vibration actuator capable of reducing variations of pressure force and reaction force acting on a vibrator and a contact member has a specific construction. Vibrator devices respectively have vibrators, each of which includes an elastic member and an electro-mechanical energy conversion element. A contact member contacts the vibrators and is movable in a predetermined direction relatively to the vibrators. A restraint member fixes a first vibrator device among the vibrator devices to restrict a degree of freedom in the predetermined direction. A flexible member connects a second vibrator device among the vibrator devices to the first vibrator device. The flexible member has predetermined rigidity in the predetermined direction and has rigidity, which is lower than the predetermined rigidity, in directions other than the predetermined direction.

Provided is a vibration wave motor including: a vibrator; a pressurizing member configured to pressurize the vibrator against a friction member; a holding member configured to hold the vibrator; and a buffering member provided between the vibrator and the holding member. The vibrator and the friction member are moved relatively to each other in a relative movement direction by vibration of the vibrator, and the holding member holds the vibrator in such a manner that an extending part extending in a pressurizing direction of the pressurizing member sandwiches the vibrator and the buffering member.

An ultrasonic motor includes a vibration section having a piezoelectric element configured to generate vibration by receiving a drive voltage, a driven section, a convex section connected to the vibration section and configured to transmit vibration of the vibration section to the driven section, a drive circuit configured to generate the drive voltage, an encoder configured to detect a movement amount of the driven section, a storage section configured to store a specified voltage value, and a determination section configured to receive position information from the encoder when the driven section starts to move and a voltage value at the time of start up from the drive circuit and to determine that least one of the convex section or the driven section is worn out when the voltage value at the time of start up is larger than the specified voltage value.

A vibration type actuator includes a vibrator, including a protrusion and a piezoelectric element, that is arranged to vibrate in response to a voltage, and a contact member having a contact surface which the protrusion contacts. The vibrator and the contact member rotate relative to each other around a first axis. The vibrator is tilted to the contact surface by a predetermined angle.

A vibration type actuator providing a satisfactory actuator performance even when an increase in speed is achieved and having a contact spring. The actuator includes a vibrator equipped with an electrical-mechanical energy conversion element, an elastic member to which the electrical-mechanical energy conversion element is fixed, and a protrusion provided on the elastic member. The vibrator can generate an elliptic movement in the protrusion. A driven body is configured to come into contact with the protrusion and to make a relative movement with respect to the vibrator. The protrusion includes a contact portion having a contact surface contacting the driven body, a continuous side wall portion protruding with respect to one end surface of the elastic member and forming a hollow structure, and a connection portion connecting the contact portion and the side wall portion and exhibiting flexibility in a direction normal to the contact surface.

A vibration wave motor comprises a vibrator including a piezoelectric element and a vibrating body, a friction member including a first surface configured to come into contact with the vibrator, and a second surface, which is a surface on the opposite side of the first surface, the vibrator and the friction member moving relative to each other in a driving direction by a vibration generated by the vibrator, a supporting member configured to support the friction member on the second surface side; and a pressure member configured to bring the vibrator and the friction member into pressure contact with each other. A fixing portion configured to fix the friction member to the supporting member is provided in the friction member. The vibrator can move to a position where at least part of the vibrator and the fixing portion overlap each other in a pressure direction of the pressure member.

A vibration actuator that is reduced in the change of posture of a vibration element with respect to a contact body. The vibration element unit and the contact body are movable relative to each other. The vibration element unit includes a vibration element in contact with the contact body, a first holding member that holds the vibration element, a base, a first supporting member that is fixed to the base, and movably supports the first holding member in a direction orthogonal to a friction sliding surface of the contact body in slide contact with the vibration element, while maintaining the vibration element in a predetermined posture with respect to the contact body, and an urging unit that is arranged on the base independently of the first supporting member and presses the vibration element in a direction orthogonal to the friction sliding surface of the contact body.