An ultrasonic motor includes an actuator with a piezo-electric plate, at least one friction element, an element to be driven in active contact with the friction element, a tensioning device for pressing the friction element against the element to be driven, and a thermo-compensation platform having abutting sections by which displacement of the actuator is only possible along abutting side surfaces of the piezo-electric plate. The tensioning device includes two rotation angle levers of which two tension lever arms are connected to one another via a tensioned tension spring, to exert torque on the rotation angle lever such that pressure lever arms will act on the actuator to be linearly guided by the abutting sections in the direction of the element to be driven.

A small-sized vibration motor. The vibration motor includes a vibrator having a piezoelectric element, a contact member brought into friction contact with the vibrator, and a fixing member to which the contact member is fixed. The vibrator and the contact member are moved relative to each other in a driving direction by high-frequency vibration of the piezoelectric element. The contact member includes a sliding portion brought into friction contact with the vibrator when the vibrator and the contact member are moved relative to each other in the driving direction, and fixed portions via which the contact member is fixed to the fixing member. The fixed portions are formed at respective locations alongside the sliding portion in a second predetermined direction orthogonal to the first predetermined direction, and also inward of opposite ends of the contact member in the first predetermined direction.

Disclosed is a vibration wave motor including: a vibrator provided with a piezoelectric element and a vibration plate; a frictional member having a frictional contact surface coming into contact with the vibrator; a fixing member having a recess to which the frictional member is fixed; and pressurizing unit that pressurizes the vibrator toward the frictional member, wherein the vibrator and the frictional member make relative movement using vibration generated from the vibrator, a fixing material for fixing the frictional member is provided between the frictional member and the fixing member, and the frictional member is fixed by coming into contact with the fixing member.

A piezoelectric drive device includes a vibrating part which has a piezoelectric element, and drives a driven part using the piezoelectric element, and a first plate spring part configured to bias the vibrating part in a first direction from the vibrating part toward the driven part. The first plate spring part extends toward a second direction crossing the first direction, the first plate spring part is disposed so as to be opposed to the vibrating part in a third direction perpendicular to the first direction and the second direction, and when dividing the first plate spring part into a first portion and a second portion farther from the vibrating part than the first portion so that a length along the third direction is equally divided, a volume of the second portion is larger than a volume of the first portion.

A piezoelectric actuator includes a vibrating section including a piezoelectric element, a distal end face, and a recess opened on the distal end face and a protrusion section including a base that overlaps the recess in plan view of the distal end face and is fixed to the distal end face and a projection that is provided in the base and projects in an opposite direction of the distal end face, the protrusion section transmitting a driving force of the vibrating section to a driven section. In plan view of the distal end face, the projection is disposed within a range of the recess.

Disclosed is a piezoelectric inertial drive stage including a piezoelectric inertial driver, a slider and a holder. The driver includes a mounting portion for the mounting on the holder, a friction portion coupling to the slider, a flexure portion between the mounting portion and friction portion, a piezoelectric element with a first end bonded to the mounting portion and a second end bonded to a movement portion, the movement portion transferring the motion of the piezoelectric element to the friction portion to drive the slider.

A vibrator of a vibration-type driving device according to an aspect of the present invention includes a first vibrating member that includes first protrusions protruding in a first direction, a second vibrating member that includes second protrusions protruding in a direction that is opposite to the first direction, and an electric-mechanical energy conversion element that is fixed to the first vibrating member. The first protrusions and the second protrusions each have a hollow structure, and the first vibrating member and the second vibrating member are disposed in such a manner that a surface of the first vibrating member on which the first protrusions are not formed and a surface of the second vibrating member on which the second protrusions are not formed face each other.

A vibration type motor includes a limiter configured to limit a distance between a movable guide member and a fixed guide member. The limiter has first, second, and third limiting areas. The first limiting area is disposed between the first roll member and the second roll member in the second direction. The second limiting area is disposed on the same side as the second roll member with respect to the first roll member and distant from the second roll member in the second direction. The third limiting area is disposed on an opposite side of the second roll member with respect to the first roll member in the second direction. A length of the first limiting area in the first direction is equal to or longer than that of each of the second limiting area and the third limiting area in the first direction.

A vibration actuator that is capable of reducing variations of pressure force and reaction force acting on a vibrator and a contact member. Vibrator devices respectively have vibrators each of which includes an elastic member and an electro-mechanical energy conversion element. A contact member contacts the vibrators and is movable in a predetermined direction relatively to the vibrators. A restraint member fixes a first vibrator device that is at least one of the vibrator devices to restrict a degree of freedom in the predetermined direction. A flexible member connects a second vibrator device that is at least one of the vibrator devices to the first vibrator device. The flexible member has predetermined rigidity in the predetermined direction and has rigidity, which is lower than the predetermined rigidity, in directions other than the predetermined direction.

A vibration wave motor includes a vibrator including an electrical-mechanical energy conversion element and an elastic member, a contact member in contact with the elastic member, and a supporting member that supports the vibrator, wherein the supporting member supports an outer periphery portion of the vibrator so as to be movable along a direction in which the vibrator is pressed toward the contact member, and selectively supports a node of a vibration of the vibrator.