Patent classifications
H02N2/043
Six-degree-of-freedom micro vibration suppression platform and control method thereof
A six-degree-of-freedom micro vibration suppression platform includes a basic platform, a load platform, six sets of single-degree-of-freedom active and passive composite vibration isolation devices that are exactly the same and a controller. Upper and lower ends of each set of single-degree-of-freedom active and passive composite vibration isolation devices are connected with the load platform and the basic platform, respectively. A control method includes: calculating a logical axis signal, calculating a logical axis control signal, calculating physical axis real-time control signals and a transfer step.
MEMS tunable capacitor comprising amplified piezo actuator and a method for making the same
A micromachined tunable capacitor. A pair of first and second MEMS fabricated flexures are flexibly coupled to a piezo actuator drive element configured wherein a stress or strain induced by the piezo actuator drive element urges a first movable capacitor plate element a predetermined distance toward or away from a second capacitor plate element proportional to a predetermined voltage signal.
HYDRAULIC ACTUATOR AND METHOD FOR OPERATING A HYDRAULIC ACTUATOR
The hydraulic actuator comprises: a hydraulic input cylinder having an input piston; a hydraulic output cylinder, which is hydraulically coupled to the input cylinder; and a pressure-limiting valve, which limits the output cylinder with respect to pressure in dependence on the usability of a force on the input piston. The method is a method for operating such a hydraulic actuator, wherein the drive actuator is deflected with deflections having a deflection duration at a deflection frequency for the duration of an acting or a non-acting phase of the hydraulic actuator, wherein the deflection duration defines a movement stiffness of the hydraulic actuator and the deflection frequency defines the resulting deflection speed of the hydraulic actuator.
Vacuum circuit interrupter with piezoelectric actuator and vacuum circuit breaker incorporating same
A vacuum circuit breaker comprises a vacuum interrupter operable between a closed state and an open state, and an actuator. The actuator comprises a piezoelectric driving element that is expandable and contractable along an expansion axis in response to an electrical input signal. The actuator further comprises a mechanical amplifying structure extendable along an actuation axis and being mechanically coupled to the piezoelectric driver such that expansion or contraction of said piezoelectric driving element causes the amplifying structure to extend or retract along the actuation axis. The mechanical amplifying structure is coupled to the vacuum interrupter for operating the vacuum interrupter between said closed and open states.
ROTARY MOTOR
The present disclosure provides a rotary motor, which includes: a clamping member having a gripping unit installed at an inner circumference of a rotor to grip the rotor during a predetermined time; and a driving member installed at the inner circumference of the rotor and having a rotation unit configured to make an elastic deformation to rotate by a predetermined angle and then return to an original state so that the rotor is rotated.
Pressure control valve, a fluid handling structure for lithographic apparatus and a lithographic apparatus
A pressure control valve has: a passageway having a flow opening; an member displaceable relative to the opening for obstructing the opening by differing amounts; a piezo actuator; and a linkage mechanism adapted to amplify a dimensional change in the piezo actuator and to use the amplified dimensional change to displace the member relative to the opening, wherein the linkage mechanism comprises a frame attached to a wall and fixed at a first end in relation to the passageway, a portion of the frame moveable in a first direction while being substantially restrained in a second direction orthogonal to the first direction, the piezo actuator extending between the wall and the movable portion such that an expansion of the piezo actuator results in movement of the movable portion in the first direction by an amount greater than the expansion of the piezo actuator, the moveable portion connected to the member.
PIEZOELECTRIC DEVICE
The present disclosure relates to a piezoelectric device, and more particularly, to a piezoelectric device including: a piezoelectric actuator; a displacement transmission structure disposed on the piezoelectric actuator; and a displacement amplification structure disposed between the piezoelectric actuator and the displacement transmission structure. Here, the displacement amplification structure includes: a first displacement amplification structure and a second displacement amplification structure, which cross each other; and a fixing pin that passes through the first displacement amplification structure and the second displacement amplification structure to connect the first displacement amplification structure and the second displacement amplification structure. Also, each of one end of the first displacement amplification structure and one end of the second displacement amplification structure may be fixed on the piezoelectric actuator.
THIN FILM ACTUATOR HAVING TRANSVERSELY ORIENTED STRUCTURAL STIFFENERS TO INCREASE ACTUATOR STROKE
A thin film actuator having transversely oriented structural stiffeners that serve to increase actuation stroke that results from longitudinal curvature. The thin film actuator may be deployed within electromechanical devices such that an actuatable deflection of a tip of the actuator plate produces the actuation stroke. The thin film actuator may include an actuator plate affixed to a substantially rigid frame structure. The actuator plate protrudes along a longitudinal axis away from the frame structure such that the actuator plate is cantilevered from the frame structure by some distance along this longitudinal axis. The thin film actuator includes a piezoelectric film on a surface of the actuator plate. Activation of the piezoelectric film generates tensile stress or compressive stress at the surface, thereby inducing a bending moment that causes the actuator plate to undergo longitudinal curvature and some lesser degree of transverse curvature.
STROKE TRANSMITTER FOR AN ACTUATOR DEVICE
The invention relates to a stroke transmitter for an actuator device. The stroke transmitter comprises a first and a second conversion unit, which are mechanically connected to one another in series, wherein the first conversion unit is designed as a hydraulic conversion unit, it can be connected to an actuator on its drive side and it is connected to the drive side of the second conversion unit on its output side, wherein the second conversion unit is designed as a cable system and has an output element on its output side. The invention also relates to an actuator device comprising an actuator and a stroke transmitter mechanically connected in series with the actuator.
Driving mechanism for optical element
An optical element driving mechanism is provided. The optical element driving mechanism includes a movable portion, a fixed portion, a driving assembly, and a support element. The movable portion is used for connecting to an optical element having a main axis. The movable portion is movable relative to the fixed portion. The driving assembly is disposed on the fixed portion or the movable portion. The driving assembly is used to drive the movable portion to move relative to the fixed portion. The movable portion is connected to the fixed portion through the support element.