A vibration actuator control apparatus includes a control amount output unit. The control amount output unit includes a trained model trained by machine learning configured to output a control amount, if the target speed and a value based on the target position are input to the trained model, to move the contact body relative to the vibrator. The value based on the target position is a value based on a product of first and second values. The first value is a value based on a difference between the target position and a detection position detected from the vibration actuator moved based on the control amount. The second value is a value based on a ratio between the control amount output from the control amount output unit and a value output from the trained model if the target speed and a predetermined value are input to the trained model.

A vibration driving device that improves controllability in low speed driving. The vibration driving device includes a vibration actuator that includes a vibrator that has an elastic member and an electro-mechanical energy conversion element, a contact member that contacts the vibrator, and a control device that controls drive of the vibration actuator. The control device includes a speed detection unit that detects speed information showing relative speed of the vibrator and the contact member, and an adjustment unit that decreases amplitude of vibration excited in the vibrator in a case where the speed detection unit detects that a state where the vibration actuator does not operate approximately and a state where the vibration actuator operates at a speed faster than a target driving speed occur alternately after starting to drive the vibration actuator.

The present disclosure relates to a linear drive, including: an actuator unit with at least one actuator; two guide elements and a movement element, wherein the movement element is displaceable along both guide elements by a movement generated by the actuator unit as a result of a stick-slip effect. In order to allow a more accurate displacement of the movement element in a compact design of the linear drive, the movement element can be brought into engagement with each of the two guide elements by static friction in order to be displaced along the two guide elements as a result of the stick-slip effect.

An actuator assembly including a first piezo actuator and a second piezo actuator. The piezo actuator has a correction unit configured to determine an output voltage difference representing a difference between a voltage at the output terminal of the first piezo actuator and a voltage at the output terminal of the second piezo actuator, and a first power correction for correcting the first power signal and/or a second power correction for correcting the second power signal, based on the output voltage difference.

A driving circuit for driving a piezoelectric load, can include: a rechargeable power supply; a power stage circuit coupled between the rechargeable power supply and the piezoelectric load; where during a first operation interval of an operation period, the rechargeable power supply charges the piezoelectric load through the power stage circuit, such that a power supply voltage signal provided to the piezoelectric load in the first operation interval corresponds to a reference voltage in a first interval; and where during a second operation interval of the operation period, the piezoelectric load charges the rechargeable power supply through the power stage circuit, such that the power supply voltage signal in the second operation interval corresponds to the reference voltage in a second interval.

A lens driving device according to an embodiment includes a moving part including a lens; a driving part for driving the moving part in an optical axis direction; and a sensing part for sensing a position of the moving part; wherein the moving part includes: a magnet scaler in which a first pole and a second pole are alternately arranged in a first direction; and a reference magnet corresponding to the magnet scaler and having a first pole and a second pole disposed in a second direction perpendicular to the first direction.

A processor applies a first driving signal having a first driving frequency to a first actuator, applies a second driving signal having a second driving frequency to a second actuator, generates a first angle detection signal by performing first frequency filter processing based on the first driving frequency on an output signal of a first angle detection sensor, generates a second angle detection signal by performing second frequency filter processing based on the second driving frequency on an output signal of a second angle detection sensor, derives a first angle, which is an angle of a mirror portion around a first axis, based on the first angle detection signal, derives a second angle, which is an angle of the mirror portion around a second axis, based on the second angle detection signal, adjusts the first driving signal based on the first angle, and adjusts the second driving signal based on the second angle.

The invention provides a substrate support arranged to support a substrate, comprising piezo a actuator, further comprising a first pair of electrodes, a second pair of electrodes and a piezo material having a first surface and a second surface. The first surface is arranged along a first direction and second direction. The first pair of electrodes comprises a first electrode arranged on the first surface and a second electrode arranged on the second surface. The second pair of electrodes is arranged to shear the piezo material. The first pair of electrodes is arranged to elongate the piezo material in a third direction perpendicular to the first direction and second direction. The first electrode is divided into at least two parts and is arranged to rotate the first surface and the second surface relatively to each other about the first direction wherein the piezo actuator is arranged to support the substrate.

A MEMS device includes a semiconductor body with a cavity and forming an anchor portion, a tiltable structure elastically suspended over the cavity, first and second support arms to support the tiltable structure, and first and second piezoelectric actuation structures biasable to deform mechanically, generating a rotation of the tiltable structure around a rotation axis. The piezoelectric actuation structures carry first and second piezoelectric displacement sensors. When the tiltable structure rotates around the rotation axis, the displacement sensors are subject to respective mechanical deformations and generate respective sensing signals in phase opposition to each other, indicative of the rotation of the tiltable structure. The sensing signals are configured to be acquired in a differential manner.

The present disclosure relates to a piezoelectric stick-slip-motor and control method. An exemplary method to enable speed variation of the piezoelectric stick-slip-motor with a reduced noise generation, includes: applying a cyclic sawtooth-waveform drive voltage signal with a constant frequency in which the drive voltage (V) increases to and decreases from a peak voltage (Vp) for operating the motor with a constant speed; and changing the motor speed by gradually increasing or decreasing the gradient (dV/dt) of increasing the drive voltage (V) to the peak voltage (Vp) with each subsequent sawtooth-waveform drive voltage signal cycle (C) while keeping the frequency of the drive voltage signal constant.