One aspect of the present invention relates to a driver of a vibrator including: a control section; and an alternating current signal generation section configured to generate an alternating current signal based on an output from the control section, and to apply the alternating current signal to the vibrator, wherein the control section is configured to lower a frequency of the alternating current signal, and to change, after the frequency change, at least one of a voltage ratio and a phase difference of the alternating current signal such that the ellipse ratio of the elliptical motion changes from a first ellipse ratio to a second ellipse ratio, the second ellipse ratio has a larger ratio of a component in a moving direction in the elliptical motion to a component in a direction perpendicular to the moving direction in the elliptical motion than the first ellipse ratio.

A method for operating an electromechanical element, comprising the following steps:

by controlling a first control section (A1) which is deformable by an electrical voltage by a first voltage signal (S10) generation of adjusting movements of a friction element which is arranged on the electromechanical element and which is provided for frictional contact with an element (90) to be driven,

controlling of a second control section (A2) which is deformable by an electrical voltage by a second voltage signal (S20), which comprises a signal section (S21), the frequency of which compared to the first voltage signal (S10) is by a factor,

an actor, a drive device with an actor and a motor with a drive device and an element to be driven.

A short-travel nanoscale motion stage and a method for measuring thermally-related hysteresis data are provided. A stator unit of a left two-pole electromagnet and stator units of two inchworm motors are fixed on a right side surface of a left foundation frame, and an active unit of the left two-pole electromagnet and actives of the two inchworm motors are fixed on a left side surface of a stage moving component. An active unit of a right two-pole electromagnet is fixed on a right side surface of the stage moving component, while a stator unit of the right two-pole electromagnet is fixed on a left side surface of a right foundation frame. The stage moving component is fixedly mounted on a guide sleeve of an aerostatic guideway. Each of the stator units of the left and right two-pole electromagnets has an eddy current sensor and a hall sensor fixed therein.

A piezoelectric positioning device (1) has at least one piezoelectric actuator (3) having a first connection contact (4) and a second connection contact (5). A control device (6) with digital/analog converters (12, 16) connected to the connection contacts (4, 5) is used to control the at least one piezoelectric actuator (3). In comparison with a coarse converter (12), a fine converter (16) has a comparatively smaller voltage range and lower voltage levels, with the result that a high degree of positioning accuracy can be achieved.

There is provided a drive controller including a determination part that compares a target stop position of a movable body, which is driven by a piezoelectric actuator driven by a piezoelectric element expanded and contracted in response to an applied voltage, with a real position of the movable body acquired on the basis of a position sensor, and determines whether or not the target stop position matches with the real position, and a drive control part that turns off energization of the piezoelectric actuator when the target stop position matches with the real position while the movable body is being driven by the piezoelectric actuator.

Disclosed is a thermo-mechanical actuator (100) comprising a piezo¬electric module (110), the piezo-electric module comprising at least one piezo-electric element (120), wherein the thermo-mechanical actuator is configured to: receive a thermal actuation signal (132) for controlling a thermal behaviour of the piezo-electric module, or provide a thermal sensing signal (132) representative of a thermal state of the piezo-electric module, and, wherein the thermo-mechanical actuator is configured to: receive a mechanical actuation (134) signal for controlling a mechanical behaviour of the piezo-electric module, or provide a mechanical sensing signal (134) representative of a mechanical state of the piezo-electric module.

The present disclosure relates to driver circuitry for driving a piezoelectric transducer. The circuitry comprises: output stage circuitry configured to receive an input signal and to drive the piezoelectric transducer to produce the output signal; variable voltage power supply circuitry configured to output a supply voltage for the charge drive output stage circuitry, wherein the supply voltage output by the variable voltage power supply circuitry varies based on the input signal; a supply capacitor for receiving the supply voltage output by the variable voltage power supply circuitry; a reservoir capacitor; and circuitry for transferring charge between the reservoir capacitor and the supply capacitor.

A vibration driving device that improves controllability in low speed driving. The vibration driving device includes a vibration actuator that includes a vibrator that has an elastic member and an electro-mechanical energy conversion element, a contact member that contacts the vibrator, and a control device that controls drive of the vibration actuator. The control device includes a speed detection unit that detects speed information showing relative speed of the vibrator and the contact member, and an adjustment unit that decreases amplitude of vibration excited in the vibrator in a case where the speed detection unit detects that a state where the vibration actuator does not operate approximately and a state where the vibration actuator operates at a speed faster than a target driving speed occur alternately after starting to drive the vibration actuator.

A method of controlling a piezoelectric motor as a piezoelectric drive device having a vibrator including piezoelectric elements, a rotor as a driven unit that moves at a target speed by vibration of the vibrator, and drive signal generation units that generate drive signals and output the drive signals to the piezoelectric elements, includes intermittently outputting the drive signals to the piezoelectric elements by the drive signal generation units, wherein a time when output of the drive signals is stopped is shorter than a time from when output of the drive signal is stopped to stoppage of the vibration.

A driving circuit for driving a piezoelectric load, can include: a rechargeable power supply; a power stage circuit coupled between the rechargeable power supply and the piezoelectric load; where during a first operation interval of an operation period, the rechargeable power supply charges the piezoelectric load through the power stage circuit, such that a power supply voltage signal provided to the piezoelectric load in the first operation interval corresponds to a reference voltage in a first interval; and where during a second operation interval of the operation period, the piezoelectric load charges the rechargeable power supply through the power stage circuit, such that the power supply voltage signal in the second operation interval corresponds to the reference voltage in a second interval.