A piezoelectric motor includes a driven body configured to rotate around a rotation axis, a first piezoelectric vibrator configured to transmit a driving force to the driven body, a moving mechanism configured to move the first piezoelectric vibrator in directions approaching and separating from the rotation axis, and a second piezoelectric vibrator configured to transmit a driving force to the moving mechanism. The moving mechanism includes a screw shaft disposed along the directions and configured to rotate around an axis with the driving force of the second piezoelectric vibrator and a holding section configured to screw with the screw shaft and hold the first piezoelectric vibrator.

Disclosed is a force transfer device that includes a first body that has a first body frame that defines a first chamber and at least one gear element. The gear element has a central gear element region. A first membrane is affixed to a surface of the first body frame, the membrane covering the chamber and having an annular aperture enclosing a central region of the membrane that is affixed to the central gear element region of the gear element. The disclosed force transfer device can be axle or shaft based. Also disclosed in a micro electrostatic motor that includes a motor body having a first and a second face, the motor body defining a chamber and a rotor having a central region. A membrane is disposed over the first face of the motor body, the membrane supporting a pair of spaced electrodes that are electrically isolated by a gap, the membrane having an annular aperture that defines a central region of the membrane that is coupled to the central region of the rotor. The force transfer device can be driven by the electrostatic motor.

A scanner comprises a mirror, a first piezoelectric actuator, a second piezoelectric actuator, a third piezoelectric actuator, a fourth piezoelectric actuator, a first connecting member, a second connecting member, a first mirror spring, a second mirror spring, a stationary member, a first plurality of actuator springs, a second plurality of actuator springs, a third plurality of actuator springs, a fourth plurality of actuator springs, a first plurality of electrodes, and a second plurality of electrodes. The scanner is driven by piezoelectric actuators. A method of fabricating the scanner comprises the steps of providing a wafer; oxidation; deposition; patterning; and applying a singulation process.

An optical element driving mechanism is provided that includes a fixed assembly, a movable assembly, a driving assembly, and a circuit assembly. The movable assembly is configured to be connected to an optical element, and the movable assembly is movable relative to the fixed assembly. The driving assembly is configured to drive the movable member to move relative to the fixed assembly. The circuit assembly is electrically connected to the driving assembly, and the circuit assembly includes an electrical connection element having a resin material.

A vibration actuator includes a vibrator including a shaft, an output transmission member penetrated by the shaft, and configured to rotate about the axis of the shall, and a fixed member configured not to move relative to the shaft and configured to move relative to the output transmission member. The fixed member includes a base portion and a projection portion protruding from the base portion to the output transmission member side, the vibration actuator includes a pressure reception member between the base portion and the output transmission member in an axial direction of the shaft, and wherein the projection portion and the output transmission member are in contact with each other in a direction orthogonal to the axial direction of the shaft, and the projection portion and the output transmission member are not in contact with each other in the axial direction of the shaft.

A novel high-precision rigid-flexible coupling rotating platform includes a foundation, a rigid bearing, a bearing sleeve, a core rotating platform, a rotating driver and a coder; the bearing sleeve is fixed on the foundation; the rigid bearing is in rotatable drive connection with the core rotating platform, and connected with the foundation through the bearing sleeve; an upper surface of the core rotating platform is provided with a plurality of groups of flexible hinges; when the rotating driver applies a driving force to rotate the core rotating platform, the driving force elastically deforms the flexible hinge rings. The flexible hinges are used and disposed on the upper surface of the core rotating platform; without disassembling the whole rotating platform, a corresponding group of flexible hinges can be changed but an assembling relationship between other groups of flexible hinges cannot be broken.

A rotational force transmitting apparatus includes a cylindrical fixed member, a rotating member configured to rotate around the cylindrical fixed member, a first bearing member held by the cylindrical fixed member and configured to rotate around an axis parallel to a rotation axis of the rotating member, and a second bearing member held by the cylindrical fixed member and configured to rotate around a radial direction of the rotating member.

An optical element driving mechanism is provided that includes a fixed assembly, a movable assembly, a driving assembly, and a circuit assembly. The movable assembly is configured to be connected to an optical element, and the movable assembly is movable relative to the fixed assembly. The driving assembly is configured to drive the movable member to move relative to the fixed assembly. The circuit assembly is electrically connected to the driving assembly, and the circuit assembly includes an electrical connection element having a resin material.

An optical element driving mechanism is provided. The optical element driving mechanism includes a fixed portion, a movable portion, and a driving assembly. The fixed portion includes a main axis. The movable portion is movably disposed on the fixed portion. The movable portion is connected to an optical element. The driving assembly is used for driving the movable portion to move relative to the fixed portion.

An optical element driving mechanism is provided. The optical element driving mechanism includes a movable portion, a fixed portion, a driving assembly, and a support element. The movable portion is used for connecting to an optical element having a main axis. The movable portion is movable relative to the fixed portion. The driving assembly is disposed on the fixed portion or the movable portion. The driving assembly is used to drive the movable portion to move relative to the fixed portion. The movable portion is connected to the fixed portion through the support element.