The systems and methods of oscillator frequency tuning using a bulk acoustic wave resonator include a relaxation oscillator, a BAW oscillator, a frequency counter, and an adjustment module. The BAW oscillator provides an accurate time reference even over temperature changes. The BAW oscillator is turned on periodically and the relaxation oscillator is calibrated with the BAW oscillator. A temporary and periodic enablement of the BAW oscillator maintains a low current consumption. The frequency counter counts a number of full periods of the BAW oscillator that occur in one period of the relaxation oscillator. Since each frequency is known, the number of pulses of the BAW oscillator that should occur during one period of the relaxation oscillator is known. If the count is different from what should be counted, a correction may be made by adjusting an input parameter of the relaxation oscillator.

An oscillator circuit includes a first BAW oscillator, a first coupling stage, a second BAW oscillator, and a second coupling stage. The first BAW oscillator is configured to generate a first output signal at a frequency. The first coupling stage is coupled to the first BAW oscillator, and is configured to amplify the first output signal. The second BAW oscillator is coupled to the first coupling stage, and is configured to generate a second output signal at the frequency. The second output signal differs in phase from the first output signal. The second coupling stage is coupled to the first BAW oscillator and the second BAW oscillator, and is configured to amplify the second output signal and drive the first BAW oscillator.

The systems and methods of oscillator frequency tuning using a bulk acoustic wave resonator include a relaxation oscillator, a BAW oscillator, a frequency counter, and an adjustment module. The BAW oscillator provides an accurate time reference even over temperature changes. The BAW oscillator is turned on periodically and the relaxation oscillator is calibrated with the BAW oscillator. A temporary and periodic enablement of the BAW oscillator maintains a low current consumption. The frequency counter counts a number of full periods of the BAW oscillator that occur in one period of the relaxation oscillator. Since each frequency is known, the number of pulses of the BAW oscillator that should occur during one period of the relaxation oscillator is known. If the count is different from what should be counted, a correction may be made by adjusting an input parameter of the relaxation oscillator.

An oscillation module includes: an oscillation circuit; a multiplication circuit which is provided at a stage subsequent to the oscillation circuit and is operated by differential motion; and an output circuit which is provided at a stage subsequent to the multiplication circuit.

The present disclosure describes a low-power, low-phase-noise (LPLPN) oscillator. The LPLPN oscillator includes a resonator load, an amplifier stage, and a loop gain control circuit. The resonator load is structured to resonate at a primary resonant frequency. The amplifier stage is coupled with the resonator load to develop a loop gain that peaks at the primary resonant frequency. The loop gain control circuit is coupled with the amplifier stage, and it is structured to regulate the loop gain for facilitating the amplifier stage to generate an oscillation signal at the primary resonant frequency and suppress a noise signal at a parasitic parallel resonant frequency (PPRF).

An oscillator and method for generating a signal are provided. The oscillator comprises an electro-mechanical resonator and a reconfigurable oscillator driver. The reconfigurable oscillator driver starts the oscillator in single-ended mode to avoid latching and transitions the oscillator to differential mode in such a manner as to sustain oscillations therein. The reconfigurable oscillator driver may comprise two back-to-back banks of inverters and an adjustable feedback resistor. In single-ended mode, one bank is disabled and the other bank is enabled. To transition to differential mode and improve the quality of the signal, the number of enabled inverters is equalized in both banks.

A bulk acoustic wave (BAW) resonator includes a substrate having a top side surface and a bottom side surface. A Bragg mirror is on the top side surface of the substrate. A bottom electrode layer is on the Bragg mirror, and a piezoelectric layer is on the bottom electrode layer. A top dielectric layer is on the piezoelectric layer, and a top electrode layer is on the top dielectric layer. The bottom side surface of the substrate has a surface roughness of at least 1 m root mean square (RMS).

The present disclosure describes a low-power, low-phase-noise (LPLPN) oscillator. The LPLPN oscillator includes a resonator load, an amplifier stage, and a loop gain control circuit. The resonator load is structured to resonate at a primary resonant frequency. The amplifier stage is coupled with the resonator load to develop a loop gain that peaks at the primary resonant frequency. The loop gain control circuit is coupled with the amplifier stage, and it is structured to regulate the loop gain for facilitating the amplifier stage to generate an oscillation signal at the primary resonant frequency and suppress a noise signal at a parasitic parallel resonant frequency (PPRF).

A surface acoustic wave resonator includes an IDT that is disposed on a quartz crystal substrate of Euler angles (1.51.5, 117142, ) and excites a surface acoustic wave resonant in an upper part of a stop-band of the IDT, and inter-electrode finger grooves that are acquired by depressing the substrate located between electrode fingers configuring the IDT. The wavelength of the surface acoustic wave, the depth of the inter-electrode finger grooves, the line occupancy ratio of the IDT, and the film thickness of the electrode fingers of the IDT are set in correspondence with one another.

An integrated circuit may include oscillator circuitry having a resonator formed from fin field-effect transistor (FinFET) devices. The resonator may include drive cells of alternating polarities and sense cells interposed between the drive cells. The resonator may be connected in a feedback loop within the oscillator circuitry. The oscillator circuitry may include an amplifier having an input coupled to the sense cells and an output coupled to the drive cells. The oscillator circuitry may also include a separate inductor and capacitor based oscillator, where the resonator serves as a separate output filter stage for the inductor and capacitor based oscillator.