There are provided an acoustic resonator module, and a method of manufacturing the same. An acoustic resonator module includes a resonating part disposed on a substrate and an inductor electrically connected to the resonating part, and having at least a portion disposed to be spaced apart from the substrate.

A piezoelectric device includes a piezoelectric vibrating piece and a base. The piezoelectric vibrating piece includes an excitation portion, a framing portion, a connecting portion, excitation electrodes, and extraction electrodes. The base includes a mounting terminal, a cutout portion formed on a side surface, and a cutout-portion electrode formed in the cutout portion. The cutout-portion electrode connects the mounting terminal to the extraction electrode. The extraction electrode includes a cutout-portion region connected to the cutout-portion electrode, an excitation-electrode connecting region connected to the excitation electrode, and an erosion preventing region disposed between the cutout-portion region and the excitation-electrode connecting region to prevent erosion by solder. The extraction electrode in the erosion preventing region is formed without containing gold (Au) and silver (Ag), and the extraction electrodes in the cutout-portion region and the excitation-electrode connecting region are formed containing at least one of gold (Au) and silver (Ag).

A vibrator includes a vibration element having an excitation section which is provided with excitation electrodes, and which excites a thickness shear vibration, and a fixation section electrically coupled to at least one of the excitation electrodes, a vibration attenuator disposed on at least one of principal surfaces of the vibration element, and a support substrate having a coupling electrode which is electrically coupled to the fixation section, and which supports the vibration element, wherein the vibration attenuator is disposed at the fixation section side of the excitation electrodes, and at an outer circumferential edge side of the vibration element from the fixation section in a direction perpendicular to a direction in which the excitation electrodes and the fixation section are arranged side by side.

A vibrator includes a vibration element having an excitation section which is provided with excitation electrodes, and which excites a thickness shear vibration, and a fixation section electrically coupled to at least one of the excitation electrodes, a vibration attenuator disposed on at least one of principal surfaces of the vibration element, and a support substrate having a coupling electrode which is electrically coupled to the fixation section, and which supports the vibration element, wherein the vibration attenuator is disposed at the fixation section side of the excitation electrodes, and at an outer circumferential edge side of the vibration element from the fixation section in a direction perpendicular to a direction in which the excitation electrodes and the fixation section are arranged side by side.

A crystal vibrator that includes a crystal substrate having a front surface and a rear surface, including a vibration portion in a region including a center of the crystal substrate, and a first peripheral portion that surrounds a periphery of the vibration portion and that has a smaller thickness than the vibration portion. Drive electrodes are formed on both surfaces of the vibration portion of the crystal substrate. In at least one of the front surface and the rear surface of the crystal substrate, a step is provided between the vibration portion and the first peripheral portion, and a first peripheral edge portion of the vibration portion and a second peripheral edge portion of the first peripheral portion are in a curved surface shape.

A crystal vibrator that includes a crystal substrate having a front surface and a rear surface, including a vibration portion in a region including a center of the crystal substrate, and a first peripheral portion that surrounds a periphery of the vibration portion and that has a smaller thickness than the vibration portion. Drive electrodes are formed on both surfaces of the vibration portion of the crystal substrate. In at least one of the front surface and the rear surface of the crystal substrate, a step is provided between the vibration portion and the first peripheral portion, and a first peripheral edge portion of the vibration portion and a second peripheral edge portion of the first peripheral portion are in a curved surface shape.

A method and apparatus for increasing the Signal-to-Noise Ratio (SNR) of phononic comb teeth generated by a non-linear resonator. The method comprises generating a drive signal; applying the drive signal to the non-linear resonator with sufficient gain to generate the phononic comb teeth; and filtering the drive signal before applying it to the non-linear resonator to thereby increase the Signal-to-Noise Ratio (SNR) of phononic comb teeth generated by the non-linear resonator. The apparatus may comprise a circuit including a filter disposed between an oscillator generating the drive signal and the non-linear resonator, the filter preferably having a 3 db passband width which is less than a spacing of the phononic comb teeth generated by the non-linear resonator.

A method and apparatus for increasing the Signal-to-Noise Ratio (SNR) of phononic comb teeth generated by a non-linear resonator. The method comprises generating a drive signal; applying the drive signal to the non-linear resonator with sufficient gain to generate the phononic comb teeth; and filtering the drive signal before applying it to the non-linear resonator to thereby increase the Signal-to-Noise Ratio (SNR) of phononic comb teeth generated by the non-linear resonator. The apparatus may comprise a circuit including a filter disposed between an oscillator generating the drive signal and the non-linear resonator, the filter preferably having a 3 db passband width which is less than a spacing of the phononic comb teeth generated by the non-linear resonator.

A resonator element includes an SC-cut quartz crystal substrate having a thickness t, and an excitation electrode disposed on a principal surface of the quartz crystal substrate, the principal surface being square or rectangular in shape, a side of which has a length L, 28≦L/t≦60 is satisfied.

A resonator element includes an SC-cut quartz crystal substrate having a thickness t, and an excitation electrode disposed on a principal surface of the quartz crystal substrate, the principal surface being square or rectangular in shape, a side of which has a length L, 28≦L/t≦60 is satisfied.