A vibrator device includes a semiconductor substrate, a vibrator element, a circuit element, a wiring, a processing circuit, and a through electrode. The semiconductor substrate has a first surface and an opposite-side second surface of the semiconductor substrate from the first surface. The vibrator element is provided at the first surface. The circuit element is provided at the first surface and includes an oscillation circuit. The wiring is provided at the first surface and electrically couples the vibrator element and the oscillation circuit. The processing circuit is provided at the second surface and processes an output signal of the oscillation circuit. The through electrode penetrates the semiconductor substrate and electrically couples the oscillation circuit and the processing circuit.

A variable capacitance circuit includes a capacitor array having a first capacitor in which a plurality of MIM capacitors are coupled in parallel and a second capacitor in which a plurality of MIM capacitors are coupled in series, and a switch array having a first switch and a second switch. A shape pattern of at least one of a first electrode of the first capacitor, a first ground shield, a second electrode of the second capacitor, and a second ground shield is set so that a first capacitance difference per 1 LSB between first capacitance values of the first capacitor when the first switch is turned on and off and a second capacitance difference per 1 LSB between second capacitance values of the second capacitor when the second switch is turned on and off are close to each other.

A variable capacitance circuit includes a capacitor array having a first capacitor in which a plurality of MIM capacitors are coupled in parallel and a second capacitor in which a plurality of MIM capacitors are coupled in series, and a switch array having a first switch and a second switch. A shape pattern of at least one of a first electrode of the first capacitor, a first ground shield, a second electrode of the second capacitor, and a second ground shield is set so that a first capacitance difference per 1 LSB between first capacitance values of the first capacitor when the first switch is turned on and off and a second capacitance difference per 1 LSB between second capacitance values of the second capacitor when the second switch is turned on and off are close to each other.

A vibrator device includes a vibration element including a vibration portion and a fixed portion, a supporting member to which the fixed portion is attached to support the vibration element, and a first substrate to which the supporting member is attached, the supporting member includes a attaching portion attached to the first substrate, and A1≥A2 is satisfied in a case where an area of a rectangular region including the fixed portion is A1 and an area of a rectangular region including the attaching portion is A2 in a plan view seen from a thickness direction of the vibration element.

A vibrator device includes a vibration element including a vibration portion and a fixed portion, a supporting member to which the fixed portion is attached to support the vibration element, and a first substrate to which the supporting member is attached, the supporting member includes a attaching portion attached to the first substrate, and A1≥A2 is satisfied in a case where an area of a rectangular region including the fixed portion is A1 and an area of a rectangular region including the attaching portion is A2 in a plan view seen from a thickness direction of the vibration element.

An integrated circuit apparatus includes a pad via which an AC signal is inputted or outputted, a circuit that overlaps with the pad in the plan view, protective wiring provided between the pad and the circuit, and a resistor having one end electrically coupled to the protective wiring and another end electrically coupled to an electric charge discharging path.

An integrated circuit apparatus includes a pad via which an AC signal is inputted or outputted, a circuit that overlaps with the pad in the plan view, protective wiring provided between the pad and the circuit, and a resistor having one end electrically coupled to the protective wiring and another end electrically coupled to an electric charge discharging path.

A resonator device includes: a resonator element; a heat generating unit; a first package including a first base at which the resonator element and the heat generating unit are disposed, and a first lid bonded to the first base so as to accommodate the resonator element between the first lid and the first base; and a low emissivity layer that is disposed at an inner surface of the first lid and that has an emissivity lower than an emissivity of the first lid. In addition, a constituent material of the first lid is silicon, and the emissivity of the low emissivity layer at room temperature is less than 0.5.

A resonator device includes: a resonator element; a heat generating unit; a first package including a first base at which the resonator element and the heat generating unit are disposed, and a first lid bonded to the first base so as to accommodate the resonator element between the first lid and the first base; and a low emissivity layer that is disposed at an inner surface of the first lid and that has an emissivity lower than an emissivity of the first lid. In addition, a constituent material of the first lid is silicon, and the emissivity of the low emissivity layer at room temperature is less than 0.5.

A doubts rotated quart/crystal resonator comprises a cantilever-mounted doubts rotated resonating element having a line of geometrical symmetry running from a supported end to a free end which is not perpendicular to the resonating element's crystallographic/axis. A method of manufacturing the crystal resonator comprises cutting a doubly rotated quartz crystal plate with x.sup.I and z.sup.I axes defining the plate's plane into one or more resonating elements at a non-zero degrees in-plane rotation angle in relation to the plate's x.sup.I axis. The resonator has reduced sensitivity to mechanical acceleration.