To provide a tuning-fork type quartz crystal vibrating element capable of decreasing changes in oscillation frequencies before and after being mounted. The tuning fork element includes: a base part; a pair of vibration arm parts extended in a same longitudinal direction from the base part; and respective weight parts located at the tips of the vibration arm parts. Provided that, on a plan view, a measurement in the longitudinal direction is length, and a measurement in a direction perpendicular to the longitudinal direction is width, Expression (1) 100x100, 30y30, and 0.3x15y0.3x+15 applies, where a difference between the length of the vibration arm parts together with the respective weight parts and the reference value x.sub.0 is x, a difference between the width of the weight parts and the reference value y.sub.0 is y, and the unit is m.

To provide a tuning-fork type quartz crystal vibrating element capable of decreasing changes in oscillation frequencies before and after being mounted. The tuning fork element includes: a base part; a pair of vibration arm parts extended in a same longitudinal direction from the base part; and respective weight parts located at the tips of the vibration arm parts. Provided that, on a plan view, a measurement in the longitudinal direction is length, and a measurement in a direction perpendicular to the longitudinal direction is width, Expression (1) 100x100, 30y30, and 0.3x15y0.3x+15 applies, where a difference between the length of the vibration arm parts together with the respective weight parts and the reference value x.sub.0 is x, a difference between the width of the weight parts and the reference value y.sub.0 is y, and the unit is m.

An oscillator includes a resonator and an integrated circuit element. The resonator includes a resonator element and a resonator element container accommodating the resonator element. The integrated circuit element includes an inductor. The resonator and the integrated circuit element are stacked on each other. The resonator includes a metal member, and the metal member does not overlap the inductor when viewed in a plan view.

An oscillator includes a resonator and an integrated circuit element. The resonator includes a resonator element and a resonator element container accommodating the resonator element. The integrated circuit element includes an inductor. The resonator and the integrated circuit element are stacked on each other. The resonator includes a metal member, and the metal member does not overlap the inductor when viewed in a plan view.

Resonating sensors for use in high-pressure and high-temperature environments are provided. In one embodiment, an apparatus includes a sensor with a double-ended tuning fork piezoelectric resonator that includes a first tine and a second tine. These tines are spaced apart from one another so as to form a slot between the first and second tines. The width of the slot from the first tine to the second tine varies along the lengths of the first and second tines. Various other resonators, devices, systems, and methods are also disclosed.

Resonating sensors for use in high-pressure and high-temperature environments are provided. In one embodiment, an apparatus includes a sensor with a double-ended tuning fork piezoelectric resonator that includes a first tine and a second tine. These tines are spaced apart from one another so as to form a slot between the first and second tines. The width of the slot from the first tine to the second tine varies along the lengths of the first and second tines. Various other resonators, devices, systems, and methods are also disclosed.

A method for manufacturing a resonator element includes: an outer shape forming step of etching a substrate to form, in a plan view, a base portion, a pair of vibrating arms extending from the base portion in a first direction, a frame portion surrounding the base portion and the vibrating arms, and a coupling portion coupling the base portion with the frame portion; and a singulation step of cutting the coupling portion to singulate the resonator element. In the outer shape forming step, the coupling portion is formed so as to extend, in the plan view, from only one edge side of the base portion in a direction along a second direction orthogonal to the first direction and be connected with the frame portion.

A method for manufacturing a resonator element includes: an outer shape forming step of etching a substrate to form, in a plan view, a base portion, a pair of vibrating arms extending from the base portion in a first direction, a frame portion surrounding the base portion and the vibrating arms, and a coupling portion coupling the base portion with the frame portion; and a singulation step of cutting the coupling portion to singulate the resonator element. In the outer shape forming step, the coupling portion is formed so as to extend, in the plan view, from only one edge side of the base portion in a direction along a second direction orthogonal to the first direction and be connected with the frame portion.

In a quartz crystal unit, the unit comprising a quartz crystal tuning fork resonator having a quartz crystal tuning fork base, and first and second quartz crystal tuning fork tines, each of the first and second quartz crystal tuning fork tines having a first vibrational portion including a first width and a second vibrational portion including a second width greater than the first width, at least one groove being formed in at least one of opposite main surfaces of the first vibrational portion of each quartz crystal tuning fork tine, the first width of the first vibrational portion of each quartz crystal tuning fork tine being greater than 0.03 mm and less than 0.075 mm and the second width of the second vibrational portion of each quartz crystal tuning fork tine being greater than 0.04 mm and less than 0.23 mm.

In a quartz crystal unit, the unit comprising a quartz crystal tuning fork resonator having a quartz crystal tuning fork base, and first and second quartz crystal tuning fork tines, each of the first and second quartz crystal tuning fork tines having a first vibrational portion including a first width and a second vibrational portion including a second width greater than the first width, at least one groove being formed in at least one of opposite main surfaces of the first vibrational portion of each quartz crystal tuning fork tine, the first width of the first vibrational portion of each quartz crystal tuning fork tine being greater than 0.03 mm and less than 0.075 mm and the second width of the second vibrational portion of each quartz crystal tuning fork tine being greater than 0.04 mm and less than 0.23 mm.