The invention concerns a micromechanical device and method of manufacturing thereof. The device comprises an oscillating or deflecting element made of semiconductor material comprising n-type doping agent and excitation or sensing means functionally connected to said oscillating or deflecting element. According to the invention, the oscillating or deflecting element is essentially homogeneously doped with said n-type doping agent. The invention allows for designing a variety of practical resonators having a low temperature drift.

A piezoelectric micromachined ultrasonic transducer (PMUT) device includes a substrate having an opening therethrough and a membrane attached to the substrate over the opening. A portion of the membrane that overlies the opening is divided into a plurality of cantilevers that are mechanically coupled so that the cantilevers resonate at a common frequency.

A MEMS switch includes: a substrate, an anchor point, the first signal line, a first driving electrode, a switch beam, and a second signal line. The anchor point is on the substrate. The first signal line and the first driving electrode are on the substrate, and are arranged on two sides of the anchor point. The second signal line is on a side of the anchor point close to the substrate. The switch beam is connected with the anchor point, and two ends of the switch beam are suspended and on the side of the anchor point away from the substrate, an orthographic projection of the switch beam onto the substrate surface coincides at least partially with the orthographic projection of the first signal line onto the substrate surface, and an orthographic projection of the first driving electrode onto the substrate surface, respectively.

A silicon microelectromechanical system, MEMS, resonator assembly, includes four flexural beam elements forming a rectangular frame, each beam element being connected at an end thereof to an end of a neighboring one of the beam elements. The resonator assembly further includes connection elements for connecting the rectangular frame to at least one mechanical anchor, and the resonator assembly supporting an in-plane flexural collective resonance mode.

A dual-mode resonator assembly includes a plurality of electrodes disposed around the resonator and configured to transduce information related to a first mode of operation of the dual-mode resonator assembly and a second mode of operation of the dual-mode resonator assembly. The plurality of electrodes includes electrodes associated with the first mode of operation and electrodes associated with the second mode of operation. The plurality of electrodes are disposed symmetrically and centered to nodes and antinodes of the first mode of operation and/or the second mode of operation. The electrodes are configured to also minimize feedback and noise from the first and second mode of operation.

The technology described herein is directed towards a reconfigurable intelligent surface (RIS) based on bimorph microelectromechanical systems (MEMS) technology, in which bimorph MEMS micro-actuators are integrated into unit cells of the RIS. A ring-shaped bimorph cantilever, resulting from unit cell fabrication, operates as an electrothermal actuator in the unit cell's resonating pattern. A controlled voltage is applied to the ring-shaped bimorph cantilever, deforming (bending down) the bimorph ring at its non-anchored (free) portion from its upwardly curved non-actuated state via joule heating. The amount of vertical displacement of the free portion of the bimorph ring when voltage is applied changes the structure of the unit cell's geometry based on the amount of voltage, whereby analog-like tuning of the unit cell's characteristics (including phase shift) is obtained. When combined with the voltage-controlled phase shifts of other unit cells of the RIS, beamforming of a reflected incoming electromagnetic wave is facilitated.

A micro-electromechanical (MEMS) oscillating element. The MEMS oscillating element includes: a first component; a movable component mounted to be movable relative to the first component in a first direction, the movable component assumes a stop position relative to the first component upon a sufficiently large deflection, and contacts the first component in the stop position; at least one actuator component configured as a bending beam clamped on both sides with a beam longitudinal axis running perpendicular to the first direction. The actuator component is configured to selectively assume an undeformed configuration and a deformed configuration, in which the at least one actuator component is at least partially deflected perpendicular to its beam longitudinal axis. The at least one actuator component, in the deformed configuration, transmits a force between the first component and the movable component if the movable component is in the stop position.