A data synthesizer includes a first input circuit, a second input circuit, and an output circuit. The first input circuit is configured to latch a first data under control of a first latch clock signal. The second input circuit is configured to latch a second data under control of the first latch clock signal. A phase of the first data is the same as a phase of the second data. The output circuit is connected to the first input circuit and the second input circuit. The output circuit is configured to output the first data and the second data in sequence.

Embodiments provided herein generally include apparatus, plasma processing systems and methods for generation of a waveform for plasma processing of a substrate in a processing chamber. One embodiment includes a waveform generator having a voltage source circuitry, a first switch coupled between the voltage source circuitry and a first output node of the waveform generator, the first output node being configured to be coupled to a chamber, and a second switch coupled between the first output node and electrical ground node. The waveform generator also includes a third switch coupled between the voltage source circuitry and a second output node of the waveform generator, the second output node being configured to be coupled to the chamber, and a fourth switch coupled between the second output node and the electrical ground node.

Embodiments provided herein generally include apparatus, plasma processing systems and methods for generation of a waveform for plasma processing of a substrate in a processing chamber. One embodiment includes a waveform generator having a voltage source circuitry, a first switch coupled between the voltage source circuitry and a first output node of the waveform generator, the first output node being configured to be coupled to a chamber, and a second switch coupled between the first output node and electrical ground node. The waveform generator also includes a third switch coupled between the voltage source circuitry and a second output node of the waveform generator, the second output node being configured to be coupled to the chamber, and a fourth switch coupled between the second output node and the electrical ground node.

Some embodiments include a high voltage, high frequency switching circuit. The switching circuit may include a high voltage switching power supply that produces pulses having a voltage greater than 1 kV and with frequencies greater than 10 kHz and an output. The switching circuit may also include a resistive output stage electrically coupled in parallel with the output and between the output stage and the high voltage switching power supply, the resistive output stage comprising at least one resistor that discharges a load coupled with the output. In some embodiments, the resistive output stage may be configured to discharge over about 1 kilowatt of average power during each pulse cycle. In some embodiments, the output can produce a high voltage pulse having a voltage greater than 1 kV and with frequencies greater than 10 kHz with a pulse fall time less than about 400 ns.

Some embodiments include a high voltage, high frequency switching circuit. The switching circuit may include a high voltage switching power supply that produces pulses having a voltage greater than 1 kV and with frequencies greater than 10 kHz and an output. The switching circuit may also include a resistive output stage electrically coupled in parallel with the output and between the output stage and the high voltage switching power supply, the resistive output stage comprising at least one resistor that discharges a load coupled with the output. In some embodiments, the resistive output stage may be configured to discharge over about 1 kilowatt of average power during each pulse cycle. In some embodiments, the output can produce a high voltage pulse having a voltage greater than 1 kV and with frequencies greater than 10 kHz with a pulse fall time less than about 400 ns.

The waveform generator (10) comprises a switch (13). The waveform generator (10) comprises a transformer (15) having a primary side circuit and a secondary side circuit. The primary side circuit has a first terminal arranged to be conductively coupled to a DC voltage source, and a second terminal conductively coupled to the switch (13). The waveform generator (10) further comprises a controller (11) arranged to supply a drive signal to the switch for switching the switch between on and off states. The controller (11) is arranged to adjust the frequency of the drive signal so as to control at least one of the peak voltage and the duty cycle of a waveform generated by the waveform generator (10). The frequency of the drive signal may be adjusted as the voltage level of the DC voltage source remains constant. The frequency of the drive signal may be adjusted in response to a change in the voltage level of the DC voltage source.

Provided are a control circuit and a control method for a switch transistor. The control circuit includes: a control unit configured to output a control signal; and a microwave unit having a transmitting terminal connected to the control unit and a receiving terminal connected to at least one switch transistor. The transmitting terminal is configured to receive the control signal and convert the control signal into a microwave signal. The receiving terminal is configured to convert the microwave signal into the control signal to control turn-on or turn-off of the at least one switch transistor. The control circuit may turn on or turn off the switch transistor quickly without causing crosstalk in the circuit, even if dead time of the control signal is short.

Provided are a control circuit and a control method for a switch transistor. The control circuit includes: a control unit configured to output a control signal; and a microwave unit having a transmitting terminal connected to the control unit and a receiving terminal connected to at least one switch transistor. The transmitting terminal is configured to receive the control signal and convert the control signal into a microwave signal. The receiving terminal is configured to convert the microwave signal into the control signal to control turn-on or turn-off of the at least one switch transistor. The control circuit may turn on or turn off the switch transistor quickly without causing crosstalk in the circuit, even if dead time of the control signal is short.

An electrical pulse generator for ohmic-inductive loads with a capacitive module in which a primary capacitor is charged by a first generator for generating voltage pulses, with high capacity and high voltage, on an ohmic-inductive load. In the capacitive module there is also a secondary capacitor or supercapacitor with a very high capacity, charged by a second generator designed to continuously supply voltage to the load. An electronic splitter, or Chopper is interposed between the capacitive module and the load which splits the voltage supplied by the capacitive module according to modulated high frequency pulses, in such a way that the value of the voltage supplied to the load is constant.

A control device (2) for controlling power supply to a continuous-rotation motor, of the horological, DC type, is arranged to generate electrical pulses with a lower supply voltage to drive the rotor. The number of pulses per time interval is a function of the load applied to the motor. A voltage divider is arranged to supply the lower supply voltage with a plurality of different values and thus the electrical pulses with a variable voltage. A logic circuit counts the numbers of electrical pulses in successive time periods; to periodically select a voltage value, from among a plurality of different values, as a function of a counted number of electrical pulses or of a succession of counted numbers of electrical pulses; and to control the voltage divider so that the latter supplies the lower supply voltage with the selected voltage value after the selection of this voltage value.