A method of forming a device having a compliant member includes creating a membrane having one or more elastomeric layers which are at least partially cured. Another elastomeric layer is provided on the membrane in an uncured state. At least one of a bobbin and a housing are positioned so that an end of the bobbin or housing, or the ends of both the bobbin and housing, extend at least partially into the uncured elastomeric layer. The uncured elastomeric layer is then cured to secure it to the membrane and to the housing or bobbin, or both the housing and bobbin. The method substantially reduces or eliminates the formation of holes that can form during fabrication or use of the device.

A method of forming a device having a compliant member includes creating a membrane having one or more elastomeric layers which are at least partially cured. Another elastomeric layer is provided on the membrane in an uncured state. At least one of a bobbin and a housing are positioned so that an end of the bobbin or housing, or the ends of both the bobbin and housing, extend at least partially into the uncured elastomeric layer. The uncured elastomeric layer is then cured to secure it to the membrane and to the housing or bobbin, or both the housing and bobbin. The method substantially reduces or eliminates the formation of holes that can form during fabrication or use of the device.

One of the main objects of the present invention is to provide a MEMS acoustic sensor with improved acoustic performance and liability. To achieve the above-mentioned objects, the present invention provides a MEMS acoustic sensor, including: a base with a cavity; a number of structural layers fixed on the base, each including a fixed end fixed to the base and a suspension end extending from the fixed end for being suspended above the cavity, the suspension end being spaced from the base for forming a slit; a piezoelectric functional layer on the suspension end; and a flexible connector completely covering the slit; wherein a Young's modulus of the flexible connector is smaller than a Young's modulus of the structural layer.

One of the main objects of the present invention is to provide a MEMS acoustic sensor with improved acoustic performance and liability. To achieve the above-mentioned objects, the present invention provides a MEMS acoustic sensor, including: a base with a cavity; a number of structural layers fixed on the base, each including a fixed end fixed to the base and a suspension end extending from the fixed end for being suspended above the cavity, the suspension end being spaced from the base for forming a slit; a piezoelectric functional layer on the suspension end; and a flexible connector completely covering the slit; wherein a Young's modulus of the flexible connector is smaller than a Young's modulus of the structural layer.

A microelectromechanical systems device includes a vibrator and a reinforcing film. The vibrator includes a piezoelectric element configured to convert pressure to an electrical signal. The reinforcing film is configured to reinforce strength of the vibrator. The vibrator further has a groove at which a portion of the reinforcing film is disposed.

A microelectromechanical systems device includes a vibrator and a reinforcing film. The vibrator includes a piezoelectric element configured to convert pressure to an electrical signal. The reinforcing film is configured to reinforce strength of the vibrator. The vibrator further has a groove at which a portion of the reinforcing film is disposed.

A micro-electro-mechanical system (MEMS) microphone is provided. The MEMS microphone includes a substrate, a backplate, an insulating layer, and a diaphragm. The substrate has an opening portion. The backplate is disposed on a side of the substrate, with protrusions protruding toward the substrate. The diaphragm is movably disposed between the substrate and the backplate and spaced apart from the backplate by a spacing distance. The protrusions are configured to limit the deformation of the diaphragm when air flows through the opening portion.

Disclosed are a diaphragm for a sound generating device and a sound generating device. The vibration diaphragm comprises at least one elastomer layer, wherein the elastomer layer is made of a hydrogenated nitrile butadiene rubber polymer; and the hydrogenated nitrile butadiene rubber polymer comprises acrylonitrile blocks, content of the acrylonitrile blocks in the hydrogenated nitrile butadiene rubber polymer ranging from 10 wt % to 70 wt %, a vulcanizing agent is added into the hydrogenated nitrile butadiene rubber polymer, and content of the vulcanizing agent is 1% to 15% of total content of the hydrogenated nitrile butadiene rubber polymer. The diaphragm of the present disclosure has excellent resilience, maintains high elasticity in a low-temperature environment and is capable of long-time working in a high-temperature environment, therefore enabling the sound generating device to be applied in an extremely severe environment while keeping its acoustic performance in an excellent state.

Disclosed are a diaphragm for a sound generating device and a sound generating device. The vibration diaphragm comprises at least one elastomer layer, wherein the elastomer layer is made of a hydrogenated nitrile butadiene rubber polymer; and the hydrogenated nitrile butadiene rubber polymer comprises acrylonitrile blocks, content of the acrylonitrile blocks in the hydrogenated nitrile butadiene rubber polymer ranging from 10 wt % to 70 wt %, a vulcanizing agent is added into the hydrogenated nitrile butadiene rubber polymer, and content of the vulcanizing agent is 1% to 15% of total content of the hydrogenated nitrile butadiene rubber polymer. The diaphragm of the present disclosure has excellent resilience, maintains high elasticity in a low-temperature environment and is capable of long-time working in a high-temperature environment, therefore enabling the sound generating device to be applied in an extremely severe environment while keeping its acoustic performance in an excellent state.

A sound transducer device includes a multilayer component board having a first side and an opposite second side, and a sound port extending between the first and second sides of the multilayer component board. The sound transducer also includes a MEMS sound transducer die including a suspended membrane structure, wherein the MEMS sound transducer die is arranged at the first side of the multilayer component board such that the suspended membrane structure is in fluid communication with the sound port. The sound transducer also includes a mesh structure for providing an environmental barrier, the mesh structure covering the sound port from either one of the first and second sides of the multilayer component board.