In a vibration device, an operation unit has an operation surface operated by a user. A plurality of piezoelectric elements are disposed so as to overlap the operation surface when viewed from the direction orthogonal to the operation surface. The plurality of piezoelectric elements are disposed at mutually different positions in the direction along the operation surface. A control unit is arranged to control the plurality of piezoelectric elements. The control unit is arranged to vibrate the piezoelectric element corresponding to a first position on the operation surface where an operation is performed at a first frequency and vibrates the piezoelectric element corresponding to a second position on the operation surface different from the first position among the plurality of piezoelectric elements at a second frequency, in response to the operation of the operation surface. The second frequency is a frequency in the audible range.

Disclosed is a coil module, comprising: a vibrating membrane suspended on an air chamber defined and supported by a first substrate, at least one planar coil, embedded in the vibrating membrane, and at least a soft magnet, embedded in the vibrating membrane and disposed surrounding at least a portion of a contour of the planar coil; wherein a substantial portion of the planar coil locates at substantially the same plan where a portion of the soft magnet is arranged. A microspeaker and a. method for preparing the same are also disclosed.

A sound producing cell includes a membrane and an actuating layer. The membrane includes a first membrane subpart and a second membrane subpart, wherein the first membrane subpart and the second membrane subpart are opposite to each other. The actuating layer is disposed on the first membrane subpart and the second membrane subpart. The first membrane subpart includes a first anchored edge which is fully or partially anchored, and edges of the first membrane subpart other than the first anchored edge are non-anchored. The second membrane subpart includes a second anchored edge which is fully or partially anchored, and edges of the second membrane subpart other than the second anchored edge are non-anchored.

A sound producing cell includes a membrane and an actuating layer. The membrane includes a first membrane subpart and a second membrane subpart, wherein the first membrane subpart and the second membrane subpart are opposite to each other. The actuating layer is disposed on the first membrane subpart and the second membrane subpart. The first membrane subpart includes a first anchored edge which is fully or partially anchored, and edges of the first membrane subpart other than the first anchored edge are non-anchored. The second membrane subpart includes a second anchored edge which is fully or partially anchored, and edges of the second membrane subpart other than the second anchored edge are non-anchored.

The present invention is a glass sheet composite in which the loss coefficient is 1×10.sup.−2 or more and the longitudinal wave acoustic velocity in the sheet thickness direction is 5.5×10.sup.3 m/s or more.

The present invention is a glass sheet composite in which the loss coefficient is 1×10.sup.−2 or more and the longitudinal wave acoustic velocity in the sheet thickness direction is 5.5×10.sup.3 m/s or more.

A microelectromechanical system microphone includes a piezoelectric diaphragm, upper inner electrodes and upper outer electrodes disposed on an upper surface of the diaphragm, and lower inner electrodes and lower outer electrodes disposed on a lower surface of the diaphragm. The diaphragm is divided into a plurality of sectors, a first of the sectors including an inner and an outer upper electrode physically disconnected from an inner and an outer upper electrode on a second sector adjacent to the first sector, and an inner and an outer lower electrode physically disconnected from an inner and an outer lower electrode on the second sector. A first via extends between and electrically couples the upper and lower inner electrodes of the first sector and a first bond pad. A second via extends between and electrically couples the upper and lower outer electrodes of the second sector and a second bond pad.

The piezoelectric microphone chip includes a single thin plate, a diaphragm support structure that is provided on one surface of the thin plate and includes an outer edge support portion that supports an outer edge of the thin plate and a separation support portion that separates the thin plate into a plurality of diaphragms in association with the outer edge support portion, a single or a plurality of piezoelectric conversion portions formed by laminating a first electrode, a piezoelectric film, and a second electrode sequentially from a diaphragm side on each of the diaphragms, and a signal detection circuit that detects outputs from the piezoelectric conversion portions provided on the plurality of diaphragms, and a relationship among a thickness t.sub.1 of the outer edge support portion, a thickness t.sub.2 of the separation support portion, and a thickness td of the thin plate 10 is set to 13.3×td<t.sub.2<t.sub.1−20 μm.

The purpose of the present invention is to provide a glass sheet composite having satisfactory acoustic performance. The present invention relates to a glass sheet composite including a diaphragm that is vibrated by a vibrator, and a support member that is attached along an edge portion of the diaphragm to support the diaphragm, in which the diaphragm includes at least one glass sheet, and is supported on the support member through a fixing part that fixes the edge portion of the diaphragm to the support member, and a vibration-permitting part that permits vibration of the diaphragm.

The purpose of the present invention is to provide a glass sheet composite having satisfactory acoustic performance. The present invention relates to a glass sheet composite including a diaphragm that is vibrated by a vibrator, and a support member that is attached along an edge portion of the diaphragm to support the diaphragm, in which the diaphragm includes at least one glass sheet, and is supported on the support member through a fixing part that fixes the edge portion of the diaphragm to the support member, and a vibration-permitting part that permits vibration of the diaphragm.