H05B3/14

CERAMIC STRUCTURE AND WAFER SYSTEM

A heater includes a base, a resistive heating body, and a terminal portion. The base is formed of ceramic and has a plate shape. The resistive heating body is located in the base. The terminal portion is electrically connected to the resistive heating body. The base includes a protruding portion surrounding the terminal portion, on a lower surface side. The protruding portion is formed of a ceramic member, and the terminal portion passes through a through hole formed in the ceramic member. The ceramic member is bonded to at least one of the lower surface of the base or the terminal portion.

FLEXIBLE HEATING DEVICE AND METHODS OF MANUFACTURE AND USE OF SAME
20220394821 · 2022-12-08 ·

This present disclosure relates to a flexible heating device having a unique layered assembly structure including a flexible heat generating layer. The present disclosure also relates to a method of manufacturing the flexible heating device and method of use of the flexible heating device in various applications.

FLEXIBLE HEATING DEVICE AND METHODS OF MANUFACTURE AND USE OF SAME
20220394821 · 2022-12-08 ·

This present disclosure relates to a flexible heating device having a unique layered assembly structure including a flexible heat generating layer. The present disclosure also relates to a method of manufacturing the flexible heating device and method of use of the flexible heating device in various applications.

Heat-generated device and method for producing same

Problem to be Solved To provide a heat-generating device capable of efficiently maintaining heat generation for a long time at a low cost while saving power. Solution The heat-generating device includes: a hollow vessel having an electrically insulated inner part; a pair of counter electrodes housed inside the vessel, and separated from and opposing each other; and a heat-generating body housed between the counter electrodes inside the vessel, and composed of silicon powder and carbon powder in a mixed state.

Heat-generated device and method for producing same

Problem to be Solved To provide a heat-generating device capable of efficiently maintaining heat generation for a long time at a low cost while saving power. Solution The heat-generating device includes: a hollow vessel having an electrically insulated inner part; a pair of counter electrodes housed inside the vessel, and separated from and opposing each other; and a heat-generating body housed between the counter electrodes inside the vessel, and composed of silicon powder and carbon powder in a mixed state.

Wafer-heating device

In a ceramic heater, a central-zone heating resistor and an outer-peripheral-zone heating resistor are embedded in a disc-like ceramic base having a wafer-mounting surface on one side. The central-zone heating resistor is a wire extending in a single continuous line from one of a pair of terminals to the other. The pair of terminals as a whole form a circular shape in plan view.

Thermal diffuser for a semiconductor wafer holder

An electrostatic chuck is formed by depositing a diffuser layer onto an electrostatic puck and removing areas of the diffuser layer to form discrete diffuser segments separated by gaps. The discrete diffuser segments may define continuous concentric rings, discontinuous concentric rings, or a combination of continuous concentric rings and discontinuous concentric rings. The discrete diffuser segments are separated from each other by forming at least one trench in the diffuser layer. The trench may extend partially through the diffuser layer, completely through the diffuser layer to the electrostatic puck, or have a first portion that extends partially through the diffuser layer and a second portion that extends completely through the diffuser layer. Also, the trench can have a constant width or have a variable width.

CERAMIC ELECTRIC HEATING ELEMENT HAVING A TWOLAYER STRUCTURE AND ELECTRIC SOLDERING IRON
20220377849 · 2022-11-24 ·

Disclosed are a ceramic electric heating element having a two-layer structure, and an electric soldering iron. The electric heating element having a two-layer ceramic structure comprises an inner conducting layer and an outer insulating layer; the insulating layer wraps the conducting layer, and the conducting layer is exposed outside the insulating layer at the head and tail of the electric heating element. In addition, the ceramic electric heating element having a two-layer structure is used to the electric soldering iron. The present invention allows the miniaturization in the manufacture of ceramic electric heating bodies, with low production cost and low difficulty in respect of the process.

ELECTROCALORIC FIBER, FABRIC AND SYSTEM COMPRISING SAME
20220377852 · 2022-11-24 ·

An electrocaloric fiber includes an electrocaloric material surrounding a centrally located electrode. The electrocaloric fiber may further include an outer electrode surrounding the electrocaloric material. The electrocaloric fiber may be used to form an electrocaloric fabric.

CERAMIC HEATER AND MANUFACTURING METHOD THEREOF
20220377848 · 2022-11-24 ·

The present invention relates to a ceramic heater with improved reliability, the ceramic heater including: a heater body having a mesh type high-frequency electrode, and an electrode rod connecting member being in contact with a lower surface of the high-frequency electrode; and a heater support mounted on a lower portion of the heater body and configured to support the heater body, in which the electrode rod connecting member is in area contact with one surface of the high-frequency electrode.