A heater (1a) includes a substrate (10), a heating element (20) that is a transparent conductive film (20), an intermediate layer (30), and at least a pair of power supply electrodes (40). The intermediate layer (30) is disposed between the substrate (10) and the transparent conductive film (20), and has a first principal surface (31) positioned closer to the transparent conductive film (20) than the substrate (10). The pair of power supply electrodes (40) are in contact with the transparent conductive film (20). The intermediate layer (30) contains an organic polymer (32) forming a cured product and particles (34) of silica or a metal oxide dispersed in the cured product. The transparent conductive film (20) has a surface having an arithmetic average roughness Ra, specified in JIS B 0601:2013, of 7.0 nm or less.

The invention relates to a heatable component having a main body, a heating layer located on the main body and/or integrated in the main body for electrically heating the component, and electrical contacts for contacting the electrically heatable heating layer. The heating layer has at least one extension which is folded over onto a rear face or end face of the main body, and the electrical contacts are located on that part of the at least one extension which is located on the rear face or end face of the main body.

A substrate support assembly for supporting a substrate includes a baseplate, a ceramic plate arranged on the baseplate, and N resistive heaters arranged in X rows and Y columns and coupled to the ceramic plate. X, Y, and N are integers greater than 1, and N is less than or equal to X*Y. Each of the N resistive heaters have a first terminal and a second terminal. The ceramic plate includes Y conductors arranged in a first layer of the ceramic plate, and X conductors arranged in a second layer of the ceramic plate. The first terminals of each resistive heater in one of the X rows are directly connected to the Y conductors, respectively, by first vias. Second terminals of each resistive heater in the one of the X rows are directly connected to one of the X conductors by second vias.

Heat generation efficiency is increased; temperature-keeping performance is increased; heat unevenness is reduced; and a heat diffusion property is increased. Provided is a far-infrared ray radiation sheet 1 according to the present invention that is formed in a planar shape, that radiates far-infrared rays, the far-infrared ray radiation sheet comprising a heat generation type mixed paper 10 comprising a basic material, carbon fiber exhibiting high heat conductivity, first graphite exhibiting high heat conductivity, second graphite that forms a conductive network, and mixed paper formed by mixing the basic material, the carbon fiber, the first graphite and the second graphite; electrodes 21 provided to the heat generation type mixed paper 10; and prepregs 11 laminated on the heat generation type mixed paper 10, wherein the far-infrared rays are radiated by applying current to the electrodes 21.

A support pedestal is provided that includes a substrate having a top resistive layer defining a first set of zones and a bottom resistive layer defining a second set of zones. Each zone of the first and second set of zones is coupled to at least two electric terminals from among a plurality of electric terminals, and a total number of electric terminals is less than or equal to a total of the first and second set of zones.

A support pedestal is provided that includes a substrate having a top resistive layer defining a first set of zones and a bottom resistive layer defining a second set of zones. Each zone of the first and second set of zones is coupled to at least two electric terminals from among a plurality of electric terminals, and a total number of electric terminals is less than or equal to a total of the first and second set of zones.

A belt cooking apparatus (10) includes a lower frame structure (12) and an upper frame structure (14) in registry with the lower frame structure. A lower cooking conveyor belt (16) is supported by the lower frame structure (12) and correspondingly an upper conveyor belt (18) is supported by the upper frame structure (14). Heating element assemblies (20) are mounted on the lower frame structure (12) just below the lower cooking belt (16) as well as on the upper frame structure (14) just above the upper cooking belt (18). Food products are cooked while positioned between the upper and lower moving cooking conveyor belts (16) and (18) by heat generated by the heating element assemblies (20) while being advanced by the conveyor belts.

Disclosed is a stage including a shaft, a first supporting plate over the shaft, a heater arranged in a trench formed in the first supporting plate, and a gas-supplying tube arranged in the shaft and configured to blow a gas to the first supporting plate. The first supporting plate may have a disk shape, and a cross section of the gas-supplying tube parallel to a surface of the first supporting plate may overlap a center of the disk shape. The first supporting plate may be configured to block the gas so that the gas is not released to a chamber in which the stage is arranged.

Provided are a heating unit including an air layer for thermal insulation and a substrate treating apparatus including the heating unit. The substrate treating apparatus includes: a housing providing a space in which a substrate is treated; a heating unit disposed in the housing and heating the substrate; a cooling unit disposed in the housing and cooling the substrate; and a transfer unit for moving the substrate, wherein the heating unit includes: a body including a heater therein; a first air layer provided inside the body for thermal insulation and formed in a first direction as a longitudinal direction thereof; and a second air layer provided inside the body for thermal insulation and formed in a second direction as a longitudinal direction thereof.

Provided are a heating unit including an air layer for thermal insulation and a substrate treating apparatus including the heating unit. The substrate treating apparatus includes: a housing providing a space in which a substrate is treated; a heating unit disposed in the housing and heating the substrate; a cooling unit disposed in the housing and cooling the substrate; and a transfer unit for moving the substrate, wherein the heating unit includes: a body including a heater therein; a first air layer provided inside the body for thermal insulation and formed in a first direction as a longitudinal direction thereof; and a second air layer provided inside the body for thermal insulation and formed in a second direction as a longitudinal direction thereof.