Some embodiments include methods and systems for wafer biasing in a plasma chamber. A method, for example, may include: generating a first high voltage by a first pulsed voltage source using DC voltages and coupling the first high voltage to a wafer in the plasma chamber via at least one direct connection, the at least one direct connection enabling ion energy control in the plasma chamber; generating one or more of low and medium voltages by a second pulsed voltage source; coupling, capacitively, the one or more of low and medium voltages to the wafer; and pulsing the first high voltage and the one or more of low and medium voltages to achieve a configurable ion energy distribution in the wafer.

Some embodiments include methods and systems for wafer biasing in a plasma chamber. A method, for example, may include: generating a first high voltage by a first pulsed voltage source using DC voltages and coupling the first high voltage to a wafer in the plasma chamber via at least one direct connection, the at least one direct connection enabling ion energy control in the plasma chamber; generating one or more of low and medium voltages by a second pulsed voltage source; coupling, capacitively, the one or more of low and medium voltages to the wafer; and pulsing the first high voltage and the one or more of low and medium voltages to achieve a configurable ion energy distribution in the wafer.

A system is for controlling a high voltage for x-ray applications. In an embodiment, the system includes a controller including at least one input for a mains input voltage, and one output for outputting a primary-side transformer current; and a distance compensation suited to providing the primary-side transformer current with a determined pulse frequency or a determined pulse length.

A system is for controlling a high voltage for x-ray applications. In an embodiment, the system includes a controller including at least one input for a mains input voltage, and one output for outputting a primary-side transformer current; and a distance compensation suited to providing the primary-side transformer current with a determined pulse frequency or a determined pulse length.

It would be advantageous to reduce weight and size of high voltage power supplies, to increase frequency of pulses of high voltage, and to improve control of magnitude of high voltage. The embodiments of high voltage power supplies described herein can solve these problems. The high voltage power supply can be used with an x-ray tube. The high voltage power supply can comprise an array of planar transformers each defining a stage with an AC input and a DC output. Each stage can comprise a pair of flat, coil windings adjacent one another and including a primary winding electrically-coupled to the AC input and configured to induce a current in a secondary winding. At least two stages can be electrically-coupled together in series with the DC output of one stage electrically-coupled to an input of the other stage such that a voltage is amplified across the stages.

A rotary anode driving device includes a DC power supply, an inverter circuit which is connected to the DC power supply and includes a plurality of switching elements and, the inverter circuit generates an AC voltage from a DC voltage of the DC power supply, and outputs the AC voltage to a stator coil which generates a rotating magnetic field of an X-ray tube; a pulse width modulation (PWM) waveform generator configured to generate an AC voltage of two phases or three phases as the AC voltage from the DC voltage by performing PWM control of the switching elements of the inverter circuit; and a capacitor connected in series to an input side of a stator coil of at least one phase of the stator coil, the capacitor having an electrostatic capacitance constituting a series resonant circuit with the stator coil to which the capacitor is connected.

A rotary anode driving device includes a DC power supply, an inverter circuit which is connected to the DC power supply and includes a plurality of switching elements and, the inverter circuit generates an AC voltage from a DC voltage of the DC power supply, and outputs the AC voltage to a stator coil which generates a rotating magnetic field of an X-ray tube; a pulse width modulation (PWM) waveform generator configured to generate an AC voltage of two phases or three phases as the AC voltage from the DC voltage by performing PWM control of the switching elements of the inverter circuit; and a capacitor connected in series to an input side of a stator coil of at least one phase of the stator coil, the capacitor having an electrostatic capacitance constituting a series resonant circuit with the stator coil to which the capacitor is connected.

A high voltage power system is disclosed. In some embodiments, the high voltage power system includes a high voltage pulsing power supply; a transformer electrically coupled with the high voltage pulsing power supply; an output electrically coupled with the transformer and configured to output high voltage pulses with an amplitude greater than 1 kV and a frequency greater than 1 kHz; and a bias compensation circuit arranged in parallel with the output. In some embodiments, the bias compensation circuit can include a blocking diode; and a DC power supply arranged in series with the blocking diode.

A high voltage power system is disclosed. In some embodiments, the high voltage power system includes a high voltage pulsing power supply; a transformer electrically coupled with the high voltage pulsing power supply; an output electrically coupled with the transformer and configured to output high voltage pulses with an amplitude greater than 1 kV and a frequency greater than 1 kHz; and a bias compensation circuit arranged in parallel with the output. In some embodiments, the bias compensation circuit can include a blocking diode; and a DC power supply arranged in series with the blocking diode.

A linac-based X-ray system for cargo scanning and imaging applications uses linac design, RF power control, beam current control, and beam current pulse duration control to provide stable sequences of pulses having different energy levels or different doses.