A system for grid control of an electromagnetic ray tube is provided. The system includes a power source, a rectifier, and a grid conductor. The power source is disposed apart from the electromagnetic ray tube and operative to generate an AC current. The rectifier is integrated into the electromagnetic ray tube and electrically coupled to a grid electrode of the electromagnetic ray tube. The grid conductor electrically couples the power source to the rectifier. The rectifier is operative to convert the AC current to a DC current that powers the grid electrode.

According to one embodiment, an X-ray high voltage apparatus includes an AC/DC converter, an inverter circuit, a high voltage generator, a power storage device, and the DC/DC converter. The AC/DC converter converts an AC voltage into a DC voltage. The inverter circuit converts the DC voltage into an AC voltage. The high voltage generator externally outputs a power obtained by boosting and rectifying the AC voltage outputted by the inverter circuit. The DC/DC converter receives the DC voltage, and charges and discharges the power storage device. The DC/DC converter is a multi-phase converter including DC/DC converter blocks. Each of the DC/DC converter blocks includes a choke coil. The choke coil is provided with a correction winding for correcting a deviation of a magnetic flux caused by a DC current superimposed on the corresponding choke coil. The correction windings are applied with a summed current based on the DC/DC converter.

According to one embodiment, an X-ray high voltage apparatus includes an AC/DC converter, an inverter circuit, a high voltage generator, a power storage device, and the DC/DC converter. The AC/DC converter converts an AC voltage into a DC voltage. The inverter circuit converts the DC voltage into an AC voltage. The high voltage generator externally outputs a power obtained by boosting and rectifying the AC voltage outputted by the inverter circuit. The DC/DC converter receives the DC voltage, and charges and discharges the power storage device. The DC/DC converter is a multi-phase converter including DC/DC converter blocks. Each of the DC/DC converter blocks includes a choke coil. The choke coil is provided with a correction winding for correcting a deviation of a magnetic flux caused by a DC current superimposed on the corresponding choke coil. The correction windings are applied with a summed current based on the DC/DC converter.

A control mechanism for a high-voltage generator for supplying voltage and current to an electronic radiation source in high-temperature environments is provided, the control mechanism including at least one voltage feedback loop for monitoring the output of the generator; at least one environmental temperature monitor; a control bus; and at least one control processor. A method of controlling a high-voltage generator that powers an electronic radiation source in high-temperature environments is also provided, the method including at least: measuring the output voltage of the generator; measuring the temperature within the generator's environment, using a control mechanism to modify a driving frequency, and using a control mechanism to modify a driving pulse-train, such that changes in properties of the electronic components of the generator as a result of changes in environmental temperature are characterized and the generator's driving signals modified to maintain optimally efficient input parameters for a specific environmental temperature.

A control mechanism for a high-voltage generator for supplying voltage and current to an electronic radiation source in high-temperature environments is provided, the control mechanism including at least one voltage feedback loop for monitoring the output of the generator; at least one environmental temperature monitor; a control bus; and at least one control processor. A method of controlling a high-voltage generator that powers an electronic radiation source in high-temperature environments is also provided, the method including at least: measuring the output voltage of the generator; measuring the temperature within the generator's environment, using a control mechanism to modify a driving frequency, and using a control mechanism to modify a driving pulse-train, such that changes in properties of the electronic components of the generator as a result of changes in environmental temperature are characterized and the generator's driving signals modified to maintain optimally efficient input parameters for a specific environmental temperature.

A high voltage power system is disclosed. In some embodiments, the high voltage power system includes a high voltage pulsing power supply; a transformer electrically coupled with the high voltage pulsing power supply; an output electrically coupled with the transformer and configured to output high voltage pulses with an amplitude greater than 1 kV and a frequency greater than 1 kHz; and a bias compensation circuit arranged in parallel with the output. In some embodiments, the bias compensation circuit can include a blocking diode; and a DC power supply arranged in series with the blocking diode.

A high voltage power system is disclosed. In some embodiments, the high voltage power system includes a high voltage pulsing power supply; a transformer electrically coupled with the high voltage pulsing power supply; an output electrically coupled with the transformer and configured to output high voltage pulses with an amplitude greater than 1 kV and a frequency greater than 1 kHz; and a bias compensation circuit arranged in parallel with the output. In some embodiments, the bias compensation circuit can include a blocking diode; and a DC power supply arranged in series with the blocking diode.

Some embodiments include methods and systems for wafer biasing in a plasma chamber. A method, for example, may include: generating a first high voltage by a first pulsed voltage source using DC voltages and coupling the first high voltage to a wafer in the plasma chamber via at least one direct connection, the at least one direct connection enabling ion energy control in the plasma chamber; generating one or more of low and medium voltages by a second pulsed voltage source; coupling, capacitively, the one or more of low and medium voltages to the wafer; and pulsing the first high voltage and the one or more of low and medium voltages to achieve a configurable ion energy distribution in the wafer.

Some embodiments include methods and systems for wafer biasing in a plasma chamber. A method, for example, may include: generating a first high voltage by a first pulsed voltage source using DC voltages and coupling the first high voltage to a wafer in the plasma chamber via at least one direct connection, the at least one direct connection enabling ion energy control in the plasma chamber; generating one or more of low and medium voltages by a second pulsed voltage source; coupling, capacitively, the one or more of low and medium voltages to the wafer; and pulsing the first high voltage and the one or more of low and medium voltages to achieve a configurable ion energy distribution in the wafer.

The present invention proposes a control circuit and a method of controlling a resonant converter comprising a full-bridge configuration in the following manner: during each half period of a plurality of periods of a resonant current of the resonant converter, starting from an initial state (500) in which a diagonal pair are conductive, turning off (510) a first switch member of the diagonal pair on the basis of the voltage control signal; turning on (520), after the turn-off of the first switch member, a switch member in series connection with the first switch member prior to a zero crossing (E5) of the resonant current; turning off (530), after the turn-off of the first switch member, a second switch member of the diagonal pair prior to the zero crossing (ES); and turning on (540), after the turn-off of the second switch member, a switch member in series connection with the second switch member prior to the zero crossing event of the resonant current.