A hybrid linear accelerator is disclosed comprising a standing wave linear accelerator section (SW section) followed by a travelling wave linear accelerator section (TW section). In one example, RF power is provided to the TW section and power not used by the TW section is provided to the SW section via a waveguide. An RF switch, an RF phase adjuster, and/or an RF power adjuster is provided along the waveguide to change the energy and/or phase of the RF power provided to the SW section. In another example, RF power is provided to both the SW section and the TW section, and RF power not used by the TW section is provided to the SW section, via an RF switch, an RF phase adjuster, and/or an RF power. In another example, an RF load is matched to the output of the TW section by an RF switch.

Disclosed herein is a waveguide for use in a linear accelerator. The waveguide comprises cells arranged to receive a beam of charged particles therethrough along a particle path, and is configured to receive an electromagnetic field from a source of electromagnetic radiation. A plurality of the cells are individually switchable cells, with each individually switchable cell comprising a respective switch configured to adjust the supply of electromagnetic radiation to the individually switchable cell.

When accelerating first ions, radio frequency power is fed to a drift tube linear accelerator so that the phase difference between an accelerating half cycle for accelerating the first ions in one of the plurality of drift tube gaps and the accelerating half cycle for accelerating the accelerated first ions reaching the next drift tube gap is set to a first accelerating cycle phase difference; and when accelerating second ions having a charge-to-mass ratio lower than the first ions, the radio frequency power is fed to the drift tube linear accelerator so that the phase difference between an accelerating half cycle for accelerating the second ions in the one drift tube gap and the accelerating half cycle for the accelerated second ions reaching the next drift tube gap is set to a second accelerating cycle phase difference that is larger than the first accelerating cycle phase difference.

A system that generates short charged particle packets or pulses (e.g., electron packets) without requiring a fast-switching-laser source is described. This system may include a charged particle source that produces a stream of continuous charged particles to propagate along a charged particle path. The system also includes a charged particle deflector positioned in the charged particle path to deflect the stream of continuous charged particles to a set of directions different from the charged particle path. The system additionally includes a series of beam blockers located downstream from the charged particle deflector and spaced from one another in a linear configuration as a beam-blocker grating. This beam-blocker grating can interact with the deflected stream of charged particles and divide the stream of the charged particles into a set of short particle packets. In one embodiment, the charged particles are electrons. The beam blockers can be conductors.

An ion implantation system including an ion source for generating an ion beam, an end station for holding a substrate to be implanted by the ion beam, and a linear accelerator disposed between the ion source and the end station and adapted to accelerate the ion beam, the linear accelerator comprising at least one acceleration stage including a resonator coil coupled to a drift tube assembly, the drift tube assembly including a first drift tube coupled to a first end of a first insulting rod via interference fit, a second drift tube coupled to a first end of a second insulting rod via interference fit, and a mounting bracket coupled to a second end of the first insulting rod and to a second end of the second insulting rod via interference fit.

An apparatus may include a drift tube assembly, comprising a plurality of drift tubes to conduct an ion beam along a beam propagation direction. The plurality of drift tubes may define a multi-gap configuration corresponding to a plurality of acceleration gaps, wherein the plurality of drift tubes further define a plurality of RF quadrupoles, respectively. As such, the plurality of quadrupoles are arranged to defocus the ion beam along a first direction at the plurality of acceleration gaps, respectively, where the first direction extends perpendicularly to the beam propagation direction.

An ion implantation system including an ion source for generating an ion beam, an end station for holding a substrate to be implanted by the ion beam, and a linear accelerator disposed between the ion source and the end station and adapted to accelerate the ion beam, the linear accelerator comprising at least one acceleration stage including a resonator coil coupled to a drift tube assembly, the drift tube assembly including a first drift tube coupled to a first end of a first insulting rod via interference fit, a second drift tube coupled to a first end of a second insulting rod via interference fit, and a mounting bracket coupled to a second end of the first insulting rod and to a second end of the second insulting rod via interference fit.

A method of manufacturing a radio frequency cavity resonator, wherein said radio frequency cavity resonator comprises a tubular structure extending along a longitudinal axis, said tubular structure comprising a circumferential wall structure surrounding said longitudinal axis, one or more tubular elements and a first and a second support structure associated with each of said tubular elements, wherein said first and second support structures are provided on opposite sides of each tubular element and extend radially along a diameter of the tubular structure, wherein the method comprises producing the resonator by additive manufacturing in a manufacturing direction that is parallel to said diameter.

An ion implanter, including an ion source and extraction system, arranged to generate an ion beam at a first ion energy, and a linear accelerator, arranged to accelerate the ion beam to a second ion energy, wherein the linear accelerator comprises a plurality of acceleration stages coupled to receive a plurality of RF signals from a plurality of power assemblies, respectively. The linear accelerator may be configured wherein at least one stage of the plurality of acceleration stages is coupled to: reversibly connect to a first power assembly, comprising a resonator that contains a resonator enclosure, the first power assembly generating a first RF signal at a first frequency; to disconnect from the first power assembly; and to connect to a second power assembly, generating a second RF signal at a second frequency, greater than the first frequency, while not changing the resonator enclosure.

An ion implanter, including an ion source and extraction system, arranged to generate an ion beam at a first ion energy, and a linear accelerator, arranged to accelerate the ion beam to a second ion energy, wherein the linear accelerator comprises a plurality of acceleration stages coupled to receive a plurality of RF signals from a plurality of power assemblies, respectively. The linear accelerator may be configured wherein at least one stage of the plurality of acceleration stages is coupled to: reversibly connect to a first power assembly, comprising a resonator that contains a resonator enclosure, the first power assembly generating a first RF signal at a first frequency; to disconnect from the first power assembly; and to connect to a second power assembly, generating a second RF signal at a second frequency, greater than the first frequency, while not changing the resonator enclosure.