A component mounter provided with a first raising and lowering device configured to raise and lower a raising and lowering member, and a second raising and lowering device provided on the raising and lowering member and configured to relatively raise a suction nozzle with respect to the raising and lowering member. The component mounter performs, among multiple types of operations of lowering the suction nozzle, a cleaning operation of cleaning the suction nozzle and a discarding operation of discarding a component for which an error occurred via a first operation mode of lowering the suction nozzle by driving the first raising and lowering device. Also, the component mounter performs pickup operation of picking up the component and mounting operation of mounting the component via a second operation mode of lowering the suction nozzle by driving the first raising and lowering device and the second raising and lowering device.

A mounting target working device includes a mounting target holding unit that holds a mounting target. The mounting target holding unit includes a lift mechanism that moves the mounting target in an upward-downward direction, a tilt mechanism attached to the lift mechanism and that tilts the mounting target, and a rotation mechanism attached to the tilt mechanism and that rotates the mounting target. The rotation mechanism is supported in a cantilever manner by the tilt mechanism.

A movement error detection apparatus includes a movable region inside mark made of a projected image arranged in a movable region of a movable conveyor of each of first and second substrate conveyance devices; and a pair of movable region outside marks respectively provided on both sides of the movable region inside mark and arranged at a position outside the movable region of the movable conveyor and outward of a substrate at a work position; an imaging device which moves together with a mounting head; and a control device that selects two marks, among the marks, which are positioned on both outer sides of the substrate and are closest to the substrate, and causes the first substrate recognition camera to image the marks, as well as obtaining a movement error of the first mounting head on the basis of the two mark images.

A component transfer device includes a detector configured to detect a rotation angle of a driving motor that moves a pair of gripping sections, or a position of the gripping sections, and a motor control section configured to perform position feedback control of the driving motor based on a detection signal of the detector and a position command signal from the transfer control device. A transfer control device is provided with a torque monitoring section configured to monitor a value of a command torque applied to the driving motor from the motor control section, and a gripping state determining section configured to determine that there was a change in a gripping state of the component when, with the pair of gripping sections in a state gripping the component, the command torque monitored by the torque monitoring section drops to a value smaller than a first threshold value.

A component mounting machine including a head unit that has a head main body configured to hold multiple pickup members each capable of picking up a component at a predetermined interval along a predetermined circumference and to be capable of rotating forward and reverse directions; a moving device configured to move the head unit; a lifting and lowering device configured to lift and lower a pickup member; a component supply device configured to be capable of supplying the component to the pickup member; and a control device configured to control those described above. The control device performs a control such that the pickup members pick up the components supplied by the component supply device, and each component is mounted on a board after a completion of the pickup, while performing an operation of rotating the head main body and an operation of moving the head unit together.

A movement error detection apparatus includes a movable region inside mark made of a projected image arranged in a movable region of a movable conveyor of each of first and second substrate conveyance devices; and a pair of movable region outside marks respectively provided on both sides of the movable region inside mark and arranged at a position outside the movable region of the movable conveyor and outward of a substrate at a work position; an imaging device which moves together with a mounting head; and a control device that selects two marks, among the marks, which are positioned on both outer sides of the substrate and are closest to the substrate, and causes the first substrate recognition camera to image the marks, as well as obtaining a movement error of the first mounting head on the basis of the two mark images.

An apparatus for handling microelectronic devices comprises a pick arm having a pick surface configured for receiving a microelectronic device thereon, drives for moving the pick arm and reorienting the pick surface in the X, Y and Z planes and about a horizontal rotational axis and a vertical rotational axis, and a sensor device carried by the pick arm and configured to detect at least one of at least one magnitude of force and at least one location of force applied between the pick surface and a structure contacted by the pick surface or a structure and a microelectronic device carried on the pick surface.

A component supply system comprising: a supply device including a storage section configured to store a component and a storage body mounting section where a storage body including at least the storage section is detachably mounted and configured to supply a component from the storage section of the storage body mounted on the storage body mounting section in a supply position; a first loading stand on which the storage body can be placed; and a second loading stand disposed at a different location from a location where the first loading stand is disposed and on which the storage body can be placed, wherein the storage body is transferred between either of the first loading stand and the second loading stand and the storage body mounting section.

Provided is equipment for transferring a vacuum chamber that solves a problem of heat dissipation of a driver by (i) placing a permanent magnet, which is a stator structure of a linear motor and causes linear motion, inside a vacuum chamber and (ii) by placing a coil of a driver structure outside the vacuum chamber, Under this structure, (i) no cable is installed in inside the chamber, and (ii) heat generated from the driver structure can be smoothly dissipated. The transfer equipment includes; a first-axis linear coil (24) that is fixed to an outside of the vacuum chamber at a bottom surface of the housing (11) of the vacuum chamber (10); a first-axis slider (60) that is installed inside the vacuum chamber (10) and moves in a first-axis direction relative to a bottom of an inner space of the vacuum chamber (10); and a first-axis linear permanent magnet (63). The first-axis linear permanent magnet (63) is arranged in the first-axis direction, is installed in a lower portion of the first-axis slider (60), and slidingly moves together with the first-axis slider (60).

A frame structure of a work machine includes a left frame in which a first left rail of a first guide device is provided at a lower portion thereof; a right frame in which a second right rail of a second guide device is provided at a lower portion thereof; a center frame disposed between the left frame and the right frame and in which a first right rail of the first guide device and a second left rail of the second guide device are provided at a lower portion thereof; a front frame connecting a pair of front columns together and also connecting respective front ends of the left frame, the right frame, and the center frame; and a rear frame connecting a pair of rear columns together and also connecting respective rear ends of the left frame, the right frame, and the center frame.