Embodiments herein describe techniques for a semiconductor device including a memory cell vertically above a substrate. The memory cell includes a metal-insulator-metal (MIM) capacitor at a lower device portion, and a transistor at an upper device portion above the lower device portion. The MIM capacitor includes a first plate, and a second plate separated from the first plate by a capacitor dielectric layer. The first plate includes a first group of metal contacts coupled to a metal electrode vertically above the substrate. The first group of metal contacts are within one or more metal layers above the substrate in a horizontal direction in parallel to a surface of the substrate. Furthermore, the metal electrode of the first plate of the MIM capacitor is also a source electrode of the transistor. Other embodiments may be described and/or claimed.

Embodiments relate to a semiconductor structure and a method for fabricating. The semiconductor structure includes: a substrate, word lines, bit lines, and word line isolation structures. Active pillars arranged in an array are provided on a surface of the substrate, and the active pillars include channel regions, and a top doped region positioned on an upper side of the channel region and a bottom doped region positioned on a lower side of the channel region. The word lines extend along a first direction and surround the channel regions of a row of the active pillars arranged along the first direction. The bit lines extend along a second direction and are electrically connected to the bottom doped regions of a column of the active pillars arranged along the second direction, and in a direction facing away from the surface of the substrate.

A plurality of vertical stacks may be formed over a substrate. Each of the vertical stacks includes, from bottom to top, a bottom electrode, a dielectric pillar, and a top electrode. A continuous active layer may be formed over the plurality of vertical stacks. A gate dielectric layer may be formed over the continuous active layer. The continuous active layer and the gate dielectric layer may be patterned into a plurality of active layers and a plurality of gate dielectrics. Each of the plurality of active layers laterally surrounds a respective one of the vertical stacks that are arranged along a first horizontal direction, and each of the plurality of gate dielectrics laterally surrounds a respective one of the active layers. Gate electrodes may be formed over the plurality of gate dielectrics.

A semiconductor structure and a method for forming the same are provided. The method for forming the semiconductor structure includes: providing a substrate; etching the substrate to form multiple active areas, trenches each positioned between adjacent active areas, and air gaps positioned below the active areas; and forming a filler layer filling at least each of the trenches.

A semiconductor memory device is provided. The semiconductor memory device includes a substrate; a transistor disposed above the substrate, the transistor having a channel region defining an inner space; and a capacitor passing through the transistor in a vertical direction in the inner space.

A preparation method for a semiconductor structure includes the following operations. A bit line structure, active pillars, and a word line structure are formed in turn on a substrate. Bottom ends of the active pillars are connected to the bit line structure, and the active pillars are connected with the word line structure. A pillar-shaped conductive structure is formed on the active pillars, and a cup-shaped conductive structure is formed on the pillar-shaped conductive structure. There is an electrode gap between the pillar-shaped conductive structure and the cup-shaped conductive structure, and the pillar-shaped conductive structure and the cup-shaped conductive structure form a lower electrode. A dielectric layer is formed on a surface of the lower electrode. An upper electrode is formed on a surface of the dielectric layer. The upper electrode fills the electrode gap.

[summary]

An epitaxial wafer is disclosed. The epitaxial wafer includes a substrate; and a stack disposed on the substrate, wherein the stack includes silicon (Si) layers and silicon germanium (SiGe) layers alternately stacked on top of each other, wherein the silicon germanium layer is doped with boron (B) or phosphorus (P).

An integrated circuit structure comprises one or more backend-of-line (BEOL) interconnects formed over a first ILD layer. An etch stop layer is over the one or more BEOL interconnects, the etch stop layer having a plurality of vias that are in contact with the one or more BEOL interconnects. An array of BEOL thin-film-transistors (TFTs) is over the etch stop layer, wherein adjacent ones of the BEOL TFTs are separated by isolation trench regions. The TFTs are aligned with at least one of the plurality of vias to connect to the one or more BEOL interconnects, wherein each of the BEOL TFTs comprise a bottom gate electrode, a gate dielectric layer over the bottom gate electrode, and an oxide-based semiconductor channel layer over the bottom gate electrode having source and drain regions therein. Contacts are formed over the source and drain regions of each of BEOL TFTs, wherein the contacts have a critical dimension of 35 nm or less, and wherein the BEOL TFTs have an absence of diluted hydro-fluoride (DHF).

Some embodiments include an integrated assembly having an active region which contains semiconductor material. The active region includes first, second and third source/drain regions within the semiconductor material, includes a first channel region within the semiconductor material and between the first and second source/drain regions, and includes a second channel region within the semiconductor material and between the second and third source/drain regions. The semiconductor material includes at least one element selected from Group 13 of the periodic table. A digit line is electrically coupled with the second source/drain region. A first transistor gate is operatively proximate the first channel region. A second transistor gate is operatively proximate the second channel region. A first storage-element is electrically coupled with the first source/drain region. A second storage-element is electrically coupled with the third source/drain region. Some embodiments include methods of forming integrated assemblies.

A three-dimensional semiconductor device includes a first channel pattern on and spaced apart from a substrate, the first channel pattern having a first end and a second end that are spaced apart from each other in a first direction parallel to a top surface of the substrate, and a first sidewall and a second sidewall connecting between the first end and the second end, the first and second sidewalls being spaced apart from each other in a second direction parallel to the top surface of the substrate, the second direction intersecting the first direction, a bit line in contact with the first end of the first channel pattern, the bit line extending in a third direction perpendicular to the top surface of the substrate, and a first gate electrode adjacent to the first sidewall of the first channel pattern.