An integrated circuit device includes a plurality of semiconductor layers stacked on a substrate to overlap each other in a vertical direction and longitudinally extending along a first horizontal direction. The plurality of semiconductor layers may have different thicknesses in the vertical direction.

According to an embodiment, a capacitor includes a conductive substrate, a conductive layer, and a dielectric layer. The conductive substrate has a first main surface and a second main surface and is provided with a plurality of recesses on the first main surface. The conductive substrate is further provided with a plurality of holes in one or more portions each sandwiched between two adjacent ones of the recesses such that a region on a side of the first main surface has a larger porosity than a region on a side of the second main surface. The conductive layer covers the first main surface, side walls and bottom surfaces of the recesses, and walls of the holes. The dielectric layer is interposed between the conductive substrate and the conductive layer.

A method of making a semiconductor device includes forming a first transistor on a substrate, wherein forming the first transistor comprises forming a first source/drain electrode in the substrate. The method further includes forming a second transistor on the substrate, wherein forming the second transistor comprises forming a second source/drain electrode. The method further includes forming an insulating layer extending into the substrate, wherein the insulating layer directly contacts the first source/drain electrode and the second source/drain electrode, a top surface of the insulating layer is above a top surface of the substrate.

Disclosed is a vertically stacked 3D memory device, and the memory device may include a bit line extended vertically from a substrate, and including a first vertical portion and a second vertical portion, a vertical active layer configured to surround the first and second vertical portions of the bit line, a word line configured to surround the vertical active layer and the first vertical portion of the bit line, and a capacitor spaced apart vertically from the word line, and configured to surround the vertical active layer and the second vertical portion of the bit line.

A semiconductor memory device includes a transistor having a gate, a source and a drain and a metal-insulator-semiconductor (MIS) structure. The transistor and the MIS structure are disposed on a common substrate. The MIS structure includes a dielectric layer disposed on a semiconductor region, and an electrode electrically disposed on the dielectric layer and coupled to the drain of the transistor. The electrode includes a bulk portion and a high-resistance portion, both disposed on the dielectric layer. The high-resistance portion has a resistance value in a range from 1.010.sup.4 cm to 1.010.sup.4 cm or a sheet resistance in a range from 1.010.sup.2/ to 1.010.sup.10/.

According to an embodiment, a capacitor includes a conductive substrate, a conductive layer, and a dielectric layer. The conductive substrate has a first main surface and a second main surface and is provided with a plurality of recesses on the first main surface. The conductive substrate is further provided with a plurality of holes in one or more portions each sandwiched between two adjacent ones of the recesses such that a region on a side of the first main surface has a larger porosity than a region on a side of the second main surface. The conductive layer covers the first main surface, side walls and bottom surfaces of the recesses, and walls of the holes. The dielectric layer is interposed between the conductive substrate and the conductive layer.

A memory structure including a SOI substrate, a first transistor, a second transistor, an isolation structure and a capacitor is provided. The SOI substrate includes a silicon base, a dielectric layer and a silicon layer. The first transistor and the second transistor are disposed on the silicon layer. The isolation structure is disposed in the silicon layer between the first transistor and the second transistor. The capacitor is disposed between the first transistor and the second transistor. The capacitor includes a body portion, a first extension portion, a second extension portion and a third extension portion. The first extension portion extends from the body portion to a source/drain region of the first transistor. The second extension portion extends from the body portion to a source/drain region of the second transistor. The third extension portion extends from the body portion, penetrates through the isolation structure and extends into the dielectric layer.

A semiconductor memory device includes a stack structure having a plurality of layers vertically stacked on a substrate, each layer including, a first bit line and a gate line extending in a first direction, a first semiconductor pattern extending in a second direction between the first bit line and the gate line, the second direction intersecting the first direction, and a second semiconductor pattern adjacent to the gate line across a first gate insulating layer, the second semiconductor pattern extending in the first direction, a first word line adjacent to the first semiconductor pattern and vertically extending in a third direction from the substrate, a second bit line connected to an end of the second semiconductor pattern and vertically extending in the third direction from the substrate, and a second word line connected to another end of the second semiconductor pattern and vertically extending in the third direction.

An integrated FinFET and deep trench capacitor structure and methods of manufacture are provided. The method includes forming deep trench capacitor structures in a silicon on insulator (SOI) wafer. The method further includes forming a plurality of composite fin structures from a semiconductor material of the SOI wafer and conductive material of the deep trench capacitor structures. The method further includes forming a liner over the deep trench capacitor structures including the conductive material of the deep trench capacitor structures. The method further includes forming replacement gate structures with the liner over the deep trench capacitor structures protecting the conductive material during deposition and etching processes.

A semiconductor device includes a substrate having a volatile memory region and a non-volatile memory region. The volatile memory region includes a cell capacitor disposed in the substrate and a cell transistor connected to the cell capacitor. The non-volatile memory region includes a plurality of non-volatile memory cells disposed on the substrate. The volatile memory region and the non-volatile memory region are disposed side by side.