An integrated FinFET and deep trench capacitor structure and methods of manufacture are disclosed. The method includes forming at least one deep trench capacitor in a silicon on insulator (SOI) substrate. The method further includes simultaneously forming polysilicon fins from material of the at least one deep trench capacitor and SOI fins from the SOI substrate. The method further includes forming an insulator layer on the polysilicon fins. The method further includes forming gate structures over the SOI fins and the insulator layer on the polysilicon fins.

A semiconductor structure and a method for fabricating the same. The semiconductor structure includes a substrate and a bonding layer in contact with a top surface of the substrate. At least one transistor contacts the bonding layer. The transistor includes at least one gate structure disposed on and in contact with a bottom surface of a semiconductor layer of the transistor. The semiconductor further includes a capacitor disposed adjacent to the transistor. The capacitor contacts the semiconductor layer of the transistor and extends down into the substrate. The method includes forming at least one transistor and then flipping the transistor. After the transistor has been flipped, the transistor is bonded to a new substrate. An initial substrate of the transistor is removed to expose a semiconductor layer. A capacitor is formed adjacent to the transistor and contacts with the semiconductor layer. A contact node is formed adjacent to the capacitor.

To provide a highly integrated semiconductor memory device. To provide a semiconductor memory device which can hold stored data even when power is not supplied. To provide a semiconductor memory device which has a large number of write cycles. The degree of integration of a memory cell array is increased by forming a memory cell including two transistors and one capacitor which are arranged three-dimensionally. The electric charge accumulated in the capacitor is prevented from being leaking by forming a transistor for controlling the amount of electric charge of the capacitor in the memory cell using a wide-gap semiconductor having a wider band gap than silicon. Accordingly, a semiconductor memory device which can hold stored data even when power is not supplied can be provided.

Described is an apparatus for a hybrid eDRAM and MRAM memory cell comprising: a capacitor having a first terminal and a second terminal; a first transistor having a gate terminal coupled to a first word line (WL), a source/drain terminal coupled to bit line (BL), and drain/source terminal coupled to the first terminal of the capacitor; a resistive memory element having a first terminal and a second terminal, the first terminal of the resistive memory element device coupled to the first terminal of the capacitor; and a second transistor having a gate terminal coupled to a second WL, a source/drain terminal coupled to source line (SL), and drain/source terminal coupled to the second terminal of the resistive memory element device.

An integrated FinFET and deep trench capacitor structure and methods of manufacture are provided. The method includes forming deep trench capacitor structures in a silicon on insulator (SOI) wafer. The method further includes forming a plurality of composite fin structures from a semiconductor material of the SOI wafer and conductive material of the deep trench capacitor structures. The method further includes forming a liner over the deep trench capacitor structures including the conductive material of the deep trench capacitor structures. The method further includes forming replacement gate structures with the liner over the deep trench capacitor structures protecting the conductive material during deposition and etching processes.

A semiconductor memory device includes a transistor having a gate, a source and a drain and a metal-insulator-semiconductor (MIS) structure. The transistor and the MIS structure are disposed on a common substrate. The MIS structure includes a dielectric layer disposed on a semiconductor region, and an electrode electrically disposed on the dielectric layer and coupled to the drain of the transistor. The electrode includes a bulk portion and a high-resistance portion, both disposed on the dielectric layer. The high-resistance portion has a resistance value in a range from 1.010.sup.4 cm to 1.010.sup.4 cm or a sheet resistance in a range from 1.010.sup.2/ to 1.010.sup.10/.

An integrated FinFET and deep trench capacitor structure and methods of manufacture are disclosed. The method includes forming at least one deep trench capacitor in a silicon on insulator (SOI) substrate. The method further includes simultaneously forming polysilicon fins from material of the at least one deep trench capacitor and SOI fins from the SOI substrate. The method further includes forming an insulator layer on the polysilicon fins. The method further includes forming gate structures over the SOI fins and the insulator layer on the polysilicon fins.

A memory cell structure includes a silicon substrate, a transistor, a bit line, and a capacitor. The silicon substrate has a silicon surface. The transistor is coupled to the silicon surface, wherein the transistor includes a gate structure, a first conductive region, and a second conductive region. The bit line is electrically coupled to the first conductive region of the transistor and positioned under the silicon surface. The capacitor is over the transistor and electrically coupled to the second conductive region of the transistor.

A non-volatile memory device with a programmable leakage can be formed employing a trench capacitor. After formation of a deep trench, a metal-insulator-metal stack is formed on surfaces of the deep trench employing a dielectric material that develops leakage path filaments upon application of a programming bias voltage. A set of programming transistors and a leakage readout device can be formed to program, and to read, the state of the leakage level. The non-volatile memory device can be formed concurrently with formation of a dynamic random access memory (DRAM) device by forming a plurality of deep trenches, depositing a stack of an outer metal layer and a node dielectric layer, patterning the node dielectric layer to provide a first node dielectric for each non-volatile memory device that is thinner than a second node dielectric for each DRAM device, and forming an inner metal layer.

An integrated FinFET and deep trench capacitor structure and methods of manufacture are disclosed. The method includes forming at least one deep trench capacitor in a silicon on insulator (SOI) substrate. The method further includes simultaneously forming polysilicon fins from material of the at least one deep trench capacitor and SOI fins from the SOI substrate. The method further includes forming an insulator layer on the polysilicon fins. The method further includes forming gate structures over the SOI fins and the insulator layer on the polysilicon fins.