Some embodiments include a memory cell having a first transistor supported by a semiconductor base, and having second and third transistors above the first transistor and vertically stacked one atop the other. Some embodiments include a memory cell having first, second and third transistors. The third transistor is above the second transistor, and the second and third transistors are above the first transistor. The first transistor has first and second source/drain regions, the second transistor has third and fourth source/drain regions, and the third transistor has fifth and sixth source/drain regions. A read bitline is coupled with the sixth source/drain region. A write bitline is coupled with the first source/drain region. A write wordline includes a gate of the first transistor. A read wordline includes a gate of the third transistor. A capacitor is coupled with the second source/drain region and with a gate of the second transistor.

An array of vertical transistors comprises spaced pillars individually comprising a channel region of individual vertical transistors. A horizontally-elongated conductor line directly electrically couples together individual of the channel regions of the pillars of a plurality of the vertical transistors. An upper source/drain region is above the individual channel regions of the pillars, a lower source/drain region is below the individual channel regions of the pillars, and a conductive gate line is operatively aside the individual channel regions of the pillars and that interconnects multiple of the vertical transistors. Methods are disclosed.

A semiconductor memory device is provided such as a random-access memory (DRAM) including a plurality of DRAM memory cells. Each of the DRAM cells includes an N-type transistor, a P-type transistor, and a common capacitor. The components are disposed in the same direction as the bit-line, with the common capacitor occupying the center region between the N- and P-type transistors. The common capacitor is a metal insulator metal (MIM) capacitor configured by connecting three capacitor elements in parallel. The three capacitors include a first capacitor element formed on a first source/drain region of the N-type transistor, a second capacitor element formed on a first source/drain region of the P-type transistor, and a third element over the field isolation region between the transistors. A bottom electrode of each of these capacitor elements connects the first source/drain region of the N-type transistor to a first source/drain region of the P-type transistor.

A method of forming an array of capacitors comprises forming a plurality of horizontally-spaced groups that individually comprise a plurality of horizontally-spaced lower capacitor electrodes having a capacitor insulator thereover. Adjacent of the groups are horizontally spaced farther apart than are adjacent of the lower capacitor electrodes within the groups. A void space is between the adjacent groups. An upper capacitor electrode material is formed in the void space and in the groups over the capacitor insulator and the lower capacitor electrodes. The upper capacitor electrode material in the void space connects the upper capacitor electrode material that is in the adjacent groups relative to one another. The upper capacitor electrode material less-than-fills the void space. At least a portion of the upper capacitor electrode material is removed from the void space to disconnect the upper capacitor electrode material in the adjacent groups from being connected relative to one another. A horizontally-elongated conductive line is formed atop and is directly electrically coupled to the upper capacitor electrode material in individual of the groups. Other methods, including structure independent of method of manufacture, are disclosed.

Three-dimensional (3D) semiconductor devices and fabricating methods are disclosed. The semiconductor device includes an array of vertical transistors. Each vertical transistor includes a semiconductor body extending in a vertical direction, and an all-around gate structure laterally surrounding the semiconductor body. Each row of the vertical transistors in a first lateral direction share a common word line extending in the first lateral direction and comprising the all-around gate structures of the row of the vertical transistors. Adjacent rows of the vertical transistors are misaligned along a second lateral direction perpendicular with the first lateral direction. The array of vertical transistors are aligned along a third lateral direction different from the first lateral direction and the second lateral direction.

A capacitor is provided. The capacitor includes a substrate, at least two conductive plates formed in the substrate and extending into the substrate, at least one insulating structure formed between two adjacent conductive plates of the at least two conductive plates and extending into the substrate, and a plurality of contacts, each extending into respective one of the at least two conductive plates.

Some embodiments include a memory cell having first, second and third transistors, with the second and third transistors being vertically displaced relative to one another. The memory cell has a semiconductor pillar extending along the second and third transistors, with the semiconductor pillar containing channel regions and source/drain regions of the second and third transistors. A capacitor may be electrically coupled between a source/drain region of the first transistor and a gate of the second transistor.

Some embodiments include a memory cell having a first transistor supported by a semiconductor base, and having second and third transistors above the first transistor and vertically stacked one atop the other. Some embodiments include a memory cell having first, second and third transistors. The third transistor is above the second transistor, and the second and third transistors are above the first transistor. The first transistor has first and second source/drain regions, the second transistor has third and fourth source/drain regions, and the third transistor has fifth and sixth source/drain regions. A read bitline is coupled with the sixth source/drain region. A write bitline is coupled with the first source/drain region. A write wordline includes a gate of the first transistor. A read wordline includes a gate of the third transistor. A capacitor is coupled with the second source/drain region and with a gate of the second transistor.

Semiconductor structures, fabrication methods thereof, and memory systems are provided. In one aspect, a method of forming a semiconductor structure includes: forming a plurality of first trenches in a semiconductor base from a surface of the semiconductor base, forming a plurality of gate structures in the plurality of first trenches, forming a plurality of second trenches in the semiconductor base, and forming a plurality of isolation structures in the plurality of second trenches. The plurality of first trenches extend along a first direction. Each of the plurality of second trenches is between two adjacent trenches of the plurality of first trenches, and the plurality of second trenches extend along the first direction.

Systems, devices, and methods for managing vertical structures in three-dimensional (3D) semiconductor devices are provided. In one aspect, a method includes: providing a semiconductor substrate, and forming isolating regions between a plurality of adjacent vertical transistors in the semiconductor substrate. Each vertical transistor of the plurality of adjacent vertical transistors extends along a vertical direction. Two adjacent vertical transistors and a corresponding isolating region between the two adjacent vertical transistors are positioned along a horizontal direction perpendicular to the vertical direction. The corresponding isolating region includes a conductive material, and, along the vertical direction, a length of the conductive material in the corresponding isolating region is greater than a length of a vertical gate of each of the two adjacent vertical transistors.