H10N30/081

Piezoelectric transducers and methods of making and using the same

Piezoelectric transducers are provided. The piezoelectric transducer includes a first piezoelectric layer, a second piezoelectric layer disposed on at least a portion of the first piezoelectric layer, and a middle electrode layer disposed between the first and second piezoelectric layers, where the middle electrode layer includes an inner region and an outer region spaced apart from the inner region. Methods of making the piezoelectric transducers are also provided. The piezoelectric transducers and methods find use in a variety of applications, including devices, such as electronics devices having one or more (e.g., an array) of the piezoelectric transducers.

Method for the fabrication and harvest of piezoelectric plates

A method is provided for fabricating piezoelectric plates. A sacrificial layer is formed overlying a growth substrate. A template layer, with openings exposing sacrificial layer surfaces, is formed over the sacrificial layer. An adhesion layer/first electrode stack is selectively deposited in the openings overlying the sacrificial layer surfaces, and a piezoelectric material formed in the openings overlying the stack. Then, a second electrode is formed overlying the piezoelectric material. Using the second electrode as a hardmask, the piezoelectric material is etched to form polygon-shaped structures, such as disks, attached to the sacrificial layer surfaces. After removing the template layer and annealing, the polygon-shaped structures are separated from the sacrificial layer. With the proper choice of growth substrate material, the annealing can be performed at a relatively high temperature.

Electroacoustic conversion film web, electroacoustic conversion film, and method of manufacturing an electroacoustic conversion film web
10770647 · 2020-09-08 · ·

Provided are an electroacoustic conversion film web, an electroacoustic conversion film, and a method of manufacturing an electroacoustic conversion film web in which costs can be reduced by reducing the number of operations without damage to thin film electrodes, the points of electrode lead-out portions can be freely determined, and thus high productivity can be achieved. A preparation step of preparing an electrode laminated body in which a single thin film electrode and a single protective layer are laminated and a lamination step of laminating the electrode laminated body and an piezoelectric layer are included. A non-adhered portion that is not adhered to the piezoelectric layer is provided in at least one end portion of the thin film electrode in a case where the electrode laminated body and the piezoelectric layer are laminated in the lamination step.

Porosity control in piezoelectric films
10751756 · 2020-08-25 ·

A piezoelectric film having a porosity between 20 and 40%, a thickness ranging from tens of microns to less than a few millimeters can be used to form an ultrasonic transducer UT for operation in elevated temperature ranges, that emit pulses having a high bandwidth. Such piezoelectric films exhibit greater flexibility allowing for conformation of the UT to a surface, and obviate the need for couplings or backings. Furthermore, a method of fabricating an UT having these advantages as well as better bonding between the piezoelectric film and electrodes involves controlling porosity within the piezoelectric film.

MICROMACHINED ULTRASONIC TRANSDUCER ARRAYS WITH MULTIPLE HARMONIC MODES
20200156109 · 2020-05-21 ·

Micromachined ultrasonic transducer (MUT) arrays capable of multiple resonant modes and techniques for operating them are described, for example to achieve both high frequency and low frequency operation in a same device. In embodiments, various sizes of piezoelectric membranes are fabricated for tuning resonance frequency across the membranes. The variously sized piezoelectric membranes are gradually transitioned across a length of the substrate to mitigate destructive interference between membranes oscillating in different modes and frequencies.

Elastic wave device

Functional element units and a connection line electrically connecting the functional element units are formed on one principal surface of a piezoelectric motherboard. A resin support layer enclosing the functional element units is formed on the one principal surface of the motherboard. An elastic wave device with the functional units is obtained by dividing a multilayer body including the motherboard, the functional element units, and the support layer into a plurality of sections along a dicing line. The connection line includes a line main body positioned on the dicing line, and a connection unit in which the line main body and the functional element units are electrically connected. Prior to dividing the multilayer body, a retaining member made of resin which straddles the line main body in the width direction of the line main body is formed separate from the support layer on the motherboard.

Piezoelectric element with sponge structure and method of manufacturing the same

The present invention relates to a sponge type piezoelectric element and a method of manufacturing the same, and specifically, to a piezoelectric element that is provided in a sponge form and thus can implement all of compressibility, flexibility, and durability and diversely applied to a wearable piezoelectric element, a ferroelectric element, and a sensor.

COATING LIQUID COMPOSITION FOR FORMING PIEZOELECTRIC FILM, ORIENTED PIEZOELECTRIC FILM, AND LIQUID EJECTION HEAD

A sodium niobate-barium titanate-based coating liquid composition including: (a) a sol-gel raw material containing (i) a niobium component, such as a niobium alkoxide, (ii) a sodium component, such as a sodium alkoxide, (iii) a titanium component, such as a titanium alkoxide, and (iv) a barium component, such as a barium alkoxide; and (b) a compound including at least one kind selected from the group consisting of a -ketoester compound and a -diketone compound represented by the following formula (1):

##STR00001## where R.sub.1 represents an alkyl group having 1 or more to 6 or less carbon atoms.

Power generator, manufacturing method, and electronic device
10615720 · 2020-04-07 · ·

The present disclosure provides a power generator, its manufacturing method, and an electronic device utilizing the power generator as its power source. The power generator includes a deformation unit and a piezoelectric unit. The deformation unit is coupled to the piezoelectric unit; and the deformation unit comprises a conductive polymer, which is configured to deform upon contacting moisture to thereby apply a mechanical force to the piezoelectric unit to thereby generate electricity.

CROSSLINKABLE COMPOSITIONS BASED ON ELECTROACTIVE FLUORINATED COPOLYMERS

The invention relates to crosslinkable compositions based on electroactive fluorinated copolymers, to crosslinked films obtained from such compositions and also to a process for preparing these films. The invention also relates to the use of said films as a dielectric layer in various (opto)electronic devices: piezoelectric, ferroelectric or pyroelectric devices.