Patent classifications
H
ELECTRICITY
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H10
SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
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H10N
ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
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30/00
Piezoelectric or electrostrictive devices
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H10N30/01
Manufacture or treatment
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H10N30/08
Shaping or machining of piezoelectric or electrostrictive bodies
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H10N30/082
by etching, e.g. lithography
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