An actuator in the form of a stack is described, wherein the stack includes multiple first pairs of layers of a polarized electromechanical material and multiple second pairs of layers of a polarized electromechanical material, and the first and second pairs of layers are disposed, one behind the other, wherein at each pair of layers on each of its terminal surfaces electrically conductive layers are disposed, and, between the layers of each pair of layers, an electrically conductive layer for connection to at least one connection electrode of a second polarity is disposed, and the polarization directions of the electromechanical material of the layers of each pair are aligned opposite to one another, and the directions of polarization of the material of the layers of each pair of layers are aligned perpendicular to the directions of polarization of the material of the layers of each adjacent pair of layers.

A nanovoided polymer-based material may include a bulk polymer material defining a plurality of nanovoids and an interfacial film disposed at an interface between each of the plurality of nanovoids and the bulk polymer material. The interfacial film may include one or more layers of material. A method of forming a nanovoided polymer-based material may include (1) forming a bulk polymer material defining a plurality of nanovoids and (2) forming an interfacial film at an interface between each of the plurality of nanovoids and the bulk polymer material. Various other methods, systems, and materials are also disclosed.

Provided is a vibration wave motor, including: a vibrator including a piezoelectric element and a vibrating plate; a friction member, which includes a friction-contact surface to be brought into contact with the vibrator, and is configured to perform relative movement with respect to the vibrator by vibration generated by the vibrator; and a guide mechanism, which includes a first guide member, a second guide member, and a rolling member arranged between the first guide member and the second guide member, and is configured to guide the relative movement, wherein the first guide member includes a groove portion formed of a first surface and a second surface to be brought into contact with the rolling member, and wherein the first surface is longer than the second surface in a direction of the relative movement.

A thin-film piezoelectric-material element includes a laminated structure part having a lower electrode film, a piezoelectric-material film laminated on the lower electrode film and an upper electrode film laminated on the piezoelectric-material film, a lower piezoelectric-material protective-film being formed with alloy material, and an upper piezoelectric-material protective-film being formed with alloy material. The piezoelectric-material film includes a size larger than the upper electrode film, a riser end-surface and step-surface formed on a top-surface of the upper electrode film side. The riser end-surface connects smoothly with a peripheral end-surface of the upper electrode film and vertically intersects with the top-surface. The step-surface intersects vertically with the riser end-surface. The lower piezoelectric-material protective-film, and the upper piezoelectric-material protective-film are formed with alloy material including Fe as main ingredient and having Co and Mo, by Ion beam deposition.

In some examples, a method includes forming a material layer on a substrate, partially polymerizing a component of the material layer, to form fluid-filled droplets within a partially polymerized matrix, deforming the material layer to form anisotropic fluid-filled droplets, and further polymerizing the partially polymerized matrix to form an anisotropic voided polymer, including anisotropic voids in a polymer matrix. The anisotropic voids may include anisotropic nanovoids. Example methods may further include depositing electrodes on the anisotropic voided polymer so that at least a portion of the anisotropic voided polymer is located between the electrodes. Examples may include forming electroactive elements including an anisotropic nanovoided polymer, and devices (such as sensors and/or actuators) including electroactive elements.

In some examples, a device includes a multilayer structure, a first electrode, and a second electrode, where the multilayer structure is located at least in part between the first electrode and the second electrode, and the multilayer structure includes a nanovoided polymer layer, and a solid layer. The solid layer may include a non-nanovoided layer. The nanovoided polymer layer may be an electroactive layer. The device may further include a control circuit configured to apply an electrical potential between the first electrode and the second electrode, which may induce a mechanical deformation of the multilayer.

In at least one illustrative embodiment, a microelectromechanical system (MEMS) includes a composable piezoelectric actuator electrically coupled to a terminal. In response to a voltage applied across electrodes of the actuator, a piezoelectric rod moves from an initial position to a displaced position. In an embodiment, the MEMS includes two terminals, a resistive element is coupled between the terminals, and when in the displaced position the rod contacts one of the terminals. In an embodiment, the MEMS includes three terminals, and when a threshold voltage is applied to one of the terminals, the rod moves to the displaced position and allows current to flow between the other two terminals. In an embodiment, the MEMS includes a primary set of actuators that are mechanically but not electrically connected to a secondary set of actuators. An output terminal is coupled to the second set of actuators. Other embodiments are described and claimed.

A hybrid actuator is provided in which a piezoelectric element and an actuator are incorporated with each other. The hybrid actuator includes: a housing; a stator secured to the housing and having a coil; a vibrator having a permanent magnet configured to vibrate due to a mutual electromagnetic force with the stator; an elastic member configured to elastically support the vibrator relative to the housing; a piezoelectric element attached to one surface of the housing; and an F-PCB (flexible printed circuit board) applying an electric current to the piezoelectric element and the coil inside the housing. A part of the F-PCB extends outside the housing. Input terminals are formed on the part of the F-PCB which extends outside the housing. The input terminals are configured to receive a vibration signal and an audio signal so that the hybrid actuator can reproduce both the vibration signal and the audio signal.

An example device includes a nanovoided polymer element, a first electrode, and a second electrode. The nanovoided polymer element may be located at least in part between the first electrode and the second electrode. In some examples, the nanovoided polymer element may include anisotropic voids. In some examples, anisotropic voids may be elongated along one or more directions. In some examples, the anisotropic voids are configured so that a polymer wall thickness between neighboring voids is generally uniform. Example devices may include a spatially addressable electroactive device, such as an actuator or a sensor, and/or may include an optical element. A nanovoided polymer layer may include one or more polymer components, such as an electroactive polymer.

The invention provides a substrate support arranged to support a substrate, comprising piezo a actuator, further comprising a first pair of electrodes, a second pair of electrodes and a piezo material having a first surface and a second surface. The first surface is arranged along a first direction and second direction. The first pair of electrodes comprises a first electrode arranged on the first surface and a second electrode arranged on the second surface. The second pair of electrodes is arranged to shear the piezo material. The first pair of electrodes is arranged to elongate the piezo material in a third direction perpendicular to the first direction and second direction. The first electrode is divided into at least two parts and is arranged to rotate the first surface and the second surface relatively to each other about the first direction wherein the piezo actuator is arranged to support the substrate.