A display device includes a scanned projector for projecting a beam of light, and a diffraction grating for dispersing the light at a plurality of angles into a waveguide, wherein at least a portion of the diffraction grating includes a nanovoided polymer. Manipulation of the nanovoid topology, such as through capacitive actuation, can be used to reversibly control the effective refractive index of the nanovoided polymer and hence the grating efficiency. The switchable grating can be used to control the amount of diffraction of an incident beam of light through the grating thereby decreasing optical loss. Various other methods, systems, apparatuses, and materials are also disclosed.

In some examples, a device includes a nanovoided polymer element, a planarization layer disposed on a surface of the nanovoided polymer element, a first electrode disposed on the planarization layer, and a second electrode. The nanovoided polymer element may be located at least in part between the first electrode and the second electrode. The planarization layer may be located between the nanovoided polymer element and the first electrode.

A piezoelectric device that includes a film that has a first main surface and a second main surface, and has piezoelectricity; a first substrate; and a first connection member that connects the film to the first substrate. The first connection member is a thermosetting resin, and a curing temperature of the first connection member is lower than a temperature at which the film thermally contracts.

A piezoelectric device includes a piezoelectric vibrating piece, a container, and a lid. The piezoelectric vibrating piece is bevel processed and has a bevel surface at one end of the piezoelectric vibrating piece. Thea container holds the piezoelectric vibrating piece with the bevel surface at the one end of the piezoelectric vibrating piece. The container has a connection pad at a holding region of the container and a pillow portion at a region corresponding to the other end of the piezoelectric vibrating piece. The lid member seals the container. The connection pad is buried in the container at the holding region in a state of a flat surface with a surface of the container and in a state where the surface of the connection pad is exposed. The piezoelectric vibrating piece is spanned between the surface of the connection pad and a top surface of the pillow portion.

A vibration actuator that is capable of reducing difference of vibration velocities when a contact member is driven using a plurality of vibrators. The vibration actuator includes a vibrator device and a contact member that moves relative to the vibrator device. The vibrator device includes a plurality of vibrators that are connected in series, and a plurality of inductors that are connected in parallel to the respective vibrators.

A control method of a piezoelectric driving device which includes a vibrator including a piezoelectric element and vibrating by application of a drive signal to the piezoelectric element, a driven unit moving by the vibration of the vibrator, a drive signal generation unit generating the drive signal based on a pulse signal, the control method including: stopping the application of the drive signal to the piezoelectric element at the time when a driving speed of the driven unit is a reference speed, in a case of stopping driving of the driven unit.

An inkjet print head includes an actuator substrate that has an ink flow passage including a pressure chamber, a movable film formation layer that includes a movable film disposed on the pressure chamber and demarcating a top surface portion of the pressure chamber, a piezoelectric element that includes a lower electrode disposed on the movable film, a piezoelectric film formed on the lower electrode, and an upper electrode formed on the piezoelectric film, a hydrogen barrier film that covers at least entire side surfaces of the upper electrode and the piezoelectric film among surfaces of the piezoelectric element, an interlayer insulating film that is formed on the movable film formation layer such as to cover the hydrogen barrier film, and a wiring that is formed on the interlayer insulating film and is connected to the piezoelectric element and a fuse is inserted in an intermediate portion of the wiring.

A system having improved trapping force for acoustophoresis is described where the trapping force is improved by manipulation of the frequency of the ultrasonic transducer. The transducer includes a ceramic crystal. The crystal may be directly exposed to fluid flow. The crystal may be air backed, resulting in a higher Q factor.

A method of fabricating pre-structured functional wafers, pre-structured functional cuboid or wafer stack, and a method of fabricating an array of functional multilayer stack actuators made of relaxor ferroelectric single crystal piezoelectric thin layers comprising sequentially repeated steps of wafer dicing and trench refilling into relatively thick wafer(s). A bulk-micromachined dimensioned deformable mirror device comprising a base supporting substrate, a plurality of stack actuators that is made by segmenting a pre-structured relaxor ferroelectric single crystal piezoelectric cuboid or wafer stack, a plurality of pedestals disposed on the plurality of stack actuators; a deformable membrane mirror mounted on said pedestals; and a plurality of addressable electrode contacts.

An example device includes a nanovoided polymer element, a first electrode, and a second electrode. The nanovoided polymer element may be located at least in part between the first electrode and the second electrode. In some examples, the nanovoided polymer element may include anisotropic voids. In some examples, anisotropic voids may be elongated along one or more directions. In some examples, the anisotropic voids are configured so that a polymer wall thickness between neighboring voids is generally uniform. Example devices may include a spatially addressable electroactive device, such as an actuator or a sensor, and/or may include an optical element. A nanovoided polymer layer may include one or more polymer components, such as an electroactive polymer.