A microelectromechanical systems (MEMS) scanning device comprising a torsional beam flexure that has a variable width in relation to a rotational axis for a scanning mirror. The geometric properties of the torsional beam vary along the rotational axis to increase a desired mode of mechanical strain at a location where a strain sensor is operating within the MEMS scanning device to generate a feedback signal. The torsional beam flexure mechanically suspends the scanning mirror from a frame structure. During operation of the MEMS scanning device, actuators induce torsional deformation into the torsional beam flexure to cause rotation of the scanning mirror about the rotational axis. The degree or amount of this torsional deformation is directly related to the angular position of the scanning mirror and, therefore, the desired mode of mechanical strain may be this torsional deformation strain component.

A piezoelectric element includes a stack including a plurality of internal electrodes and a plurality of piezoelectric layers stacked on one another, and a surface electrode located on a side surface of the stack and electrically connected to the plurality of internal electrodes. The stack includes the piezoelectric layers being stacked and the internal electrodes each between adjacent piezoelectric layers. The internal electrodes include a first electrode that applies a voltage to the piezoelectric layers to cause the stack to bend in a first direction (X-direction) orthogonal to a longitudinal direction (Z-direction) of the stack, and a second electrode that applies a voltage to the piezoelectric layers to cause the stack to bend in a second direction (Y-direction) orthogonal to the longitudinal direction and to the first direction. The stack includes a groove extending in the longitudinal direction on an upper surface of the stack.

A MicroElectroMechanical System is provided, with an active element configured to carry out an electromechanical function, the active element including, from an upper face to a lower face substantially parallel to the upper face, an active layer, a core layer, and a retention layer, the active layer being configured to, under the effect of a first electric signal, go into a mechanically stressed state, configured to generate a bending of the active element in a direction perpendicular to a front face thereof, and vice versa, the active layer, the core layer, and the retention layer being arranged so that a neutral axis, associated with an elongation of zero in a case of bending of the active element, is located in a volume of one or the other of the core layer and of the retention layer, and the core layer further includes at least 20% recesses in its volume.

A piezoelectric transducer includes beam portions each with a fixed end portion and extending in a direction away from the fixed end portion. A base portion is connected to the fixed end portion of each of the beam portions. The beam portions extends in a same plane, and respective extending directions of at least two beam portions are different from each other. The beam portions each include a single crystal piezoelectric layer having a polarization axis in a same direction, an upper electrode layer, and a lower electrode layer. A polarization axis has a polarization component in the plane. An axial direction of an orthogonal axis that is orthogonal to the polarization axis and extends in the above-described plane intersects with an extending direction of each of the plurality of beam portions.

An actuator includes a stack including: an elastomer layer; and an elastic electrode disposed on each surface of the elastomer layer, in which the stack is subjected to a pre-strain of 50% or more at least in one direction. The stack may have a round tubular shape with the elastic electrodes disposed on opposite surfaces of the elastomer layer in a radial direction of the stack.

An actuator includes a laminate including an elastomer layer and an electrode, in which the laminate has a spiral or concentric shape, pre-distortion is applied to at least one member out of the elastomer layer and the electrode, and area distortion of the at least one member is 10% or larger.

A tactile sensation providing apparatus includes an actuator and an object of vibration configured to provide a tactile sensation to a user by vibration of the vibration plate being transmitted to the object of vibration. The actuator includes a piezoelectric element, a vibration plate, and supports. The vibration plate has the piezoelectric element joined thereto and vibrates in accordance with displacement of the piezoelectric element. The supports support the vibration plate. The angles, when the actuator is not being driven, between the vibration plate and the supports are acute.

An apparatus for producing haptic feedback and an electronic device are disclosed. In an embodiment an apparatus includes a piezoelectric actuator and a mechanical structure, wherein the piezoelectric actuator is configured to modify its extension in a first direction, and wherein the mechanical structure is configured to deform as a result of a change in the extension of the piezoelectric actuator in such a way that an area of the mechanical structure is moved in relation to the piezoelectric actuator in a second direction which is perpendicular to the first direction.

An actuator includes a piezoelectric element, a vibration plate, and a holder. The vibration plate has the piezoelectric element joined thereto and vibrates an object of vibration in accordance with expansion and contraction of the piezoelectric element. The holder is joined to the vibration plate and holds the object of vibration. The height of the holder is less than the maximum bending displacement at which the piezoelectric element is not damaged by an external force.

A tactile vibration generator includes a supporting block, a vibration plate, and a vibration actuator. The vibration plate includes two parts. The vibration actuator is attached to a surface of the first part and the first part is not in contact with the supporting block to reduce transferring vibration to the supporting block. The second part is fixed to the supporting block.