The present disclosure relates to a piezoelectric single-crystal element, a MEMS device using same, and a method for manufacturing same, wherein the piezoelectric single-crystal element includes a wafer, a lower electrode stacked on the wafer, a piezoelectric single-crystal thin film stacked on the lower electrode, and an upper electrode stacked on the piezoelectric single-crystal thin film, wherein the piezoelectric single-crystal thin film is composed of PMN-PT, PIN-PMN-PT or Mn:PIN-PMN-PT, and the piezoelectric single-crystal thin film has a polarization direction set to a <001> axis, a <011> axis or a <111> axis, and a MEMS device using same.

An energy harvesting module includes a pendular unit with piezoelectric transducer elastically deformable in bending between a clamped end and a free end coupled to an inertial mass. The piezoelectric transducer includes two coplanar piezoelectric beams arranged side-by-side on either side of a central axis of the transducer, each of the piezoelectric beams including adjacent external and internal arms, arranged side-by-side and formed single-piece. The external arm of each beam has a clamped proximal end and a free distal end, and the internal arm of each beam has a free proximal end supporting the inertial mass, and a free distal end connected to the distal end of the adjacent external arm by a common junction.

A module includes a pendular unit with piezoelectric transducer elastically deformable in bending with a clamped end and a free end coupled to an inertial mass. The piezoelectric transducer includes at least one piezoelectric beam configured into two adjacent arms formed single-piece, with an external arm and an internal arm arranged side-by-side. The external arm has a clamped proximal end and a free distal end, and the internal arm has a free proximal end supporting the inertial mass, and a free distal end connected to the distal end of the adjacent external arm. An annular mount surrounds the beam at its proximal end and includes the clamp to which is fastened the proximal end of the external arm. The mount includes, in a central region in the vicinity of the clamp, a cavity inside which the inertial mass carried by the free proximal end of the internal arm can oscillate.

In a non-limiting embodiment, a device may include a substrate, and a hybrid active structure disposed over the substrate. The hybrid active structure may include an anchor region and a free region. The hybrid active structure may be connected to the substrate at least at the anchor region. The anchor region may include at least a segment of a piezoelectric stack portion. The piezoelectric stack portion may include a first electrode layer, a piezoelectric layer over the first electrode layer, and a second electrode layer over the piezoelectric layer. The free region may include at least a segment of a mechanical portion. The piezoelectric stack portion may overlap the mechanical portion at edges of the piezoelectric stack portion.

A microphone including a casing having a front wall, a back wall, and a side wall joining the front wall to the back wall, a transducer mounted to the front wall, the transducer including a substrate and a transducing element, the transducing element having a transducer acoustic compliance dependent on the transducing element dimensions, a back cavity cooperatively defined between the back wall, the side wall, and the transducer, the back cavity having a back cavity acoustic compliance. The transducing element is dimensioned such that the transducing element length matches a predetermined resonant frequency and the transducing element width, thickness, and elasticity produces a transducer acoustic compliance within a given range of the back cavity acoustic compliance.

A piezoelectric element includes a support member, a vibrator, a through electrode and a seed layer. The vibrator is disposed on an insulation film of the support member, and includes a piezoelectric film and an electrode coating film electrically connected to the piezoelectric film. The vibrator has a support region and a vibration region. The through electrode is electrically connected to the electrode coating film at the support region, and is disposed in a stacking direction of the support member and the vibrator. Between the piezoelectric film and the insulation film, the seed layer is disposed at a portion of the electrode coating film facing another portion of the electrode coating film connected to the through electrode in the stacking direction. The seed layer is made of material having a lattice constant closer to the piezoelectric film or material easier to cause the piezoelectric film to be self-aligned.

A piezoelectric microelectromechanical systems microphone can be mounted on a printed circuit board. The microphone can include a substrate with an opening between a bottom end of the substrate and a top end of the substrate. The microphone can include a single piezoelectric film layer disposed over the top end of the substrate and defining a diaphragm structure, the single piezoelectric film layer having substantially zero residual stress and formed from a piezoelectric wafer. The microphone can include one or more electrodes disposed over the diaphragm structure. The diaphragm structure is configured to deflect when subjected to sound pressure via the opening in the substrate.

Provided is a fluid viscosity measuring device including a support structure having an opening part, the opening part penetrating the support structure in a first direction, a driving resonator fixed to the support structure and extending to overlap the opening part, and a detection resonator fixed to the support structure and extending parallel to the driving resonator, the detection resonator being spaced apart from the driving resonator in the first direction. The driving resonator includes a first piezoelectric body. The detection resonator includes a second piezoelectric body. The first piezoelectric body and the second piezoelectric body have the same shape.

The present invention relates to a cantilever for a piezoelectric energy harvesting system, wherein the cantilever (2,20,30) comprises two layers (21,22,31,32) formed of polyvinylidene fluoride, and wherein a core layer (23,33) formed of a shim material is sandwiched between the two layers (21,22,31,32) formed of polyvinylidene fluoride

An integrated self-sustainable power supply includes a piezoelectric energy harvesting (PEH) beam, a power management unit (PMU) circuit located on the PEH beam, a rechargeable battery located on the PEH beam, and a positive regulated power supply output and a negative regulated power supply output. The PMU circuit includes electrical inputs/outputs. The rechargeable battery includes a negative access pad and a positive access pad, which are in electrical communication with the electrical inputs/outputs of the PMU circuit. The positive regulated power supply output and the negative regulated power supply output are also in electrical communication with the electrical inputs/outputs of the PMU circuit.