A method of manufacturing a memory device includes sequentially forming and then etching a preliminary selection device layer, a preliminary middle electrode layer, and a preliminary variable resistance layer on a substrate, thereby forming a selection device, a middle electrode, and a variable resistance layer. At least one of a side portion of the selection device or a side portion of the variable resistance layer is removed so that a first width of the middle electrode in a first direction parallel to a top of the substrate is greater than a second width of the variable resistance layer in the first direction or a third width of the selection device in the first direction. A capping layer is formed on at least one of a side wall of the etched side portion of the selection device or a side wall of the etched side portion of the variable resistance layer.

A memory device may include a substrate, a first conductive line on the substrate and extending in a first direction, a second conductive line over the first conductive line and extending in a second direction crossing the first direction, a third conductive line over the second conductive line and extending in the first direction, a first memory cell at an intersection of the first conductive line and the second conductive line and including a first selection element layer and a first variable resistance layer, and a second memory cell at an intersection of the second conductive line and the third conductive line and including a second selection element layer and a second variable resistance layer. A first height of the first selection element layer in a third direction perpendicular to the first and second directions is different than a second height of the second selection element layer in the third direction.

A phase-change memory element with an electrically isolated conductor is provided. The phase-change memory element includes: a first electrode and a second electrode; a phase-change material layer electrically connected to the first electrode and the second electrode; and at least two electrically isolated conductors, disposed between the first electrode and the second electrode, directly contacting the phase-change material layers.

Systems and methods for improving performance of a non-volatile memory that utilizes a Vacancy Modulated Conductive Oxide (VMCO) structure are described. The VMCO structure may include a layer of amorphous silicon (e.g., a Si barrier layer) and a layer titanium oxide (e.g., a TiO2 switching layer). In some cases, the VMCO structure or VMCO stack may use bulk switching or switching O-ion movements across an area of the VMCO structure, as opposed to switching locally in a constriction of vacancy formed filamentary path. A VMCO structure may be partially or fully embedded within a word line layer of a memory array.

Various embodiments of the present disclosure are directed towards a memory cell including a data storage structure disposed between a top electrode and a bottom electrode. The data storage structure includes a lower switching layer overlying the bottom electrode, and an upper switching layer overlying the lower switching layer. The lower switching layer comprises a dielectric material doped with a first dopant.

An integrated circuit device includes a resistive random access memory (RRAM) cell or a MIM capacitor cell having a dielectric layer, a top conductive layer, and a bottom conductive layer. The dielectric layer includes a peripheral region adjacent an edge of the dielectric layer and a central region surrounded by the peripheral region. The top conductive layer abuts and is above dielectric layer. The bottom conductive layer abuts and is below the dielectric layer in the central region, but does not abut the dielectric layer the peripheral region of the cell. Abutment can be prevented by either an additional dielectric layer between the bottom conductive layer and the dielectric layer that is exclusively in the peripheral region or by cutting of the bottom electrode layer short of the peripheral region. Damage or contamination at the edge of the dielectric layer does not result in leakage currents.

A vacancy-modulated conductive oxide (VMCO) resistive random access memory (ReRAM) device includes at least one interfacial layer between a semiconductor portion and a titanium oxide portion of a resistive memory element. The at least one interfacial layer includes an oxygen reservoir that can store oxygen atoms during operation of the resistive memory element. The at least one interfacial layer can include an interfacial metal oxide layer, a metal layer, and optionally, a ruthenium layer.

Resistive memory having confined filament formation is described herein. One or more method embodiments include forming an opening in a stack having a silicon material and an oxide material on the silicon material, and forming an oxide material in the opening adjacent the silicon material, wherein the oxide material formed in the opening confines filament formation in the resistive memory cell to an are enclosed by the oxide material formed in the opening.

A plurality of first conductive patterns is disposed on a substrate. Each of the plurality of first conductive patterns extends in a first direction. A first selection pattern is disposed on each of the plurality of first conductive patterns. A first barrier portion surrounds the first selection pattern. A first electrode and a first variable resistance pattern are disposed on the first selection pattern. A plurality of second conductive patterns is disposed on the first variable resistance pattern. Each of the plurality of second conductive patterns extends in a second direction crossing the first direction,

A resistive random access memory is provided. The resistive random access memory includes a bottom electrode, a top electrode, a resistance changeable layer, an oxygen reservoir layer and a reactive oxygen barrier layer. The bottom electrode is disposed on a substrate. The top electrode is disposed above the bottom electrode. The resistance changeable layer is disposed between the bottom electrode and the top electrode. The oxygen reservoir layer is disposed between the resistance changeable layer and the top electrode. The reactive oxygen barrier layer is disposed inside the oxygen reservoir layer.