A semiconductor device with resistive memory includes a bottom electrode disposed on a base structure, the bottom electrode having a structure that tapers up from the base structure to a tip of the bottom electrode. The semiconductor device also includes sidewall spacers on the sides of the bottom electrode, an interlayer dielectric deposition (ILD) outside the sidewall spacers, and a top dielectric layer disposed over the bottom electrode, and the sidewall spacers. The semiconductor device further includes a top electrode deposited over the bottom electrode within the sidewall spacers. A filament formation region is formed at the tip of the bottom electrode.

A semiconductor device with resistive memory includes a bottom electrode disposed on a base structure, the bottom electrode having a structure that tapers up from the base structure to a tip of the bottom electrode. The semiconductor device also includes sidewall spacers on the sides of the bottom electrode, an interlayer dielectric deposition (ILD) outside the sidewall spacers, and a top dielectric layer disposed over the bottom electrode, and the sidewall spacers. The semiconductor device further includes a top electrode deposited over the bottom electrode within the sidewall spacers. A filament formation region is formed at the tip of the bottom electrode.

A semiconductor structure includes an oxide ReRAM co-integrated with a drain region of a field effect transistor (FET). The oxide ReRAM has a tip region defined by a pointed cone that contacts a faceted upper surface of the drain region of the FET. Such a tip region enhances the electric field of the oxide ReRAM and thus helps to control forming of the conductive filament of the oxide ReRAM.

A nonvolatile memory cell includes a semiconductor layer including a first recess and a second recess. A first gate insulation layer is disposed on a bottom surface and side surfaces of the first recess. A second gate insulation layer is disposed on a bottom surface and side surfaces of the second recess. A variable resistive material layer is disposed on a first region of the semiconductor layer disposed between the first and second recesses. An insulation barrier layer disposed on a top surface and side surfaces of the variable resistive material layer. A gate electrode surrounding the insulation barrier layer and extending to fill the first and second recesses.

A semiconductor structure may include a vertical field effect transistor, the vertical field effect transistor may include a top source drain, a bottom source drain, and an epitaxial channel and a resistive random access memory below the vertical field effect transistor. The resistive random access memory may include an epitaxial oxide layer, a top electrode, and a bottom electrode. The top electrode, which may function as the bottom source drain of the vertical field effect transistor, may be in direct contact with the epitaxial channel of the vertical field effect transistor. The epitaxial oxide layer may separate the top electrode from the bottom electrode. The top source drain may be arranged between a dielectric material and the epitaxial channel. The dielectric material may be in direct contact with a top surface of the epitaxial channel. The epitaxial oxide layer may be composed of a rare earth oxide.

A method may include forming two vertical transport field effect transistors stacked one atop the other and separated by a resistive random access memory structure. The two vertical transport field effect transistors may include a source, a channel, and a drain, wherein a contact layer of the resistive random access memory structure functions as the drain of the two vertical transport field effect transistors. Forming the two vertical transport field effect transistors may further include forming a first source and a second source. The first source is a bottom source and the second source is a top source. The method may include forming a gate conductor layer surrounding the channel. The resistive random access memory structures may include faceted epitaxy defined by pointed tips. The pointed tips of the faceted epitaxy may extend vertically toward each other. The faceted epitaxy may be between the two vertical transport field effect transistors.

A one-transistor-two-resistor (1T2R) resistive random access memory (ReRAM) structure, and a method for forming the same, includes forming a vertical field effect transistor (VFET) including an epitaxial region located above a channel region and below a dielectric cap. The epitaxial region includes two opposing protruding regions of triangular shape bounded by <111> planes that extend horizontally beyond the channel region. A ReRAM stack is conformally deposited on the VFET. The ReRAM stack includes an oxide layer located directly above the epitaxial region, a top electrode layer directly above the oxide layer and a metal fill above the top electrode layer. Each of the two opposing protruding regions of the epitaxial region acts as a bottom electrode for the ReRAM stack.

A two-transistor-two-resistor (2T2R) resistive random access memory (ReRAM) structure, and a method for forming the same includes two vertical field effect transistors (VFETs) formed on a substrate, each VFET includes an epitaxial region located above a channel region and below a dielectric cap. The epitaxial region includes two opposing protruding regions of triangular shape that extend horizontally beyond the channel region. A metal gate material is disposed on and around the channel region. A portion of the metal gate material is located between the two VFETs. A ReRAM stack is deposited within two openings adjacent to a side of each VFET that is opposing the portion of the metal gate material located between the two VFETs. A portion of the epitaxial region in direct contact with the ReRAM stack acts as a bottom electrode for the ReRAM structure.

Methods, systems, and devices for tapered memory cell profiles are described. A tapered profile memory cell may mitigate shorts in adjacent word lines, which may be leveraged for accurately reading a stored value of the memory cell. The memory device may include a self-selecting memory component with a bottom surface and a top surface opposite the bottom surface. In some cases, the self-selecting memory component may taper from the bottom surface to the top surface. In other examples, the self-selecting memory component may taper from the top surface to the bottom surface. The top surface of the self-selecting memory component may be coupled to a top electrode, and the bottom surface of the self-selecting memory component may be coupled to a bottom electrode.

A variable resistance memory device includes a first electrode on a substrate, a variable resistance pattern on the first electrode, a second electrode on the variable resistance pattern, a selection pattern structure on the second electrode, and a third electrode on the selection pattern structure. The selection pattern structure may include a first leakage current prevention pattern and a selection pattern sequentially stacked, and the first leakage current pattern may include a two-dimensional transition metal dichalcogenide (TMDC) material.