Patent classifications
H01F10/3259
MAGNETIC TUNNEL JUNCTION WITH LOW SERIES RESISTANCE
An electrical device structure including a magnetic tunnel junction structure having a first tunnel junction dielectric layer positioned between a free magnetization layer and a fixed magnetization layer. A magnetization enhancement stack present on the magnetic tunnel junction structure. The magnetization enhancement stack includes a second tunnel junction layer that is in contact with the free magnetization layer of the magnetic tunnel junction structure, a metal contact layer present on the second tunnel junction layer, and a metal electrode layer present on the metal contact layer. A metallic ring on a sidewall of the magnetic enhancement stack, wherein a base of the metallic ring may be in contact with the free magnetization layer of the magnetic tunnel junction structure.
Dual Magnetic Tunnel Junction (DMTJ) Stack Design
A dual magnetic tunnel junction (DMTJ) is disclosed with a PL1/TB1/free layer/TB2/PL2/capping layer configuration wherein a first tunnel barrier (TB1) has a substantially lower resistancearea (RA.sub.1) product than RA.sub.2 for an overlying second tunnel barrier (TB2) to provide an acceptable net magnetoresistive ratio (DRR). Moreover, magnetizations in first and second pinned layers, PL1 and PL2, respectively, are aligned antiparallel to enable a lower critical switching current than when in a parallel alignment. An oxide capping layer having a RA.sub.CAP is formed on PL2 to provide higher PL2 stability. The condition RA.sub.1<RA.sub.2 and RA.sub.CAP<RA.sub.2 is achieved when TB1 and the oxide capping layer have one or both of a smaller thickness and a lower oxidation state than TB2, are comprised of conductive (metal) channels in a metal oxide or metal oxynitride matrix, or are comprised of a doped metal oxide or doped metal oxynitride layer.
APPARATUS AND METHODS OF FABRICATING A MAGNETO-RESISTIVE RANDOM ACCESS MEMORY (MRAM) DEVICE
Methods and apparatus for forming a magnetic tunnel element are provided herein. A method of forming a magnetic tunnel element includes: depositing a magnetic layer atop a cobalt-chromium seed layer; and depositing a tunnel layer atop the magnetic layer to form a magnetic tunnel element, wherein the magnetic tunnel element has a TMR greater than 100. For example, a cobalt/platinum material or one or more layers thereof may be deposited directly atop a cobalt-chromium seed layer to produce improved devices.
LOGIC DRIVE USING STANDARD COMMODITY PROGRAMMABLE LOGIC IC CHIPS COMPRISING NON-VOLATILE RANDOM ACCESS MEMORY CELLS
A multi-chip package includes: an interposer; a first IC chip over the interposer, wherein the first IC chip is configured to be programmed to perform a logic operation, comprising a NVM cell configured to store a resulting value of a look-up table, a sense amplifier having an input data associated with the resulting value from the NVM cell and an output data associated with the first input data of the sense amplifier, and a logic circuit comprising a SRAM cell configured to store data associated with the output data of the sense amplifier, and a multiplexer comprising a first set of input points for a first input data set for the logic operation and a second set of input points for a second input data set having data associated with the data stored in the SRAM cell, wherein the multiplexer is configured to select, in accordance with the first input data set, an input data from the second input data set as an output data for the logic operation; and a second IC chip over the interposer, wherein the first IC chip is configured to pass data associated with the output data for the logic operation to the second IC chip through the interposer.
MAGNETORESISTIVE MEMORY CELL AND METHOD FOR FABRICATING THE SAME
A magnetoresistive memory cell is provided including a substrate. An inter-layer dielectric layer is disposed on the substrate. A via structure is disposed in the inter-layer dielectric layer. A magnetic pinned layer is disposed on the via structure. A tunnel barrier layer is disposed on the magnetic pinned layer to cover a top and a sidewall of the magnetic pinned layer, wherein the tunnel barrier layer comprises a horizontal extending portion outward from a bottom of the sidewall. A magnetic free layer with a -like structure is disposed on the tunnel barrier layer, wherein the magnetic free layer is isolated from the magnetic pinned layer by the tunnel bather layer. A spacer is disposed on the sidewall of the magnetic free layer. The spacer extends to the inter-layer dielectric layer.
Tunnel magnetoresistive effect element
A TMR element includes a magnetic tunnel junction element unit and a side wall portion that includes an insulation material and is disposed on a side surface of the magnetic tunnel junction element unit. The magnetic tunnel junction element unit includes a reference layer, a magnetization free layer, a tunnel barrier layer that is stacked in a stack direction between the reference layer and the magnetization free layer, and a cap layer is stacked on the side of the magnetization free layer opposite to the tunnel barrier layer side. The side wall portion includes a first region that includes the insulation material and covers a side surface of at least one of the reference layer, the tunnel barrier layer, the magnetization free layer, or the cap layer of the magnetic tunnel junction element unit.
Magnetic memory device
According to one embodiment, a magnetic memory device includes a stacked structure that includes a first magnetic layer having a variable magnetization direction, a second magnetic layer having a fixed magnetization direction, and a nonmagnetic layer provided between the first magnetic layer and the second magnetic layer, wherein the entire first magnetic layer exhibits a parallel or antiparallel magnetization direction to the second magnetic layer, and has an anisotropic magnetic field Hk_film within a range from 1 kOe to +1 kOe.
ULTRASENSITIVE MAGNETIC TUNNELING JUNCTION SENSOR
A magnetic tunneling junction sensor includes a free ferromagnetic layer of material, a pinned ferromagnetic layer of material, the free ferromagnetic layer and the pinned ferromagnetic layer separated by a thin insulating layer of material through which electrons can tunnel, an oxidized silicon wafer, the free ferromagnetic layer, thin insulating layer and the pinned ferromagnetic layer deposited on the oxidized silicon wafer, and extrinsic magnetic flux
Avoiding Oxygen Plasma Damage During Hard Mask Etching in Magnetic Tunnel Junction (MTJ) Fabrication Process
An etch process flow for forming magnetic tunnel junction (MTJ) cells with enhanced throughput that also increases the magnetoresistive ratio and decreases critical dimension (CD) variation is disclosed. A photoresist pattern is formed on a dielectric antireflective coating (DARC), which contacts a top surface of a hard mask (HM) that is an uppermost MTJ layer. After a first ion beam etch (IBE) or reactive ion etch (RIE) transfers the pattern through the DARC, a second etch is used to transfer the pattern through the HM. The second etch includes an oxidant to passivate the pattern sidewalls and completely removes the photoresist layer because of one or both of a thicker DARC and thicker HM than in conventional processing. Accordingly, an oxygen etch typically used to remove the photoresist after the HM etch is avoided and thereby provides improved MTJ performance, especially for CDs<60 nm.
MAGNETIC TUNNEL JUNCTION ELEMENT WITH A ROBUST REFERENCE LAYER
A magnetic tunnel junction (MTJ) element including a free layer, a reference layer; and a tunnel barrier layer between the free layer and the reference layer. The reference layer includes a first pinned layer, a second pinned layer, an anti-ferromagnetic coupling (AFC) spacer layer between the first pinned layer and the second pinned layer, a texture decoupling layer, a polarization enhancement layer, and a coupling enhancement (CE) structure between the texture decoupling layer and the second pinned layer.