The disclosure relates to a compensation capacitor for an antenna of a magnetic resonance scanner and a corresponding antenna with a compensation capacitor. The compensation capacitor has a first electrode and a second electrode arranged in parallel. An insulation material configured to resist high voltages and a dielectric with low dielectric losses are arranged between the first and the second electrode. The second electrode and/or the dielectric may be moved relative to the first electrode such that a surface area of a projection of the surface of the first electrode along the surface normal of the first electrode to the surface of the second electrode and/or the dielectric is variable.

A variable-capacitance capacitor having first and second electrodes mobile with respect to each other and third and fourth electrodes insulated from the first and second electrodes, capable of receiving a control signal to vary the relative position of the first and second electrodes in order to vary the capacitance between the first and second electrodes, the capacitor further including a system for controlling the position of the second electrode with respect to the first electrode, the system being arranged so that, for at least one relative position of the second electrode with respect to the first electrode, the position of the second electrode with respect to the first electrode is independent from the voltage between the first and second electrodes.

The present invention generally relates to a MEMS DVC and a method for fabrication thereof. The MEMS DVC comprises a plate movable from a position spaced a first distance from an RF electrode and a second position spaced a second distance from the RF electrode that is less than the first distance. When in the second position, the plate is spaced from the RF electrode by a dielectric layer that has an RF plateau over the RF electrode. One or more secondary landing contacts and one or more plate bend contacts may be present as well to ensure that the plate obtains a good contact with the RF plateau and a consistent C.sub.max value can be obtained. On the figure PB contact is the plate bend contact, SL contact is the Second Landing contact and the PD electrode is the Pull Down electrode.

A capacitive sensor for detecting the movement of an object, such as actuation of a key of an operating unit, includes first and second electrodes that are provided for connection or mechanical coupling to or arrangement on the object, the distance of which second electrode from the first electrode changes when the object moves. The electrodes form a first capacitor with a volume between the electrodes, the size of which changes when the object moves. An evaluation unit determines a change of capacitance between the two electrodes resulting from a change of their spacing and volume. A deformable, non-gaseous first dielectric is arranged between the electrodes and defines at least one gas volume that is filled by a gaseous second dielectric that can escape from the gas volume when the two electrodes approach one another.

A capacitive MEMS structure comprising first and second opposing capacitor electrode arrangements, wherein at least one of the electrode arrangements is movable, and a dielectric material located adjacent to the second electrode arrangement, wherein the second electrode arrangement is patterned such that it includes electrode areas and spaces adjacent to the electrode areas, and wherein the dielectric material extends at least partially in or over the spaces.

A tunable capacitor includes a first electrode and a second electrode, each being formed of a conductive material. The tunable capacitor further includes a third electrode between the first electrode and the second electrode, and a dielectric material interposed between the first electrode and the third electrode, and between the second electrode and the third electrode. The third electrode is movable relative to the first electrode and the second electrode by a stepper motor, to adjust and tune a capacitance of the tunable capacitor.